8/1/2011	12:11:36 AM	Main Vac valve closed
8/1/2011	12:11:50 AM	Main Vac valve opened
8/1/2011	12:13:49 AM	Recipe started at 12:13 AM
8/1/2011	12:13:49 AM	Helium valve closed
8/1/2011	12:13:49 AM	BCl3 valve closed
8/1/2011	12:13:49 AM	PH3 valve closed
8/1/2011	12:13:49 AM	SiCl4 pre valve closed
8/1/2011	12:13:49 AM	SiCl4 post valve closed
8/1/2011	12:13:49 AM	Main Vac valve closed
8/1/2011	12:13:49 AM	Bypass valve closed
8/1/2011	12:13:49 AM	Bubbler valve closed
8/1/2011	12:13:49 AM	H2 valve opened
8/1/2011	12:13:49 AM	Helium MFC set to  0.000000
8/1/2011	12:13:49 AM	H2 MFC set to  500.000000
8/1/2011	12:13:49 AM	BCl3 MFC set to  0.000000
8/1/2011	12:13:49 AM	PHl3 MFC set to  0.000000
8/1/2011	12:13:49 AM	SiCl4 MFC set to  0.000000
8/1/2011	12:13:49 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:13:49 AM	Tube furnace set to 0
8/1/2011	12:14:54 AM	Helium valve closed
8/1/2011	12:14:54 AM	BCl3 valve closed
8/1/2011	12:14:54 AM	PH3 valve closed
8/1/2011	12:14:54 AM	SiCl4 pre valve closed
8/1/2011	12:14:54 AM	SiCl4 post valve closed
8/1/2011	12:14:54 AM	Main Vac valve closed
8/1/2011	12:14:54 AM	Bypass valve closed
8/1/2011	12:14:54 AM	H2 valve opened
8/1/2011	12:14:54 AM	Bubbler valve opened
8/1/2011	12:14:54 AM	Helium MFC set to  0.000000
8/1/2011	12:14:54 AM	H2 MFC set to  500.000000
8/1/2011	12:14:54 AM	BCl3 MFC set to  0.000000
8/1/2011	12:14:54 AM	PHl3 MFC set to  0.000000
8/1/2011	12:14:54 AM	SiCl4 MFC set to  0.000000
8/1/2011	12:14:54 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:14:54 AM	Tube furnace set to 1000
8/1/2011	12:33:14 AM	Helium valve closed
8/1/2011	12:33:14 AM	PH3 valve closed
8/1/2011	12:33:14 AM	Main Vac valve closed
8/1/2011	12:33:14 AM	Bypass valve closed
8/1/2011	12:33:14 AM	H2 valve opened
8/1/2011	12:33:14 AM	BCl3 valve opened
8/1/2011	12:33:14 AM	SiCl4 pre valve opened
8/1/2011	12:33:14 AM	SiCl4 post valve opened
8/1/2011	12:33:14 AM	Bubbler valve opened
8/1/2011	12:33:14 AM	Helium MFC set to  0.000000
8/1/2011	12:33:14 AM	H2 MFC set to  500.000000
8/1/2011	12:33:14 AM	BCl3 MFC set to  2.000000
8/1/2011	12:33:14 AM	PHl3 MFC set to  0.000000
8/1/2011	12:33:14 AM	SiCl4 MFC set to  60.000000
8/1/2011	12:33:14 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:33:15 AM	Tube furnace set to 1000
8/1/2011	12:49:14 AM	Helium valve closed
8/1/2011	12:49:14 AM	BCl3 valve closed
8/1/2011	12:49:14 AM	PH3 valve closed
8/1/2011	12:49:14 AM	SiCl4 pre valve closed
8/1/2011	12:49:15 AM	SiCl4 post valve closed
8/1/2011	12:49:15 AM	Main Vac valve closed
8/1/2011	12:49:15 AM	Bypass valve closed
8/1/2011	12:49:15 AM	H2 valve opened
8/1/2011	12:49:15 AM	Bubbler valve opened
8/1/2011	12:49:15 AM	Helium MFC set to  0.000000
8/1/2011	12:49:15 AM	H2 MFC set to  500.000000
8/1/2011	12:49:15 AM	BCl3 MFC set to  0.000000
8/1/2011	12:49:15 AM	PHl3 MFC set to  0.000000
8/1/2011	12:49:15 AM	SiCl4 MFC set to  0.000000
8/1/2011	12:49:15 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:49:15 AM	Tube furnace set to 975
8/1/2011	12:50:15 AM	Helium valve closed
8/1/2011	12:50:15 AM	BCl3 valve closed
8/1/2011	12:50:15 AM	PH3 valve closed
8/1/2011	12:50:15 AM	SiCl4 pre valve closed
8/1/2011	12:50:15 AM	SiCl4 post valve closed
8/1/2011	12:50:15 AM	Main Vac valve closed
8/1/2011	12:50:15 AM	Bypass valve closed
8/1/2011	12:50:15 AM	H2 valve opened
8/1/2011	12:50:15 AM	Bubbler valve opened
8/1/2011	12:50:15 AM	Helium MFC set to  0.000000
8/1/2011	12:50:15 AM	H2 MFC set to  500.000000
8/1/2011	12:50:15 AM	BCl3 MFC set to  0.000000
8/1/2011	12:50:15 AM	PHl3 MFC set to  0.000000
8/1/2011	12:50:15 AM	SiCl4 MFC set to  0.000000
8/1/2011	12:50:15 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:50:15 AM	Tube furnace set to 950
8/1/2011	12:51:15 AM	Helium valve closed
8/1/2011	12:51:15 AM	BCl3 valve closed
8/1/2011	12:51:15 AM	PH3 valve closed
8/1/2011	12:51:15 AM	SiCl4 pre valve closed
8/1/2011	12:51:15 AM	SiCl4 post valve closed
8/1/2011	12:51:15 AM	Main Vac valve closed
8/1/2011	12:51:15 AM	Bypass valve closed
8/1/2011	12:51:15 AM	H2 valve opened
8/1/2011	12:51:15 AM	Bubbler valve opened
8/1/2011	12:51:15 AM	Helium MFC set to  0.000000
8/1/2011	12:51:15 AM	H2 MFC set to  500.000000
8/1/2011	12:51:15 AM	BCl3 MFC set to  0.000000
8/1/2011	12:51:15 AM	PHl3 MFC set to  0.000000
8/1/2011	12:51:15 AM	SiCl4 MFC set to  0.000000
8/1/2011	12:51:15 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:51:15 AM	Tube furnace set to 925
8/1/2011	12:52:15 AM	Helium valve closed
8/1/2011	12:52:15 AM	BCl3 valve closed
8/1/2011	12:52:15 AM	PH3 valve closed
8/1/2011	12:52:15 AM	SiCl4 pre valve closed
8/1/2011	12:52:15 AM	SiCl4 post valve closed
8/1/2011	12:52:15 AM	Main Vac valve closed
8/1/2011	12:52:15 AM	Bypass valve closed
8/1/2011	12:52:15 AM	H2 valve opened
8/1/2011	12:52:15 AM	Bubbler valve opened
8/1/2011	12:52:15 AM	Helium MFC set to  0.000000
8/1/2011	12:52:15 AM	H2 MFC set to  500.000000
8/1/2011	12:52:15 AM	BCl3 MFC set to  0.000000
8/1/2011	12:52:15 AM	PHl3 MFC set to  0.000000
8/1/2011	12:52:15 AM	SiCl4 MFC set to  0.000000
8/1/2011	12:52:15 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:52:15 AM	Tube furnace set to 900
8/1/2011	12:53:15 AM	Helium valve closed
8/1/2011	12:53:15 AM	BCl3 valve closed
8/1/2011	12:53:15 AM	PH3 valve closed
8/1/2011	12:53:15 AM	SiCl4 pre valve closed
8/1/2011	12:53:15 AM	SiCl4 post valve closed
8/1/2011	12:53:15 AM	Main Vac valve closed
8/1/2011	12:53:15 AM	Bypass valve closed
8/1/2011	12:53:15 AM	H2 valve opened
8/1/2011	12:53:15 AM	Bubbler valve opened
8/1/2011	12:53:15 AM	Helium MFC set to  0.000000
8/1/2011	12:53:15 AM	H2 MFC set to  500.000000
8/1/2011	12:53:15 AM	BCl3 MFC set to  0.000000
8/1/2011	12:53:15 AM	PHl3 MFC set to  0.000000
8/1/2011	12:53:15 AM	SiCl4 MFC set to  0.000000
8/1/2011	12:53:15 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:53:15 AM	Tube furnace set to 850
8/1/2011	12:54:45 AM	Helium valve closed
8/1/2011	12:54:45 AM	BCl3 valve closed
8/1/2011	12:54:45 AM	PH3 valve closed
8/1/2011	12:54:45 AM	SiCl4 pre valve closed
8/1/2011	12:54:45 AM	SiCl4 post valve closed
8/1/2011	12:54:45 AM	Main Vac valve closed
8/1/2011	12:54:45 AM	Bypass valve closed
8/1/2011	12:54:45 AM	H2 valve opened
8/1/2011	12:54:45 AM	Bubbler valve opened
8/1/2011	12:54:45 AM	Helium MFC set to  0.000000
8/1/2011	12:54:45 AM	H2 MFC set to  500.000000
8/1/2011	12:54:45 AM	BCl3 MFC set to  0.000000
8/1/2011	12:54:45 AM	PHl3 MFC set to  0.000000
8/1/2011	12:54:45 AM	SiCl4 MFC set to  0.000000
8/1/2011	12:54:46 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:54:46 AM	Tube furnace set to 800
8/1/2011	12:56:16 AM	H2 valve closed
8/1/2011	12:56:16 AM	BCl3 valve closed
8/1/2011	12:56:16 AM	PH3 valve closed
8/1/2011	12:56:16 AM	SiCl4 pre valve closed
8/1/2011	12:56:16 AM	SiCl4 post valve closed
8/1/2011	12:56:16 AM	Main Vac valve closed
8/1/2011	12:56:16 AM	Bypass valve closed
8/1/2011	12:56:16 AM	Helium valve opened
8/1/2011	12:56:16 AM	Bubbler valve opened
8/1/2011	12:56:16 AM	Helium MFC set to  500.000000
8/1/2011	12:56:16 AM	H2 MFC set to  0.000000
8/1/2011	12:56:16 AM	BCl3 MFC set to  0.000000
8/1/2011	12:56:16 AM	PHl3 MFC set to  0.000000
8/1/2011	12:56:16 AM	SiCl4 MFC set to  0.000000
8/1/2011	12:56:16 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:56:16 AM	Tube furnace set to 0
8/1/2011	1:16:16 AM	Helium valve closed
8/1/2011	1:16:16 AM	H2 valve closed
8/1/2011	1:16:16 AM	BCl3 valve closed
8/1/2011	1:16:16 AM	PH3 valve closed
8/1/2011	1:16:16 AM	SiCl4 pre valve closed
8/1/2011	1:16:16 AM	SiCl4 post valve closed
8/1/2011	1:16:16 AM	Main Vac valve closed
8/1/2011	1:16:16 AM	Bypass valve closed
8/1/2011	1:16:16 AM	Bubbler valve closed
8/1/2011	1:16:16 AM	Helium MFC set to  0.000000
8/1/2011	1:16:16 AM	H2 MFC set to  0.000000
8/1/2011	1:16:16 AM	BCl3 MFC set to  0.000000
8/1/2011	1:16:16 AM	PHl3 MFC set to  0.000000
8/1/2011	1:16:16 AM	SiCl4 MFC set to  0.000000
8/1/2011	1:16:16 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	1:16:16 AM	Tube furnace set to 0
8/1/2011	2:16:16 AM	Run finished at 2:16 AM
8/1/2011	2:34:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	2:34:37 AM	Recipe started at 2:34 AM
8/1/2011	2:34:37 AM	Helium valve closed
8/1/2011	2:34:37 AM	H2 valve closed
8/1/2011	2:34:37 AM	BCl3 valve closed
8/1/2011	2:34:37 AM	PH3 valve closed
8/1/2011	2:34:37 AM	SiCl4 pre valve closed
8/1/2011	2:34:37 AM	SiCl4 post valve closed
8/1/2011	2:34:37 AM	Main Vac valve closed
8/1/2011	2:34:37 AM	Bypass valve closed
8/1/2011	2:34:37 AM	Bubbler valve closed
8/1/2011	2:34:37 AM	Helium MFC set to  0.000000
8/1/2011	2:34:37 AM	H2 MFC set to  0.000000
8/1/2011	2:34:37 AM	BCl3 MFC set to  0.000000
8/1/2011	2:34:37 AM	PHl3 MFC set to  0.000000
8/1/2011	2:34:37 AM	SiCl4 MFC set to  0.000000
8/1/2011	2:34:37 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:34:37 AM	Tube furnace set to 0
8/1/2011	2:34:40 AM	H2 valve closed
8/1/2011	2:34:40 AM	BCl3 valve closed
8/1/2011	2:34:40 AM	PH3 valve closed
8/1/2011	2:34:40 AM	SiCl4 pre valve closed
8/1/2011	2:34:40 AM	SiCl4 post valve closed
8/1/2011	2:34:40 AM	Main Vac valve closed
8/1/2011	2:34:40 AM	Bypass valve closed
8/1/2011	2:34:40 AM	Bubbler valve closed
8/1/2011	2:34:40 AM	Helium valve opened
8/1/2011	2:34:40 AM	Helium MFC set to  500.000000
8/1/2011	2:34:40 AM	H2 MFC set to  0.000000
8/1/2011	2:34:40 AM	BCl3 MFC set to  0.000000
8/1/2011	2:34:40 AM	PHl3 MFC set to  0.000000
8/1/2011	2:34:40 AM	SiCl4 MFC set to  0.000000
8/1/2011	2:34:40 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:34:41 AM	Tube furnace set to 0
8/1/2011	2:34:47 AM	Helium valve closed
8/1/2011	2:34:47 AM	H2 valve closed
8/1/2011	2:34:47 AM	BCl3 valve closed
8/1/2011	2:34:47 AM	PH3 valve closed
8/1/2011	2:34:47 AM	SiCl4 pre valve closed
8/1/2011	2:34:47 AM	SiCl4 post valve closed
8/1/2011	2:34:47 AM	Main Vac valve closed
8/1/2011	2:34:47 AM	Bypass valve closed
8/1/2011	2:34:47 AM	Bubbler valve closed
8/1/2011	2:34:47 AM	Helium MFC set to  0.000000
8/1/2011	2:34:47 AM	H2 MFC set to  0.000000
8/1/2011	2:34:47 AM	BCl3 MFC set to  0.000000
8/1/2011	2:34:47 AM	PHl3 MFC set to  0.000000
8/1/2011	2:34:47 AM	SiCl4 MFC set to  0.000000
8/1/2011	2:34:47 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:34:47 AM	Tube furnace set to 0
8/1/2011	2:34:48 AM	Run finished at 2:34 AM
8/1/2011	2:34:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	2:39:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	2:39:15 AM	Recipe started at 2:39 AM
8/1/2011	2:39:16 AM	Helium valve closed
8/1/2011	2:39:16 AM	H2 valve closed
8/1/2011	2:39:16 AM	BCl3 valve closed
8/1/2011	2:39:16 AM	PH3 valve closed
8/1/2011	2:39:16 AM	SiCl4 pre valve closed
8/1/2011	2:39:16 AM	SiCl4 post valve closed
8/1/2011	2:39:16 AM	Main Vac valve closed
8/1/2011	2:39:16 AM	Bubbler valve closed
8/1/2011	2:39:16 AM	Bypass valve opened
8/1/2011	2:39:16 AM	Helium MFC set to  0.000000
8/1/2011	2:39:16 AM	H2 MFC set to  0.000000
8/1/2011	2:39:16 AM	BCl3 MFC set to  0.000000
8/1/2011	2:39:16 AM	PHl3 MFC set to  0.000000
8/1/2011	2:39:16 AM	SiCl4 MFC set to  0.000000
8/1/2011	2:39:16 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:39:16 AM	Tube furnace set to 0
8/1/2011	2:40:22 AM	Helium valve closed
8/1/2011	2:40:22 AM	H2 valve closed
8/1/2011	2:40:22 AM	BCl3 valve closed
8/1/2011	2:40:22 AM	PH3 valve closed
8/1/2011	2:40:22 AM	SiCl4 pre valve closed
8/1/2011	2:40:22 AM	SiCl4 post valve closed
8/1/2011	2:40:22 AM	Main Vac valve closed
8/1/2011	2:40:22 AM	Bubbler valve closed
8/1/2011	2:40:22 AM	Bypass valve opened
8/1/2011	2:40:22 AM	Helium MFC set to  0.000000
8/1/2011	2:40:22 AM	H2 MFC set to  0.000000
8/1/2011	2:40:22 AM	BCl3 MFC set to  0.000000
8/1/2011	2:40:22 AM	PHl3 MFC set to  0.000000
8/1/2011	2:40:22 AM	SiCl4 MFC set to  0.000000
8/1/2011	2:40:22 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:40:22 AM	Tube furnace set to 0
8/1/2011	2:41:22 AM	Helium valve closed
8/1/2011	2:41:22 AM	H2 valve closed
8/1/2011	2:41:22 AM	BCl3 valve closed
8/1/2011	2:41:22 AM	PH3 valve closed
8/1/2011	2:41:22 AM	SiCl4 pre valve closed
8/1/2011	2:41:22 AM	SiCl4 post valve closed
8/1/2011	2:41:22 AM	Bypass valve closed
8/1/2011	2:41:22 AM	Bubbler valve closed
8/1/2011	2:41:22 AM	Main Vac valve opened
8/1/2011	2:41:22 AM	Helium MFC set to  0.000000
8/1/2011	2:41:22 AM	H2 MFC set to  0.000000
8/1/2011	2:41:22 AM	BCl3 MFC set to  0.000000
8/1/2011	2:41:22 AM	PHl3 MFC set to  0.000000
8/1/2011	2:41:22 AM	SiCl4 MFC set to  0.000000
8/1/2011	2:41:22 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:41:22 AM	Tube furnace set to 0
8/1/2011	2:41:23 AM	Run finished at 2:41 AM
8/1/2011	2:41:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	5:07:02 AM	Main Vac valve closed
8/1/2011	5:07:15 AM	Main Vac valve opened
8/1/2011	5:10:56 AM	Recipe started at 5:10 AM
8/1/2011	5:10:56 AM	Helium valve closed
8/1/2011	5:10:56 AM	BCl3 valve closed
8/1/2011	5:10:56 AM	PH3 valve closed
8/1/2011	5:10:56 AM	SiCl4 pre valve closed
8/1/2011	5:10:56 AM	SiCl4 post valve closed
8/1/2011	5:10:56 AM	Main Vac valve closed
8/1/2011	5:10:56 AM	Bypass valve closed
8/1/2011	5:10:56 AM	Bubbler valve closed
8/1/2011	5:10:56 AM	H2 valve opened
8/1/2011	5:10:56 AM	Helium MFC set to  0.000000
8/1/2011	5:10:56 AM	H2 MFC set to  500.000000
8/1/2011	5:10:56 AM	BCl3 MFC set to  0.000000
8/1/2011	5:10:56 AM	PHl3 MFC set to  0.000000
8/1/2011	5:10:56 AM	SiCl4 MFC set to  0.000000
8/1/2011	5:10:56 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:10:56 AM	Tube furnace set to 1000
8/1/2011	5:12:03 AM	Helium valve closed
8/1/2011	5:12:03 AM	BCl3 valve closed
8/1/2011	5:12:03 AM	PH3 valve closed
8/1/2011	5:12:03 AM	SiCl4 pre valve closed
8/1/2011	5:12:03 AM	SiCl4 post valve closed
8/1/2011	5:12:03 AM	Main Vac valve closed
8/1/2011	5:12:03 AM	Bypass valve closed
8/1/2011	5:12:03 AM	H2 valve opened
8/1/2011	5:12:03 AM	Bubbler valve opened
8/1/2011	5:12:03 AM	Helium MFC set to  0.000000
8/1/2011	5:12:03 AM	H2 MFC set to  500.000000
8/1/2011	5:12:03 AM	BCl3 MFC set to  0.000000
8/1/2011	5:12:03 AM	PHl3 MFC set to  0.000000
8/1/2011	5:12:03 AM	SiCl4 MFC set to  0.000000
8/1/2011	5:12:03 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:12:03 AM	Tube furnace set to 1000
8/1/2011	5:32:03 AM	Helium valve closed
8/1/2011	5:32:03 AM	BCl3 valve closed
8/1/2011	5:32:03 AM	PH3 valve closed
8/1/2011	5:32:03 AM	Main Vac valve closed
8/1/2011	5:32:03 AM	Bypass valve closed
8/1/2011	5:32:03 AM	H2 valve opened
8/1/2011	5:32:03 AM	SiCl4 pre valve opened
8/1/2011	5:32:03 AM	SiCl4 post valve opened
8/1/2011	5:32:03 AM	Bubbler valve opened
8/1/2011	5:32:03 AM	Helium MFC set to  0.000000
8/1/2011	5:32:03 AM	H2 MFC set to  500.000000
8/1/2011	5:32:03 AM	BCl3 MFC set to  0.000000
8/1/2011	5:32:03 AM	PHl3 MFC set to  0.000000
8/1/2011	5:32:03 AM	SiCl4 MFC set to  50.000000
8/1/2011	5:32:03 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:32:03 AM	Tube furnace set to 1000
8/1/2011	5:52:03 AM	Helium valve closed
8/1/2011	5:52:03 AM	BCl3 valve closed
8/1/2011	5:52:03 AM	PH3 valve closed
8/1/2011	5:52:03 AM	SiCl4 pre valve closed
8/1/2011	5:52:03 AM	SiCl4 post valve closed
8/1/2011	5:52:03 AM	Main Vac valve closed
8/1/2011	5:52:03 AM	Bypass valve closed
8/1/2011	5:52:03 AM	H2 valve opened
8/1/2011	5:52:03 AM	Bubbler valve opened
8/1/2011	5:52:03 AM	Helium MFC set to  0.000000
8/1/2011	5:52:03 AM	H2 MFC set to  500.000000
8/1/2011	5:52:03 AM	BCl3 MFC set to  0.000000
8/1/2011	5:52:03 AM	PHl3 MFC set to  0.000000
8/1/2011	5:52:03 AM	SiCl4 MFC set to  0.000000
8/1/2011	5:52:03 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:52:04 AM	Tube furnace set to 975
8/1/2011	5:53:04 AM	Helium valve closed
8/1/2011	5:53:04 AM	BCl3 valve closed
8/1/2011	5:53:04 AM	PH3 valve closed
8/1/2011	5:53:04 AM	SiCl4 pre valve closed
8/1/2011	5:53:04 AM	SiCl4 post valve closed
8/1/2011	5:53:04 AM	Main Vac valve closed
8/1/2011	5:53:04 AM	Bypass valve closed
8/1/2011	5:53:04 AM	H2 valve opened
8/1/2011	5:53:04 AM	Bubbler valve opened
8/1/2011	5:53:04 AM	Helium MFC set to  0.000000
8/1/2011	5:53:04 AM	H2 MFC set to  500.000000
8/1/2011	5:53:04 AM	BCl3 MFC set to  0.000000
8/1/2011	5:53:04 AM	PHl3 MFC set to  0.000000
8/1/2011	5:53:04 AM	SiCl4 MFC set to  0.000000
8/1/2011	5:53:04 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:53:04 AM	Tube furnace set to 950
8/1/2011	5:54:04 AM	Helium valve closed
8/1/2011	5:54:04 AM	BCl3 valve closed
8/1/2011	5:54:04 AM	PH3 valve closed
8/1/2011	5:54:04 AM	SiCl4 pre valve closed
8/1/2011	5:54:04 AM	SiCl4 post valve closed
8/1/2011	5:54:04 AM	Main Vac valve closed
8/1/2011	5:54:04 AM	Bypass valve closed
8/1/2011	5:54:04 AM	H2 valve opened
8/1/2011	5:54:04 AM	Bubbler valve opened
8/1/2011	5:54:04 AM	Helium MFC set to  0.000000
8/1/2011	5:54:04 AM	H2 MFC set to  500.000000
8/1/2011	5:54:04 AM	BCl3 MFC set to  0.000000
8/1/2011	5:54:04 AM	PHl3 MFC set to  0.000000
8/1/2011	5:54:04 AM	SiCl4 MFC set to  0.000000
8/1/2011	5:54:04 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:54:04 AM	Tube furnace set to 925
8/1/2011	5:55:04 AM	Helium valve closed
8/1/2011	5:55:04 AM	BCl3 valve closed
8/1/2011	5:55:04 AM	PH3 valve closed
8/1/2011	5:55:04 AM	SiCl4 pre valve closed
8/1/2011	5:55:04 AM	SiCl4 post valve closed
8/1/2011	5:55:04 AM	Main Vac valve closed
8/1/2011	5:55:04 AM	Bypass valve closed
8/1/2011	5:55:04 AM	H2 valve opened
8/1/2011	5:55:04 AM	Bubbler valve opened
8/1/2011	5:55:04 AM	Helium MFC set to  0.000000
8/1/2011	5:55:04 AM	H2 MFC set to  500.000000
8/1/2011	5:55:04 AM	BCl3 MFC set to  0.000000
8/1/2011	5:55:04 AM	PHl3 MFC set to  0.000000
8/1/2011	5:55:04 AM	SiCl4 MFC set to  0.000000
8/1/2011	5:55:04 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:55:04 AM	Tube furnace set to 900
8/1/2011	5:56:04 AM	Helium valve closed
8/1/2011	5:56:04 AM	BCl3 valve closed
8/1/2011	5:56:04 AM	PH3 valve closed
8/1/2011	5:56:04 AM	SiCl4 pre valve closed
8/1/2011	5:56:04 AM	SiCl4 post valve closed
8/1/2011	5:56:04 AM	Main Vac valve closed
8/1/2011	5:56:04 AM	Bypass valve closed
8/1/2011	5:56:04 AM	H2 valve opened
8/1/2011	5:56:04 AM	Bubbler valve opened
8/1/2011	5:56:04 AM	Helium MFC set to  0.000000
8/1/2011	5:56:04 AM	H2 MFC set to  500.000000
8/1/2011	5:56:04 AM	BCl3 MFC set to  0.000000
8/1/2011	5:56:04 AM	PHl3 MFC set to  0.000000
8/1/2011	5:56:04 AM	SiCl4 MFC set to  0.000000
8/1/2011	5:56:04 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:56:04 AM	Tube furnace set to 850
8/1/2011	5:57:34 AM	Helium valve closed
8/1/2011	5:57:34 AM	BCl3 valve closed
8/1/2011	5:57:34 AM	PH3 valve closed
8/1/2011	5:57:34 AM	SiCl4 pre valve closed
8/1/2011	5:57:34 AM	SiCl4 post valve closed
8/1/2011	5:57:34 AM	Main Vac valve closed
8/1/2011	5:57:34 AM	Bypass valve closed
8/1/2011	5:57:34 AM	H2 valve opened
8/1/2011	5:57:34 AM	Bubbler valve opened
8/1/2011	5:57:34 AM	Helium MFC set to  0.000000
8/1/2011	5:57:34 AM	H2 MFC set to  500.000000
8/1/2011	5:57:34 AM	BCl3 MFC set to  0.000000
8/1/2011	5:57:34 AM	PHl3 MFC set to  0.000000
8/1/2011	5:57:34 AM	SiCl4 MFC set to  0.000000
8/1/2011	5:57:34 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:57:35 AM	Tube furnace set to 800
8/1/2011	5:59:05 AM	H2 valve closed
8/1/2011	5:59:05 AM	BCl3 valve closed
8/1/2011	5:59:05 AM	PH3 valve closed
8/1/2011	5:59:05 AM	SiCl4 pre valve closed
8/1/2011	5:59:05 AM	SiCl4 post valve closed
8/1/2011	5:59:05 AM	Main Vac valve closed
8/1/2011	5:59:05 AM	Bypass valve closed
8/1/2011	5:59:05 AM	Helium valve opened
8/1/2011	5:59:05 AM	Bubbler valve opened
8/1/2011	5:59:05 AM	Helium MFC set to  500.000000
8/1/2011	5:59:05 AM	H2 MFC set to  0.000000
8/1/2011	5:59:05 AM	BCl3 MFC set to  0.000000
8/1/2011	5:59:05 AM	PHl3 MFC set to  0.000000
8/1/2011	5:59:05 AM	SiCl4 MFC set to  0.000000
8/1/2011	5:59:05 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:59:05 AM	Tube furnace set to 0
8/1/2011	6:19:05 AM	Helium valve closed
8/1/2011	6:19:05 AM	H2 valve closed
8/1/2011	6:19:05 AM	BCl3 valve closed
8/1/2011	6:19:05 AM	PH3 valve closed
8/1/2011	6:19:05 AM	SiCl4 pre valve closed
8/1/2011	6:19:05 AM	SiCl4 post valve closed
8/1/2011	6:19:05 AM	Main Vac valve closed
8/1/2011	6:19:05 AM	Bypass valve closed
8/1/2011	6:19:05 AM	Bubbler valve closed
8/1/2011	6:19:05 AM	Helium MFC set to  0.000000
8/1/2011	6:19:05 AM	H2 MFC set to  0.000000
8/1/2011	6:19:05 AM	BCl3 MFC set to  0.000000
8/1/2011	6:19:05 AM	PHl3 MFC set to  0.000000
8/1/2011	6:19:05 AM	SiCl4 MFC set to  0.000000
8/1/2011	6:19:05 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	6:19:05 AM	Tube furnace set to 0
8/1/2011	6:19:06 AM	Run finished at 6:19 AM
8/1/2011	8:03:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	8:03:04 AM	Recipe started at 8:03 AM
8/1/2011	8:03:04 AM	Helium valve closed
8/1/2011	8:03:04 AM	H2 valve closed
8/1/2011	8:03:04 AM	BCl3 valve closed
8/1/2011	8:03:04 AM	PH3 valve closed
8/1/2011	8:03:04 AM	SiCl4 pre valve closed
8/1/2011	8:03:04 AM	SiCl4 post valve closed
8/1/2011	8:03:04 AM	Main Vac valve closed
8/1/2011	8:03:04 AM	Bypass valve closed
8/1/2011	8:03:04 AM	Bubbler valve closed
8/1/2011	8:03:04 AM	Helium MFC set to  0.000000
8/1/2011	8:03:04 AM	H2 MFC set to  0.000000
8/1/2011	8:03:04 AM	BCl3 MFC set to  0.000000
8/1/2011	8:03:04 AM	PHl3 MFC set to  0.000000
8/1/2011	8:03:04 AM	SiCl4 MFC set to  0.000000
8/1/2011	8:03:04 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	8:03:04 AM	Tube furnace set to 0
8/1/2011	8:03:07 AM	H2 valve closed
8/1/2011	8:03:07 AM	BCl3 valve closed
8/1/2011	8:03:07 AM	PH3 valve closed
8/1/2011	8:03:07 AM	SiCl4 pre valve closed
8/1/2011	8:03:07 AM	SiCl4 post valve closed
8/1/2011	8:03:07 AM	Main Vac valve closed
8/1/2011	8:03:07 AM	Bypass valve closed
8/1/2011	8:03:07 AM	Bubbler valve closed
8/1/2011	8:03:07 AM	Helium valve opened
8/1/2011	8:03:07 AM	Helium MFC set to  500.000000
8/1/2011	8:03:07 AM	H2 MFC set to  0.000000
8/1/2011	8:03:07 AM	BCl3 MFC set to  0.000000
8/1/2011	8:03:07 AM	PHl3 MFC set to  0.000000
8/1/2011	8:03:07 AM	SiCl4 MFC set to  0.000000
8/1/2011	8:03:07 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	8:03:08 AM	Tube furnace set to 0
8/1/2011	8:03:12 AM	Helium valve closed
8/1/2011	8:03:12 AM	H2 valve closed
8/1/2011	8:03:12 AM	BCl3 valve closed
8/1/2011	8:03:12 AM	PH3 valve closed
8/1/2011	8:03:12 AM	SiCl4 pre valve closed
8/1/2011	8:03:12 AM	SiCl4 post valve closed
8/1/2011	8:03:12 AM	Main Vac valve closed
8/1/2011	8:03:12 AM	Bypass valve closed
8/1/2011	8:03:12 AM	Bubbler valve closed
8/1/2011	8:03:12 AM	Helium MFC set to  0.000000
8/1/2011	8:03:12 AM	H2 MFC set to  0.000000
8/1/2011	8:03:12 AM	BCl3 MFC set to  0.000000
8/1/2011	8:03:12 AM	PHl3 MFC set to  0.000000
8/1/2011	8:03:12 AM	SiCl4 MFC set to  0.000000
8/1/2011	8:03:12 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	8:03:12 AM	Tube furnace set to 0
8/1/2011	8:03:13 AM	Run finished at 8:03 AM
8/1/2011	8:03:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	8:06:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	8:06:30 AM	Recipe started at 8:06 AM
8/1/2011	8:06:30 AM	Helium valve closed
8/1/2011	8:06:30 AM	H2 valve closed
8/1/2011	8:06:30 AM	BCl3 valve closed
8/1/2011	8:06:30 AM	PH3 valve closed
8/1/2011	8:06:30 AM	SiCl4 pre valve closed
8/1/2011	8:06:30 AM	SiCl4 post valve closed
8/1/2011	8:06:30 AM	Main Vac valve closed
8/1/2011	8:06:30 AM	Bubbler valve closed
8/1/2011	8:06:30 AM	Bypass valve opened
8/1/2011	8:06:30 AM	Helium MFC set to  0.000000
8/1/2011	8:06:30 AM	H2 MFC set to  0.000000
8/1/2011	8:06:30 AM	BCl3 MFC set to  0.000000
8/1/2011	8:06:30 AM	PHl3 MFC set to  0.000000
8/1/2011	8:06:30 AM	SiCl4 MFC set to  0.000000
8/1/2011	8:06:30 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	8:06:30 AM	Tube furnace set to 0
8/1/2011	8:07:31 AM	Helium valve closed
8/1/2011	8:07:31 AM	H2 valve closed
8/1/2011	8:07:31 AM	BCl3 valve closed
8/1/2011	8:07:31 AM	PH3 valve closed
8/1/2011	8:07:31 AM	SiCl4 pre valve closed
8/1/2011	8:07:31 AM	SiCl4 post valve closed
8/1/2011	8:07:31 AM	Main Vac valve closed
8/1/2011	8:07:31 AM	Bubbler valve closed
8/1/2011	8:07:31 AM	Bypass valve opened
8/1/2011	8:07:31 AM	Helium MFC set to  0.000000
8/1/2011	8:07:31 AM	H2 MFC set to  0.000000
8/1/2011	8:07:31 AM	BCl3 MFC set to  0.000000
8/1/2011	8:07:31 AM	PHl3 MFC set to  0.000000
8/1/2011	8:07:31 AM	SiCl4 MFC set to  0.000000
8/1/2011	8:07:31 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	8:07:31 AM	Tube furnace set to 0
8/1/2011	8:08:31 AM	Helium valve closed
8/1/2011	8:08:31 AM	H2 valve closed
8/1/2011	8:08:31 AM	BCl3 valve closed
8/1/2011	8:08:31 AM	PH3 valve closed
8/1/2011	8:08:31 AM	SiCl4 pre valve closed
8/1/2011	8:08:31 AM	SiCl4 post valve closed
8/1/2011	8:08:31 AM	Bypass valve closed
8/1/2011	8:08:31 AM	Bubbler valve closed
8/1/2011	8:08:31 AM	Main Vac valve opened
8/1/2011	8:08:31 AM	Helium MFC set to  0.000000
8/1/2011	8:08:31 AM	H2 MFC set to  0.000000
8/1/2011	8:08:31 AM	BCl3 MFC set to  0.000000
8/1/2011	8:08:31 AM	PHl3 MFC set to  0.000000
8/1/2011	8:08:31 AM	SiCl4 MFC set to  0.000000
8/1/2011	8:08:31 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	8:08:31 AM	Tube furnace set to 0
8/1/2011	8:08:32 AM	Run finished at 8:08 AM
8/1/2011	8:08:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	9:42:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	9:42:52 AM	Recipe started at 9:42 AM
8/1/2011	9:42:52 AM	Helium valve closed
8/1/2011	9:42:52 AM	H2 valve closed
8/1/2011	9:42:52 AM	BCl3 valve closed
8/1/2011	9:42:52 AM	PH3 valve closed
8/1/2011	9:42:52 AM	SiCl4 pre valve closed
8/1/2011	9:42:52 AM	SiCl4 post valve closed
8/1/2011	9:42:52 AM	Main Vac valve closed
8/1/2011	9:42:52 AM	Bypass valve closed
8/1/2011	9:42:52 AM	Bubbler valve closed
8/1/2011	9:42:52 AM	Helium MFC set to  0.000000
8/1/2011	9:42:52 AM	H2 MFC set to  0.000000
8/1/2011	9:42:52 AM	BCl3 MFC set to  0.000000
8/1/2011	9:42:52 AM	PHl3 MFC set to  0.000000
8/1/2011	9:42:52 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:42:52 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:42:52 AM	Tube furnace set to 0
8/1/2011	9:42:55 AM	H2 valve closed
8/1/2011	9:42:55 AM	BCl3 valve closed
8/1/2011	9:42:55 AM	PH3 valve closed
8/1/2011	9:42:55 AM	SiCl4 pre valve closed
8/1/2011	9:42:55 AM	SiCl4 post valve closed
8/1/2011	9:42:55 AM	Main Vac valve closed
8/1/2011	9:42:55 AM	Bypass valve closed
8/1/2011	9:42:55 AM	Bubbler valve closed
8/1/2011	9:42:55 AM	Helium valve opened
8/1/2011	9:42:55 AM	Helium MFC set to  500.000000
8/1/2011	9:42:55 AM	H2 MFC set to  0.000000
8/1/2011	9:42:55 AM	BCl3 MFC set to  0.000000
8/1/2011	9:42:55 AM	PHl3 MFC set to  0.000000
8/1/2011	9:42:55 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:42:55 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:42:55 AM	Tube furnace set to 0
8/1/2011	9:44:01 AM	Helium valve closed
8/1/2011	9:44:01 AM	H2 valve closed
8/1/2011	9:44:01 AM	BCl3 valve closed
8/1/2011	9:44:01 AM	PH3 valve closed
8/1/2011	9:44:01 AM	SiCl4 pre valve closed
8/1/2011	9:44:01 AM	SiCl4 post valve closed
8/1/2011	9:44:01 AM	Main Vac valve closed
8/1/2011	9:44:01 AM	Bypass valve closed
8/1/2011	9:44:01 AM	Bubbler valve closed
8/1/2011	9:44:01 AM	Helium MFC set to  0.000000
8/1/2011	9:44:01 AM	H2 MFC set to  0.000000
8/1/2011	9:44:01 AM	BCl3 MFC set to  0.000000
8/1/2011	9:44:01 AM	PHl3 MFC set to  0.000000
8/1/2011	9:44:01 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:44:01 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:44:01 AM	Tube furnace set to 0
8/1/2011	9:44:02 AM	Run finished at 9:44 AM
8/1/2011	9:44:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	9:47:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	9:47:22 AM	Recipe started at 9:47 AM
8/1/2011	9:47:22 AM	Helium valve closed
8/1/2011	9:47:22 AM	H2 valve closed
8/1/2011	9:47:22 AM	BCl3 valve closed
8/1/2011	9:47:22 AM	PH3 valve closed
8/1/2011	9:47:22 AM	SiCl4 pre valve closed
8/1/2011	9:47:22 AM	SiCl4 post valve closed
8/1/2011	9:47:22 AM	Main Vac valve closed
8/1/2011	9:47:22 AM	Bubbler valve closed
8/1/2011	9:47:22 AM	Bypass valve opened
8/1/2011	9:47:22 AM	Helium MFC set to  0.000000
8/1/2011	9:47:22 AM	H2 MFC set to  0.000000
8/1/2011	9:47:22 AM	BCl3 MFC set to  0.000000
8/1/2011	9:47:22 AM	PHl3 MFC set to  0.000000
8/1/2011	9:47:22 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:47:22 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:47:22 AM	Tube furnace set to 0
8/1/2011	9:48:29 AM	Helium valve closed
8/1/2011	9:48:29 AM	H2 valve closed
8/1/2011	9:48:29 AM	BCl3 valve closed
8/1/2011	9:48:29 AM	PH3 valve closed
8/1/2011	9:48:29 AM	SiCl4 pre valve closed
8/1/2011	9:48:29 AM	SiCl4 post valve closed
8/1/2011	9:48:29 AM	Main Vac valve closed
8/1/2011	9:48:29 AM	Bubbler valve closed
8/1/2011	9:48:29 AM	Bypass valve opened
8/1/2011	9:48:29 AM	Helium MFC set to  0.000000
8/1/2011	9:48:29 AM	H2 MFC set to  0.000000
8/1/2011	9:48:29 AM	BCl3 MFC set to  0.000000
8/1/2011	9:48:29 AM	PHl3 MFC set to  0.000000
8/1/2011	9:48:29 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:48:29 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:48:29 AM	Tube furnace set to 0
8/1/2011	9:49:29 AM	Helium valve closed
8/1/2011	9:49:29 AM	H2 valve closed
8/1/2011	9:49:29 AM	BCl3 valve closed
8/1/2011	9:49:29 AM	PH3 valve closed
8/1/2011	9:49:29 AM	SiCl4 pre valve closed
8/1/2011	9:49:29 AM	SiCl4 post valve closed
8/1/2011	9:49:29 AM	Bypass valve closed
8/1/2011	9:49:29 AM	Bubbler valve closed
8/1/2011	9:49:29 AM	Main Vac valve opened
8/1/2011	9:49:29 AM	Helium MFC set to  0.000000
8/1/2011	9:49:29 AM	H2 MFC set to  0.000000
8/1/2011	9:49:29 AM	BCl3 MFC set to  0.000000
8/1/2011	9:49:29 AM	PHl3 MFC set to  0.000000
8/1/2011	9:49:29 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:49:29 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:49:29 AM	Tube furnace set to 0
8/1/2011	9:49:30 AM	Run finished at 9:49 AM
8/1/2011	9:49:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	9:50:07 AM	Recipe started at 9:50 AM
8/1/2011	9:50:07 AM	Helium valve closed
8/1/2011	9:50:07 AM	H2 valve closed
8/1/2011	9:50:07 AM	PH3 valve closed
8/1/2011	9:50:07 AM	SiCl4 pre valve closed
8/1/2011	9:50:07 AM	SiCl4 post valve closed
8/1/2011	9:50:07 AM	Bypass valve closed
8/1/2011	9:50:07 AM	Bubbler valve closed
8/1/2011	9:50:07 AM	BCl3 valve opened
8/1/2011	9:50:07 AM	Main Vac valve opened
8/1/2011	9:50:07 AM	Helium MFC set to  0.000000
8/1/2011	9:50:07 AM	H2 MFC set to  0.000000
8/1/2011	9:50:07 AM	BCl3 MFC set to  0.000000
8/1/2011	9:50:07 AM	PHl3 MFC set to  0.000000
8/1/2011	9:50:07 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:50:07 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:50:07 AM	Tube furnace set to 150
8/1/2011	9:50:37 AM	H2 valve closed
8/1/2011	9:50:37 AM	BCl3 valve closed
8/1/2011	9:50:37 AM	PH3 valve closed
8/1/2011	9:50:37 AM	SiCl4 pre valve closed
8/1/2011	9:50:37 AM	SiCl4 post valve closed
8/1/2011	9:50:37 AM	Bypass valve closed
8/1/2011	9:50:37 AM	Bubbler valve closed
8/1/2011	9:50:37 AM	Helium valve opened
8/1/2011	9:50:37 AM	Main Vac valve opened
8/1/2011	9:50:37 AM	Helium MFC set to  20.000000
8/1/2011	9:50:37 AM	H2 MFC set to  0.000000
8/1/2011	9:50:37 AM	BCl3 MFC set to  0.000000
8/1/2011	9:50:37 AM	PHl3 MFC set to  0.000000
8/1/2011	9:50:37 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:50:37 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:50:37 AM	Tube furnace set to 150
8/1/2011	9:51:07 AM	Helium valve closed
8/1/2011	9:51:07 AM	H2 valve closed
8/1/2011	9:51:07 AM	BCl3 valve closed
8/1/2011	9:51:07 AM	PH3 valve closed
8/1/2011	9:51:07 AM	SiCl4 pre valve closed
8/1/2011	9:51:07 AM	SiCl4 post valve closed
8/1/2011	9:51:07 AM	Bypass valve closed
8/1/2011	9:51:07 AM	Bubbler valve closed
8/1/2011	9:51:07 AM	Main Vac valve opened
8/1/2011	9:51:07 AM	Helium MFC set to  0.000000
8/1/2011	9:51:07 AM	H2 MFC set to  0.000000
8/1/2011	9:51:07 AM	BCl3 MFC set to  0.000000
8/1/2011	9:51:07 AM	PHl3 MFC set to  0.000000
8/1/2011	9:51:07 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:51:07 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:51:07 AM	Tube furnace set to 150
8/1/2011	9:51:37 AM	H2 valve closed
8/1/2011	9:51:37 AM	BCl3 valve closed
8/1/2011	9:51:37 AM	PH3 valve closed
8/1/2011	9:51:37 AM	SiCl4 pre valve closed
8/1/2011	9:51:37 AM	SiCl4 post valve closed
8/1/2011	9:51:37 AM	Bypass valve closed
8/1/2011	9:51:37 AM	Bubbler valve closed
8/1/2011	9:51:37 AM	Helium valve opened
8/1/2011	9:51:37 AM	Main Vac valve opened
8/1/2011	9:51:37 AM	Helium MFC set to  20.000000
8/1/2011	9:51:37 AM	H2 MFC set to  0.000000
8/1/2011	9:51:37 AM	BCl3 MFC set to  0.000000
8/1/2011	9:51:37 AM	PHl3 MFC set to  0.000000
8/1/2011	9:51:37 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:51:37 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:51:38 AM	Tube furnace set to 150
8/1/2011	9:52:08 AM	Helium valve closed
8/1/2011	9:52:08 AM	H2 valve closed
8/1/2011	9:52:08 AM	BCl3 valve closed
8/1/2011	9:52:08 AM	PH3 valve closed
8/1/2011	9:52:08 AM	SiCl4 pre valve closed
8/1/2011	9:52:08 AM	SiCl4 post valve closed
8/1/2011	9:52:08 AM	Bypass valve closed
8/1/2011	9:52:08 AM	Bubbler valve closed
8/1/2011	9:52:08 AM	Main Vac valve opened
8/1/2011	9:52:08 AM	Helium MFC set to  0.000000
8/1/2011	9:52:08 AM	H2 MFC set to  0.000000
8/1/2011	9:52:08 AM	BCl3 MFC set to  0.000000
8/1/2011	9:52:08 AM	PHl3 MFC set to  0.000000
8/1/2011	9:52:08 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:52:08 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:52:08 AM	Tube furnace set to 150
8/1/2011	9:52:38 AM	H2 valve closed
8/1/2011	9:52:38 AM	BCl3 valve closed
8/1/2011	9:52:38 AM	PH3 valve closed
8/1/2011	9:52:38 AM	SiCl4 pre valve closed
8/1/2011	9:52:38 AM	SiCl4 post valve closed
8/1/2011	9:52:38 AM	Bypass valve closed
8/1/2011	9:52:38 AM	Bubbler valve closed
8/1/2011	9:52:38 AM	Helium valve opened
8/1/2011	9:52:38 AM	Main Vac valve opened
8/1/2011	9:52:38 AM	Helium MFC set to  20.000000
8/1/2011	9:52:38 AM	H2 MFC set to  0.000000
8/1/2011	9:52:38 AM	BCl3 MFC set to  0.000000
8/1/2011	9:52:38 AM	PHl3 MFC set to  0.000000
8/1/2011	9:52:38 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:52:38 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:52:38 AM	Tube furnace set to 150
8/1/2011	9:53:08 AM	Helium valve closed
8/1/2011	9:53:08 AM	H2 valve closed
8/1/2011	9:53:08 AM	BCl3 valve closed
8/1/2011	9:53:08 AM	PH3 valve closed
8/1/2011	9:53:08 AM	SiCl4 pre valve closed
8/1/2011	9:53:08 AM	SiCl4 post valve closed
8/1/2011	9:53:08 AM	Bypass valve closed
8/1/2011	9:53:08 AM	Bubbler valve closed
8/1/2011	9:53:08 AM	Main Vac valve opened
8/1/2011	9:53:08 AM	Helium MFC set to  0.000000
8/1/2011	9:53:08 AM	H2 MFC set to  0.000000
8/1/2011	9:53:08 AM	BCl3 MFC set to  0.000000
8/1/2011	9:53:08 AM	PHl3 MFC set to  0.000000
8/1/2011	9:53:08 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:53:08 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:53:08 AM	Tube furnace set to 150
8/1/2011	9:53:38 AM	H2 valve closed
8/1/2011	9:53:38 AM	BCl3 valve closed
8/1/2011	9:53:38 AM	PH3 valve closed
8/1/2011	9:53:38 AM	SiCl4 pre valve closed
8/1/2011	9:53:38 AM	SiCl4 post valve closed
8/1/2011	9:53:38 AM	Bypass valve closed
8/1/2011	9:53:38 AM	Bubbler valve closed
8/1/2011	9:53:38 AM	Helium valve opened
8/1/2011	9:53:38 AM	Main Vac valve opened
8/1/2011	9:53:38 AM	Helium MFC set to  20.000000
8/1/2011	9:53:38 AM	H2 MFC set to  0.000000
8/1/2011	9:53:38 AM	BCl3 MFC set to  0.000000
8/1/2011	9:53:38 AM	PHl3 MFC set to  0.000000
8/1/2011	9:53:38 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:53:38 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:53:38 AM	Tube furnace set to 150
8/1/2011	9:54:08 AM	Helium valve closed
8/1/2011	9:54:08 AM	H2 valve closed
8/1/2011	9:54:08 AM	BCl3 valve closed
8/1/2011	9:54:08 AM	PH3 valve closed
8/1/2011	9:54:08 AM	SiCl4 pre valve closed
8/1/2011	9:54:08 AM	SiCl4 post valve closed
8/1/2011	9:54:08 AM	Bypass valve closed
8/1/2011	9:54:08 AM	Bubbler valve closed
8/1/2011	9:54:08 AM	Main Vac valve opened
8/1/2011	9:54:08 AM	Helium MFC set to  0.000000
8/1/2011	9:54:08 AM	H2 MFC set to  0.000000
8/1/2011	9:54:08 AM	BCl3 MFC set to  0.000000
8/1/2011	9:54:08 AM	PHl3 MFC set to  0.000000
8/1/2011	9:54:08 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:54:08 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:54:09 AM	Tube furnace set to 150
8/1/2011	9:54:39 AM	H2 valve closed
8/1/2011	9:54:39 AM	BCl3 valve closed
8/1/2011	9:54:39 AM	PH3 valve closed
8/1/2011	9:54:39 AM	SiCl4 pre valve closed
8/1/2011	9:54:39 AM	SiCl4 post valve closed
8/1/2011	9:54:39 AM	Bypass valve closed
8/1/2011	9:54:39 AM	Bubbler valve closed
8/1/2011	9:54:39 AM	Helium valve opened
8/1/2011	9:54:39 AM	Main Vac valve opened
8/1/2011	9:54:39 AM	Helium MFC set to  20.000000
8/1/2011	9:54:39 AM	H2 MFC set to  0.000000
8/1/2011	9:54:39 AM	BCl3 MFC set to  0.000000
8/1/2011	9:54:39 AM	PHl3 MFC set to  0.000000
8/1/2011	9:54:39 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:54:39 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:54:39 AM	Tube furnace set to 150
8/1/2011	9:55:09 AM	Helium valve closed
8/1/2011	9:55:09 AM	H2 valve closed
8/1/2011	9:55:09 AM	BCl3 valve closed
8/1/2011	9:55:09 AM	PH3 valve closed
8/1/2011	9:55:09 AM	SiCl4 pre valve closed
8/1/2011	9:55:09 AM	SiCl4 post valve closed
8/1/2011	9:55:09 AM	Bypass valve closed
8/1/2011	9:55:09 AM	Bubbler valve closed
8/1/2011	9:55:09 AM	Main Vac valve opened
8/1/2011	9:55:09 AM	Helium MFC set to  0.000000
8/1/2011	9:55:09 AM	H2 MFC set to  0.000000
8/1/2011	9:55:09 AM	BCl3 MFC set to  0.000000
8/1/2011	9:55:09 AM	PHl3 MFC set to  0.000000
8/1/2011	9:55:09 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:55:09 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:55:09 AM	Tube furnace set to 150
8/1/2011	9:55:39 AM	H2 valve closed
8/1/2011	9:55:39 AM	BCl3 valve closed
8/1/2011	9:55:39 AM	PH3 valve closed
8/1/2011	9:55:39 AM	SiCl4 pre valve closed
8/1/2011	9:55:39 AM	SiCl4 post valve closed
8/1/2011	9:55:39 AM	Bypass valve closed
8/1/2011	9:55:39 AM	Bubbler valve closed
8/1/2011	9:55:39 AM	Helium valve opened
8/1/2011	9:55:39 AM	Main Vac valve opened
8/1/2011	9:55:39 AM	Helium MFC set to  20.000000
8/1/2011	9:55:39 AM	H2 MFC set to  0.000000
8/1/2011	9:55:39 AM	BCl3 MFC set to  0.000000
8/1/2011	9:55:39 AM	PHl3 MFC set to  0.000000
8/1/2011	9:55:39 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:55:39 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:55:39 AM	Tube furnace set to 150
8/1/2011	9:56:09 AM	Helium valve closed
8/1/2011	9:56:09 AM	H2 valve closed
8/1/2011	9:56:09 AM	BCl3 valve closed
8/1/2011	9:56:09 AM	PH3 valve closed
8/1/2011	9:56:09 AM	SiCl4 pre valve closed
8/1/2011	9:56:09 AM	SiCl4 post valve closed
8/1/2011	9:56:09 AM	Bypass valve closed
8/1/2011	9:56:09 AM	Bubbler valve closed
8/1/2011	9:56:09 AM	Main Vac valve opened
8/1/2011	9:56:09 AM	Helium MFC set to  0.000000
8/1/2011	9:56:09 AM	H2 MFC set to  0.000000
8/1/2011	9:56:09 AM	BCl3 MFC set to  0.000000
8/1/2011	9:56:09 AM	PHl3 MFC set to  0.000000
8/1/2011	9:56:09 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:56:09 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:56:09 AM	Tube furnace set to 150
8/1/2011	9:56:39 AM	H2 valve closed
8/1/2011	9:56:39 AM	BCl3 valve closed
8/1/2011	9:56:39 AM	PH3 valve closed
8/1/2011	9:56:39 AM	SiCl4 pre valve closed
8/1/2011	9:56:39 AM	SiCl4 post valve closed
8/1/2011	9:56:39 AM	Bypass valve closed
8/1/2011	9:56:39 AM	Bubbler valve closed
8/1/2011	9:56:39 AM	Helium valve opened
8/1/2011	9:56:39 AM	Main Vac valve opened
8/1/2011	9:56:39 AM	Helium MFC set to  20.000000
8/1/2011	9:56:39 AM	H2 MFC set to  0.000000
8/1/2011	9:56:39 AM	BCl3 MFC set to  0.000000
8/1/2011	9:56:39 AM	PHl3 MFC set to  0.000000
8/1/2011	9:56:39 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:56:39 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:56:40 AM	Tube furnace set to 150
8/1/2011	9:57:10 AM	Helium valve closed
8/1/2011	9:57:10 AM	H2 valve closed
8/1/2011	9:57:10 AM	BCl3 valve closed
8/1/2011	9:57:10 AM	PH3 valve closed
8/1/2011	9:57:10 AM	SiCl4 pre valve closed
8/1/2011	9:57:10 AM	SiCl4 post valve closed
8/1/2011	9:57:10 AM	Bypass valve closed
8/1/2011	9:57:10 AM	Bubbler valve closed
8/1/2011	9:57:10 AM	Main Vac valve opened
8/1/2011	9:57:10 AM	Helium MFC set to  0.000000
8/1/2011	9:57:10 AM	H2 MFC set to  0.000000
8/1/2011	9:57:10 AM	BCl3 MFC set to  0.000000
8/1/2011	9:57:10 AM	PHl3 MFC set to  0.000000
8/1/2011	9:57:10 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:57:10 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:57:10 AM	Tube furnace set to 150
8/1/2011	9:57:40 AM	H2 valve closed
8/1/2011	9:57:40 AM	BCl3 valve closed
8/1/2011	9:57:40 AM	PH3 valve closed
8/1/2011	9:57:40 AM	SiCl4 pre valve closed
8/1/2011	9:57:40 AM	SiCl4 post valve closed
8/1/2011	9:57:40 AM	Bypass valve closed
8/1/2011	9:57:40 AM	Bubbler valve closed
8/1/2011	9:57:40 AM	Helium valve opened
8/1/2011	9:57:40 AM	Main Vac valve opened
8/1/2011	9:57:40 AM	Helium MFC set to  20.000000
8/1/2011	9:57:40 AM	H2 MFC set to  0.000000
8/1/2011	9:57:40 AM	BCl3 MFC set to  0.000000
8/1/2011	9:57:40 AM	PHl3 MFC set to  0.000000
8/1/2011	9:57:40 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:57:40 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:57:40 AM	Tube furnace set to 150
8/1/2011	9:58:10 AM	Helium valve closed
8/1/2011	9:58:10 AM	H2 valve closed
8/1/2011	9:58:10 AM	BCl3 valve closed
8/1/2011	9:58:10 AM	PH3 valve closed
8/1/2011	9:58:10 AM	SiCl4 pre valve closed
8/1/2011	9:58:10 AM	SiCl4 post valve closed
8/1/2011	9:58:10 AM	Bypass valve closed
8/1/2011	9:58:10 AM	Bubbler valve closed
8/1/2011	9:58:10 AM	Main Vac valve opened
8/1/2011	9:58:10 AM	Helium MFC set to  0.000000
8/1/2011	9:58:10 AM	H2 MFC set to  0.000000
8/1/2011	9:58:10 AM	BCl3 MFC set to  0.000000
8/1/2011	9:58:10 AM	PHl3 MFC set to  0.000000
8/1/2011	9:58:10 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:58:10 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:58:10 AM	Tube furnace set to 150
8/1/2011	9:58:40 AM	H2 valve closed
8/1/2011	9:58:40 AM	BCl3 valve closed
8/1/2011	9:58:40 AM	PH3 valve closed
8/1/2011	9:58:40 AM	SiCl4 pre valve closed
8/1/2011	9:58:40 AM	SiCl4 post valve closed
8/1/2011	9:58:40 AM	Bypass valve closed
8/1/2011	9:58:40 AM	Bubbler valve closed
8/1/2011	9:58:40 AM	Helium valve opened
8/1/2011	9:58:40 AM	Main Vac valve opened
8/1/2011	9:58:40 AM	Helium MFC set to  20.000000
8/1/2011	9:58:40 AM	H2 MFC set to  0.000000
8/1/2011	9:58:40 AM	BCl3 MFC set to  0.000000
8/1/2011	9:58:40 AM	PHl3 MFC set to  0.000000
8/1/2011	9:58:40 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:58:40 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:58:40 AM	Tube furnace set to 150
8/1/2011	9:59:10 AM	Helium valve closed
8/1/2011	9:59:11 AM	H2 valve closed
8/1/2011	9:59:11 AM	BCl3 valve closed
8/1/2011	9:59:11 AM	PH3 valve closed
8/1/2011	9:59:11 AM	SiCl4 pre valve closed
8/1/2011	9:59:11 AM	SiCl4 post valve closed
8/1/2011	9:59:11 AM	Bypass valve closed
8/1/2011	9:59:11 AM	Bubbler valve closed
8/1/2011	9:59:11 AM	Main Vac valve opened
8/1/2011	9:59:11 AM	Helium MFC set to  0.000000
8/1/2011	9:59:11 AM	H2 MFC set to  0.000000
8/1/2011	9:59:11 AM	BCl3 MFC set to  0.000000
8/1/2011	9:59:11 AM	PHl3 MFC set to  0.000000
8/1/2011	9:59:11 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:59:11 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:59:11 AM	Tube furnace set to 150
8/1/2011	9:59:41 AM	H2 valve closed
8/1/2011	9:59:41 AM	BCl3 valve closed
8/1/2011	9:59:41 AM	PH3 valve closed
8/1/2011	9:59:41 AM	SiCl4 pre valve closed
8/1/2011	9:59:41 AM	SiCl4 post valve closed
8/1/2011	9:59:41 AM	Bypass valve closed
8/1/2011	9:59:41 AM	Bubbler valve closed
8/1/2011	9:59:41 AM	Helium valve opened
8/1/2011	9:59:41 AM	Main Vac valve opened
8/1/2011	9:59:41 AM	Helium MFC set to  20.000000
8/1/2011	9:59:41 AM	H2 MFC set to  0.000000
8/1/2011	9:59:41 AM	BCl3 MFC set to  0.000000
8/1/2011	9:59:41 AM	PHl3 MFC set to  0.000000
8/1/2011	9:59:41 AM	SiCl4 MFC set to  0.000000
8/1/2011	9:59:41 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	9:59:41 AM	Tube furnace set to 150
8/1/2011	10:00:11 AM	Helium valve closed
8/1/2011	10:00:11 AM	H2 valve closed
8/1/2011	10:00:11 AM	BCl3 valve closed
8/1/2011	10:00:11 AM	PH3 valve closed
8/1/2011	10:00:11 AM	SiCl4 pre valve closed
8/1/2011	10:00:11 AM	SiCl4 post valve closed
8/1/2011	10:00:11 AM	Bypass valve closed
8/1/2011	10:00:11 AM	Bubbler valve closed
8/1/2011	10:00:11 AM	Main Vac valve opened
8/1/2011	10:00:11 AM	Helium MFC set to  0.000000
8/1/2011	10:00:11 AM	H2 MFC set to  0.000000
8/1/2011	10:00:11 AM	BCl3 MFC set to  0.000000
8/1/2011	10:00:11 AM	PHl3 MFC set to  0.000000
8/1/2011	10:00:11 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:00:11 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:00:11 AM	Tube furnace set to 150
8/1/2011	10:00:12 AM	Run finished at 10:00 AM
8/1/2011	10:07:28 AM	Recipe started at 10:07 AM
8/1/2011	10:07:28 AM	Helium valve closed
8/1/2011	10:07:28 AM	H2 valve closed
8/1/2011	10:07:28 AM	PH3 valve closed
8/1/2011	10:07:28 AM	SiCl4 pre valve closed
8/1/2011	10:07:28 AM	SiCl4 post valve closed
8/1/2011	10:07:28 AM	Bypass valve closed
8/1/2011	10:07:28 AM	Bubbler valve closed
8/1/2011	10:07:28 AM	BCl3 valve opened
8/1/2011	10:07:28 AM	Main Vac valve opened
8/1/2011	10:07:28 AM	Helium MFC set to  0.000000
8/1/2011	10:07:28 AM	H2 MFC set to  0.000000
8/1/2011	10:07:28 AM	BCl3 MFC set to  0.000000
8/1/2011	10:07:28 AM	PHl3 MFC set to  0.000000
8/1/2011	10:07:28 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:07:28 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:07:28 AM	Tube furnace set to 150
8/1/2011	10:07:58 AM	H2 valve closed
8/1/2011	10:07:58 AM	BCl3 valve closed
8/1/2011	10:07:58 AM	PH3 valve closed
8/1/2011	10:07:58 AM	SiCl4 pre valve closed
8/1/2011	10:07:58 AM	SiCl4 post valve closed
8/1/2011	10:07:58 AM	Bypass valve closed
8/1/2011	10:07:58 AM	Bubbler valve closed
8/1/2011	10:07:58 AM	Helium valve opened
8/1/2011	10:07:58 AM	Main Vac valve opened
8/1/2011	10:07:58 AM	Helium MFC set to  20.000000
8/1/2011	10:07:58 AM	H2 MFC set to  0.000000
8/1/2011	10:07:58 AM	BCl3 MFC set to  0.000000
8/1/2011	10:07:58 AM	PHl3 MFC set to  0.000000
8/1/2011	10:07:58 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:07:58 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:07:58 AM	Tube furnace set to 150
8/1/2011	10:08:28 AM	Helium valve closed
8/1/2011	10:08:28 AM	H2 valve closed
8/1/2011	10:08:28 AM	BCl3 valve closed
8/1/2011	10:08:28 AM	PH3 valve closed
8/1/2011	10:08:28 AM	SiCl4 pre valve closed
8/1/2011	10:08:28 AM	SiCl4 post valve closed
8/1/2011	10:08:28 AM	Bypass valve closed
8/1/2011	10:08:28 AM	Bubbler valve closed
8/1/2011	10:08:28 AM	Main Vac valve opened
8/1/2011	10:08:28 AM	Helium MFC set to  0.000000
8/1/2011	10:08:28 AM	H2 MFC set to  0.000000
8/1/2011	10:08:28 AM	BCl3 MFC set to  0.000000
8/1/2011	10:08:28 AM	PHl3 MFC set to  0.000000
8/1/2011	10:08:28 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:08:28 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:08:28 AM	Tube furnace set to 150
8/1/2011	10:08:58 AM	H2 valve closed
8/1/2011	10:08:58 AM	BCl3 valve closed
8/1/2011	10:08:58 AM	PH3 valve closed
8/1/2011	10:08:58 AM	SiCl4 pre valve closed
8/1/2011	10:08:58 AM	SiCl4 post valve closed
8/1/2011	10:08:58 AM	Bypass valve closed
8/1/2011	10:08:58 AM	Bubbler valve closed
8/1/2011	10:08:58 AM	Helium valve opened
8/1/2011	10:08:58 AM	Main Vac valve opened
8/1/2011	10:08:58 AM	Helium MFC set to  20.000000
8/1/2011	10:08:58 AM	H2 MFC set to  0.000000
8/1/2011	10:08:58 AM	BCl3 MFC set to  0.000000
8/1/2011	10:08:58 AM	PHl3 MFC set to  0.000000
8/1/2011	10:08:58 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:08:58 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:08:58 AM	Tube furnace set to 150
8/1/2011	10:09:28 AM	Helium valve closed
8/1/2011	10:09:28 AM	H2 valve closed
8/1/2011	10:09:28 AM	BCl3 valve closed
8/1/2011	10:09:28 AM	PH3 valve closed
8/1/2011	10:09:28 AM	SiCl4 pre valve closed
8/1/2011	10:09:28 AM	SiCl4 post valve closed
8/1/2011	10:09:28 AM	Bypass valve closed
8/1/2011	10:09:28 AM	Bubbler valve closed
8/1/2011	10:09:28 AM	Main Vac valve opened
8/1/2011	10:09:28 AM	Helium MFC set to  0.000000
8/1/2011	10:09:28 AM	H2 MFC set to  0.000000
8/1/2011	10:09:28 AM	BCl3 MFC set to  0.000000
8/1/2011	10:09:28 AM	PHl3 MFC set to  0.000000
8/1/2011	10:09:28 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:09:28 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:09:29 AM	Tube furnace set to 150
8/1/2011	10:09:59 AM	H2 valve closed
8/1/2011	10:09:59 AM	BCl3 valve closed
8/1/2011	10:09:59 AM	PH3 valve closed
8/1/2011	10:09:59 AM	SiCl4 pre valve closed
8/1/2011	10:09:59 AM	SiCl4 post valve closed
8/1/2011	10:09:59 AM	Bypass valve closed
8/1/2011	10:09:59 AM	Bubbler valve closed
8/1/2011	10:09:59 AM	Helium valve opened
8/1/2011	10:09:59 AM	Main Vac valve opened
8/1/2011	10:09:59 AM	Helium MFC set to  20.000000
8/1/2011	10:09:59 AM	H2 MFC set to  0.000000
8/1/2011	10:09:59 AM	BCl3 MFC set to  0.000000
8/1/2011	10:09:59 AM	PHl3 MFC set to  0.000000
8/1/2011	10:09:59 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:09:59 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:09:59 AM	Tube furnace set to 150
8/1/2011	10:10:29 AM	Helium valve closed
8/1/2011	10:10:29 AM	H2 valve closed
8/1/2011	10:10:29 AM	BCl3 valve closed
8/1/2011	10:10:29 AM	PH3 valve closed
8/1/2011	10:10:29 AM	SiCl4 pre valve closed
8/1/2011	10:10:29 AM	SiCl4 post valve closed
8/1/2011	10:10:29 AM	Bypass valve closed
8/1/2011	10:10:29 AM	Bubbler valve closed
8/1/2011	10:10:29 AM	Main Vac valve opened
8/1/2011	10:10:29 AM	Helium MFC set to  0.000000
8/1/2011	10:10:29 AM	H2 MFC set to  0.000000
8/1/2011	10:10:29 AM	BCl3 MFC set to  0.000000
8/1/2011	10:10:29 AM	PHl3 MFC set to  0.000000
8/1/2011	10:10:29 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:10:29 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:10:29 AM	Tube furnace set to 150
8/1/2011	10:10:59 AM	H2 valve closed
8/1/2011	10:10:59 AM	BCl3 valve closed
8/1/2011	10:10:59 AM	PH3 valve closed
8/1/2011	10:10:59 AM	SiCl4 pre valve closed
8/1/2011	10:10:59 AM	SiCl4 post valve closed
8/1/2011	10:10:59 AM	Bypass valve closed
8/1/2011	10:10:59 AM	Bubbler valve closed
8/1/2011	10:10:59 AM	Helium valve opened
8/1/2011	10:10:59 AM	Main Vac valve opened
8/1/2011	10:10:59 AM	Helium MFC set to  20.000000
8/1/2011	10:10:59 AM	H2 MFC set to  0.000000
8/1/2011	10:10:59 AM	BCl3 MFC set to  0.000000
8/1/2011	10:10:59 AM	PHl3 MFC set to  0.000000
8/1/2011	10:10:59 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:10:59 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:10:59 AM	Tube furnace set to 150
8/1/2011	10:11:29 AM	Helium valve closed
8/1/2011	10:11:29 AM	H2 valve closed
8/1/2011	10:11:29 AM	BCl3 valve closed
8/1/2011	10:11:29 AM	PH3 valve closed
8/1/2011	10:11:29 AM	SiCl4 pre valve closed
8/1/2011	10:11:29 AM	SiCl4 post valve closed
8/1/2011	10:11:29 AM	Bypass valve closed
8/1/2011	10:11:29 AM	Bubbler valve closed
8/1/2011	10:11:29 AM	Main Vac valve opened
8/1/2011	10:11:29 AM	Helium MFC set to  0.000000
8/1/2011	10:11:29 AM	H2 MFC set to  0.000000
8/1/2011	10:11:29 AM	BCl3 MFC set to  0.000000
8/1/2011	10:11:29 AM	PHl3 MFC set to  0.000000
8/1/2011	10:11:29 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:11:29 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:11:29 AM	Tube furnace set to 150
8/1/2011	10:11:59 AM	H2 valve closed
8/1/2011	10:11:59 AM	BCl3 valve closed
8/1/2011	10:11:59 AM	PH3 valve closed
8/1/2011	10:11:59 AM	SiCl4 pre valve closed
8/1/2011	10:11:59 AM	SiCl4 post valve closed
8/1/2011	10:11:59 AM	Bypass valve closed
8/1/2011	10:11:59 AM	Bubbler valve closed
8/1/2011	10:11:59 AM	Helium valve opened
8/1/2011	10:11:59 AM	Main Vac valve opened
8/1/2011	10:11:59 AM	Helium MFC set to  20.000000
8/1/2011	10:11:59 AM	H2 MFC set to  0.000000
8/1/2011	10:11:59 AM	BCl3 MFC set to  0.000000
8/1/2011	10:11:59 AM	PHl3 MFC set to  0.000000
8/1/2011	10:11:59 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:11:59 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:11:59 AM	Tube furnace set to 150
8/1/2011	10:12:30 AM	Helium valve closed
8/1/2011	10:12:30 AM	H2 valve closed
8/1/2011	10:12:30 AM	BCl3 valve closed
8/1/2011	10:12:30 AM	PH3 valve closed
8/1/2011	10:12:30 AM	SiCl4 pre valve closed
8/1/2011	10:12:30 AM	SiCl4 post valve closed
8/1/2011	10:12:30 AM	Bypass valve closed
8/1/2011	10:12:30 AM	Bubbler valve closed
8/1/2011	10:12:30 AM	Main Vac valve opened
8/1/2011	10:12:30 AM	Helium MFC set to  0.000000
8/1/2011	10:12:30 AM	H2 MFC set to  0.000000
8/1/2011	10:12:30 AM	BCl3 MFC set to  0.000000
8/1/2011	10:12:30 AM	PHl3 MFC set to  0.000000
8/1/2011	10:12:30 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:12:30 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:12:30 AM	Tube furnace set to 150
8/1/2011	10:13:00 AM	H2 valve closed
8/1/2011	10:13:00 AM	BCl3 valve closed
8/1/2011	10:13:00 AM	PH3 valve closed
8/1/2011	10:13:00 AM	SiCl4 pre valve closed
8/1/2011	10:13:00 AM	SiCl4 post valve closed
8/1/2011	10:13:00 AM	Bypass valve closed
8/1/2011	10:13:00 AM	Bubbler valve closed
8/1/2011	10:13:00 AM	Helium valve opened
8/1/2011	10:13:00 AM	Main Vac valve opened
8/1/2011	10:13:00 AM	Helium MFC set to  20.000000
8/1/2011	10:13:00 AM	H2 MFC set to  0.000000
8/1/2011	10:13:00 AM	BCl3 MFC set to  0.000000
8/1/2011	10:13:00 AM	PHl3 MFC set to  0.000000
8/1/2011	10:13:00 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:13:00 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:13:00 AM	Tube furnace set to 150
8/1/2011	10:13:30 AM	Helium valve closed
8/1/2011	10:13:30 AM	H2 valve closed
8/1/2011	10:13:30 AM	BCl3 valve closed
8/1/2011	10:13:30 AM	PH3 valve closed
8/1/2011	10:13:30 AM	SiCl4 pre valve closed
8/1/2011	10:13:30 AM	SiCl4 post valve closed
8/1/2011	10:13:30 AM	Bypass valve closed
8/1/2011	10:13:30 AM	Bubbler valve closed
8/1/2011	10:13:30 AM	Main Vac valve opened
8/1/2011	10:13:30 AM	Helium MFC set to  0.000000
8/1/2011	10:13:30 AM	H2 MFC set to  0.000000
8/1/2011	10:13:30 AM	BCl3 MFC set to  0.000000
8/1/2011	10:13:30 AM	PHl3 MFC set to  0.000000
8/1/2011	10:13:30 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:13:30 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:13:30 AM	Tube furnace set to 150
8/1/2011	10:14:00 AM	H2 valve closed
8/1/2011	10:14:00 AM	BCl3 valve closed
8/1/2011	10:14:00 AM	PH3 valve closed
8/1/2011	10:14:00 AM	SiCl4 pre valve closed
8/1/2011	10:14:00 AM	SiCl4 post valve closed
8/1/2011	10:14:00 AM	Bypass valve closed
8/1/2011	10:14:00 AM	Bubbler valve closed
8/1/2011	10:14:00 AM	Helium valve opened
8/1/2011	10:14:00 AM	Main Vac valve opened
8/1/2011	10:14:00 AM	Helium MFC set to  20.000000
8/1/2011	10:14:00 AM	H2 MFC set to  0.000000
8/1/2011	10:14:00 AM	BCl3 MFC set to  0.000000
8/1/2011	10:14:00 AM	PHl3 MFC set to  0.000000
8/1/2011	10:14:00 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:14:00 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:14:00 AM	Tube furnace set to 150
8/1/2011	10:14:30 AM	Helium valve closed
8/1/2011	10:14:30 AM	H2 valve closed
8/1/2011	10:14:30 AM	BCl3 valve closed
8/1/2011	10:14:30 AM	PH3 valve closed
8/1/2011	10:14:30 AM	SiCl4 pre valve closed
8/1/2011	10:14:30 AM	SiCl4 post valve closed
8/1/2011	10:14:30 AM	Bypass valve closed
8/1/2011	10:14:30 AM	Bubbler valve closed
8/1/2011	10:14:30 AM	Main Vac valve opened
8/1/2011	10:14:30 AM	Helium MFC set to  0.000000
8/1/2011	10:14:30 AM	H2 MFC set to  0.000000
8/1/2011	10:14:30 AM	BCl3 MFC set to  0.000000
8/1/2011	10:14:30 AM	PHl3 MFC set to  0.000000
8/1/2011	10:14:30 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:14:30 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:14:31 AM	Tube furnace set to 150
8/1/2011	10:15:01 AM	H2 valve closed
8/1/2011	10:15:01 AM	BCl3 valve closed
8/1/2011	10:15:01 AM	PH3 valve closed
8/1/2011	10:15:01 AM	SiCl4 pre valve closed
8/1/2011	10:15:01 AM	SiCl4 post valve closed
8/1/2011	10:15:01 AM	Bypass valve closed
8/1/2011	10:15:01 AM	Bubbler valve closed
8/1/2011	10:15:01 AM	Helium valve opened
8/1/2011	10:15:01 AM	Main Vac valve opened
8/1/2011	10:15:01 AM	Helium MFC set to  20.000000
8/1/2011	10:15:01 AM	H2 MFC set to  0.000000
8/1/2011	10:15:01 AM	BCl3 MFC set to  0.000000
8/1/2011	10:15:01 AM	PHl3 MFC set to  0.000000
8/1/2011	10:15:01 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:15:01 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:15:01 AM	Tube furnace set to 150
8/1/2011	10:15:31 AM	Helium valve closed
8/1/2011	10:15:31 AM	H2 valve closed
8/1/2011	10:15:31 AM	BCl3 valve closed
8/1/2011	10:15:31 AM	PH3 valve closed
8/1/2011	10:15:31 AM	SiCl4 pre valve closed
8/1/2011	10:15:31 AM	SiCl4 post valve closed
8/1/2011	10:15:31 AM	Bypass valve closed
8/1/2011	10:15:31 AM	Bubbler valve closed
8/1/2011	10:15:31 AM	Main Vac valve opened
8/1/2011	10:15:31 AM	Helium MFC set to  0.000000
8/1/2011	10:15:31 AM	H2 MFC set to  0.000000
8/1/2011	10:15:31 AM	BCl3 MFC set to  0.000000
8/1/2011	10:15:31 AM	PHl3 MFC set to  0.000000
8/1/2011	10:15:31 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:15:31 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:15:31 AM	Tube furnace set to 150
8/1/2011	10:16:01 AM	H2 valve closed
8/1/2011	10:16:01 AM	BCl3 valve closed
8/1/2011	10:16:01 AM	PH3 valve closed
8/1/2011	10:16:01 AM	SiCl4 pre valve closed
8/1/2011	10:16:01 AM	SiCl4 post valve closed
8/1/2011	10:16:01 AM	Bypass valve closed
8/1/2011	10:16:01 AM	Bubbler valve closed
8/1/2011	10:16:01 AM	Helium valve opened
8/1/2011	10:16:01 AM	Main Vac valve opened
8/1/2011	10:16:01 AM	Helium MFC set to  20.000000
8/1/2011	10:16:01 AM	H2 MFC set to  0.000000
8/1/2011	10:16:01 AM	BCl3 MFC set to  0.000000
8/1/2011	10:16:01 AM	PHl3 MFC set to  0.000000
8/1/2011	10:16:01 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:16:01 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:16:01 AM	Tube furnace set to 150
8/1/2011	10:16:31 AM	Helium valve closed
8/1/2011	10:16:31 AM	H2 valve closed
8/1/2011	10:16:31 AM	BCl3 valve closed
8/1/2011	10:16:31 AM	PH3 valve closed
8/1/2011	10:16:31 AM	SiCl4 pre valve closed
8/1/2011	10:16:31 AM	SiCl4 post valve closed
8/1/2011	10:16:31 AM	Bypass valve closed
8/1/2011	10:16:31 AM	Bubbler valve closed
8/1/2011	10:16:31 AM	Main Vac valve opened
8/1/2011	10:16:31 AM	Helium MFC set to  0.000000
8/1/2011	10:16:31 AM	H2 MFC set to  0.000000
8/1/2011	10:16:31 AM	BCl3 MFC set to  0.000000
8/1/2011	10:16:31 AM	PHl3 MFC set to  0.000000
8/1/2011	10:16:31 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:16:31 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:16:31 AM	Tube furnace set to 150
8/1/2011	10:17:01 AM	H2 valve closed
8/1/2011	10:17:01 AM	BCl3 valve closed
8/1/2011	10:17:01 AM	PH3 valve closed
8/1/2011	10:17:01 AM	SiCl4 pre valve closed
8/1/2011	10:17:01 AM	SiCl4 post valve closed
8/1/2011	10:17:01 AM	Bypass valve closed
8/1/2011	10:17:01 AM	Bubbler valve closed
8/1/2011	10:17:01 AM	Helium valve opened
8/1/2011	10:17:01 AM	Main Vac valve opened
8/1/2011	10:17:01 AM	Helium MFC set to  20.000000
8/1/2011	10:17:01 AM	H2 MFC set to  0.000000
8/1/2011	10:17:01 AM	BCl3 MFC set to  0.000000
8/1/2011	10:17:01 AM	PHl3 MFC set to  0.000000
8/1/2011	10:17:01 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:17:01 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:17:02 AM	Tube furnace set to 150
8/1/2011	10:17:32 AM	Helium valve closed
8/1/2011	10:17:32 AM	H2 valve closed
8/1/2011	10:17:32 AM	BCl3 valve closed
8/1/2011	10:17:32 AM	PH3 valve closed
8/1/2011	10:17:32 AM	SiCl4 pre valve closed
8/1/2011	10:17:32 AM	SiCl4 post valve closed
8/1/2011	10:17:32 AM	Bypass valve closed
8/1/2011	10:17:32 AM	Bubbler valve closed
8/1/2011	10:17:32 AM	Main Vac valve opened
8/1/2011	10:17:32 AM	Helium MFC set to  0.000000
8/1/2011	10:17:32 AM	H2 MFC set to  0.000000
8/1/2011	10:17:32 AM	BCl3 MFC set to  0.000000
8/1/2011	10:17:32 AM	PHl3 MFC set to  0.000000
8/1/2011	10:17:32 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:17:32 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:17:32 AM	Tube furnace set to 150
8/1/2011	10:17:33 AM	Run finished at 10:17 AM
8/1/2011	10:18:49 AM	Helium MFC set to  20.000000
8/1/2011	10:18:51 AM	Helium valve opened
8/1/2011	10:36:03 AM	Helium valve closed
8/1/2011	10:36:05 AM	Helium MFC set to  0.000000
8/1/2011	10:39:31 AM	Recipe started at 10:39 AM
8/1/2011	10:39:31 AM	Helium valve closed
8/1/2011	10:39:31 AM	H2 valve closed
8/1/2011	10:39:31 AM	BCl3 valve closed
8/1/2011	10:39:31 AM	PH3 valve closed
8/1/2011	10:39:31 AM	SiCl4 pre valve closed
8/1/2011	10:39:31 AM	SiCl4 post valve closed
8/1/2011	10:39:31 AM	Main Vac valve closed
8/1/2011	10:39:31 AM	Bypass valve closed
8/1/2011	10:39:31 AM	Bubbler valve closed
8/1/2011	10:39:31 AM	Helium MFC set to  0.000000
8/1/2011	10:39:31 AM	H2 MFC set to  0.000000
8/1/2011	10:39:31 AM	BCl3 MFC set to  0.000000
8/1/2011	10:39:31 AM	PHl3 MFC set to  0.000000
8/1/2011	10:39:31 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:39:31 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:39:31 AM	Tube furnace set to 0
8/1/2011	10:39:34 AM	Helium valve closed
8/1/2011	10:39:34 AM	BCl3 valve closed
8/1/2011	10:39:34 AM	PH3 valve closed
8/1/2011	10:39:34 AM	SiCl4 pre valve closed
8/1/2011	10:39:34 AM	SiCl4 post valve closed
8/1/2011	10:39:34 AM	Main Vac valve closed
8/1/2011	10:39:34 AM	Bypass valve closed
8/1/2011	10:39:34 AM	Bubbler valve closed
8/1/2011	10:39:34 AM	H2 valve opened
8/1/2011	10:39:34 AM	Helium MFC set to  0.000000
8/1/2011	10:39:34 AM	H2 MFC set to  500.000000
8/1/2011	10:39:34 AM	BCl3 MFC set to  0.000000
8/1/2011	10:39:34 AM	PHl3 MFC set to  0.000000
8/1/2011	10:39:34 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:39:34 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:39:34 AM	Tube furnace set to 0
8/1/2011	10:40:38 AM	Helium valve closed
8/1/2011	10:40:38 AM	BCl3 valve closed
8/1/2011	10:40:38 AM	PH3 valve closed
8/1/2011	10:40:38 AM	SiCl4 pre valve closed
8/1/2011	10:40:38 AM	SiCl4 post valve closed
8/1/2011	10:40:38 AM	Main Vac valve closed
8/1/2011	10:40:38 AM	Bypass valve closed
8/1/2011	10:40:38 AM	H2 valve opened
8/1/2011	10:40:38 AM	Bubbler valve opened
8/1/2011	10:40:38 AM	Helium MFC set to  0.000000
8/1/2011	10:40:38 AM	H2 MFC set to  500.000000
8/1/2011	10:40:38 AM	BCl3 MFC set to  0.000000
8/1/2011	10:40:38 AM	PHl3 MFC set to  0.000000
8/1/2011	10:40:38 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:40:38 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:40:38 AM	Tube furnace set to 0
8/1/2011	10:40:39 AM	Helium valve closed
8/1/2011	10:40:39 AM	BCl3 valve closed
8/1/2011	10:40:39 AM	PH3 valve closed
8/1/2011	10:40:39 AM	SiCl4 pre valve closed
8/1/2011	10:40:39 AM	SiCl4 post valve closed
8/1/2011	10:40:39 AM	Main Vac valve closed
8/1/2011	10:40:39 AM	Bypass valve closed
8/1/2011	10:40:39 AM	H2 valve opened
8/1/2011	10:40:39 AM	Bubbler valve opened
8/1/2011	10:40:39 AM	Helium MFC set to  0.000000
8/1/2011	10:40:39 AM	H2 MFC set to  500.000000
8/1/2011	10:40:39 AM	BCl3 MFC set to  0.000000
8/1/2011	10:40:39 AM	PHl3 MFC set to  0.000000
8/1/2011	10:40:39 AM	SiCl4 MFC set to  0.000000
8/1/2011	10:40:39 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	10:40:39 AM	Tube furnace set to 1000
8/1/2011	11:00:39 AM	Helium valve closed
8/1/2011	11:00:39 AM	PH3 valve closed
8/1/2011	11:00:39 AM	Main Vac valve closed
8/1/2011	11:00:39 AM	Bypass valve closed
8/1/2011	11:00:39 AM	H2 valve opened
8/1/2011	11:00:39 AM	BCl3 valve opened
8/1/2011	11:00:39 AM	SiCl4 pre valve opened
8/1/2011	11:00:39 AM	SiCl4 post valve opened
8/1/2011	11:00:39 AM	Bubbler valve opened
8/1/2011	11:00:39 AM	Helium MFC set to  0.000000
8/1/2011	11:00:39 AM	H2 MFC set to  500.000000
8/1/2011	11:00:39 AM	BCl3 MFC set to  2.500000
8/1/2011	11:00:39 AM	PHl3 MFC set to  0.000000
8/1/2011	11:00:39 AM	SiCl4 MFC set to  50.000000
8/1/2011	11:00:39 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:00:39 AM	Tube furnace set to 1000
8/1/2011	11:17:19 AM	Helium valve closed
8/1/2011	11:17:19 AM	BCl3 valve closed
8/1/2011	11:17:19 AM	PH3 valve closed
8/1/2011	11:17:19 AM	SiCl4 pre valve closed
8/1/2011	11:17:19 AM	SiCl4 post valve closed
8/1/2011	11:17:19 AM	Main Vac valve closed
8/1/2011	11:17:19 AM	Bypass valve closed
8/1/2011	11:17:19 AM	H2 valve opened
8/1/2011	11:17:19 AM	Bubbler valve opened
8/1/2011	11:17:19 AM	Helium MFC set to  0.000000
8/1/2011	11:17:19 AM	H2 MFC set to  500.000000
8/1/2011	11:17:19 AM	BCl3 MFC set to  0.000000
8/1/2011	11:17:20 AM	PHl3 MFC set to  0.000000
8/1/2011	11:17:20 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:17:20 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:17:20 AM	Tube furnace set to 750
8/1/2011	11:22:20 AM	H2 valve closed
8/1/2011	11:22:20 AM	BCl3 valve closed
8/1/2011	11:22:20 AM	PH3 valve closed
8/1/2011	11:22:20 AM	SiCl4 pre valve closed
8/1/2011	11:22:20 AM	SiCl4 post valve closed
8/1/2011	11:22:20 AM	Main Vac valve closed
8/1/2011	11:22:20 AM	Bypass valve closed
8/1/2011	11:22:20 AM	Helium valve opened
8/1/2011	11:22:20 AM	Bubbler valve opened
8/1/2011	11:22:20 AM	Helium MFC set to  500.000000
8/1/2011	11:22:20 AM	H2 MFC set to  0.000000
8/1/2011	11:22:20 AM	BCl3 MFC set to  0.000000
8/1/2011	11:22:20 AM	PHl3 MFC set to  0.000000
8/1/2011	11:22:20 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:22:20 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:22:20 AM	Tube furnace set to 0
8/1/2011	11:23:57 AM	Run aborted at 11:23 AM
8/1/2011	11:23:57 AM	Helium valve closed
8/1/2011	11:23:57 AM	H2 valve closed
8/1/2011	11:23:57 AM	BCl3 valve closed
8/1/2011	11:23:57 AM	PH3 valve closed
8/1/2011	11:23:57 AM	SiCl4 pre valve closed
8/1/2011	11:23:57 AM	SiCl4 post valve closed
8/1/2011	11:23:57 AM	Bypass valve closed
8/1/2011	11:23:57 AM	Main Vac valve closed
8/1/2011	11:23:57 AM	Bubbler valve closed
8/1/2011	11:23:57 AM	Helium MFC set to  0.000000
8/1/2011	11:23:57 AM	H2 MFC set to  0.000000
8/1/2011	11:23:57 AM	BCl3 MFC set to  0.000000
8/1/2011	11:23:57 AM	PHl3 MFC set to  0.000000
8/1/2011	11:23:57 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:23:57 AM	Tube furnace set to 0
8/1/2011	11:25:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	11:25:35 AM	Recipe started at 11:25 AM
8/1/2011	11:25:35 AM	Helium valve closed
8/1/2011	11:25:35 AM	H2 valve closed
8/1/2011	11:25:35 AM	BCl3 valve closed
8/1/2011	11:25:35 AM	PH3 valve closed
8/1/2011	11:25:35 AM	SiCl4 pre valve closed
8/1/2011	11:25:35 AM	SiCl4 post valve closed
8/1/2011	11:25:35 AM	Main Vac valve closed
8/1/2011	11:25:35 AM	Bypass valve closed
8/1/2011	11:25:35 AM	Bubbler valve closed
8/1/2011	11:25:35 AM	Helium MFC set to  0.000000
8/1/2011	11:25:35 AM	H2 MFC set to  0.000000
8/1/2011	11:25:35 AM	BCl3 MFC set to  0.000000
8/1/2011	11:25:35 AM	PHl3 MFC set to  0.000000
8/1/2011	11:25:35 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:25:35 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:25:35 AM	Tube furnace set to 0
8/1/2011	11:25:38 AM	H2 valve closed
8/1/2011	11:25:38 AM	BCl3 valve closed
8/1/2011	11:25:38 AM	PH3 valve closed
8/1/2011	11:25:38 AM	SiCl4 pre valve closed
8/1/2011	11:25:38 AM	SiCl4 post valve closed
8/1/2011	11:25:38 AM	Main Vac valve closed
8/1/2011	11:25:38 AM	Bypass valve closed
8/1/2011	11:25:38 AM	Bubbler valve closed
8/1/2011	11:25:38 AM	Helium valve opened
8/1/2011	11:25:38 AM	Helium MFC set to  500.000000
8/1/2011	11:25:38 AM	H2 MFC set to  0.000000
8/1/2011	11:25:38 AM	BCl3 MFC set to  0.000000
8/1/2011	11:25:38 AM	PHl3 MFC set to  0.000000
8/1/2011	11:25:38 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:25:38 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:25:38 AM	Tube furnace set to 0
8/1/2011	11:25:39 AM	Helium valve closed
8/1/2011	11:25:39 AM	H2 valve closed
8/1/2011	11:25:39 AM	BCl3 valve closed
8/1/2011	11:25:39 AM	PH3 valve closed
8/1/2011	11:25:39 AM	SiCl4 pre valve closed
8/1/2011	11:25:39 AM	SiCl4 post valve closed
8/1/2011	11:25:39 AM	Main Vac valve closed
8/1/2011	11:25:39 AM	Bypass valve closed
8/1/2011	11:25:39 AM	Bubbler valve closed
8/1/2011	11:25:39 AM	Helium MFC set to  0.000000
8/1/2011	11:25:39 AM	H2 MFC set to  0.000000
8/1/2011	11:25:39 AM	BCl3 MFC set to  0.000000
8/1/2011	11:25:39 AM	PHl3 MFC set to  0.000000
8/1/2011	11:25:39 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:25:39 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:25:39 AM	Tube furnace set to 0
8/1/2011	11:25:40 AM	Run finished at 11:25 AM
8/1/2011	11:25:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	11:34:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	11:34:55 AM	Recipe started at 11:34 AM
8/1/2011	11:34:55 AM	Helium valve closed
8/1/2011	11:34:55 AM	H2 valve closed
8/1/2011	11:34:55 AM	BCl3 valve closed
8/1/2011	11:34:55 AM	PH3 valve closed
8/1/2011	11:34:55 AM	SiCl4 pre valve closed
8/1/2011	11:34:55 AM	SiCl4 post valve closed
8/1/2011	11:34:55 AM	Main Vac valve closed
8/1/2011	11:34:55 AM	Bubbler valve closed
8/1/2011	11:34:55 AM	Bypass valve opened
8/1/2011	11:34:55 AM	Helium MFC set to  0.000000
8/1/2011	11:34:55 AM	H2 MFC set to  0.000000
8/1/2011	11:34:55 AM	BCl3 MFC set to  0.000000
8/1/2011	11:34:55 AM	PHl3 MFC set to  0.000000
8/1/2011	11:34:55 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:34:55 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:34:55 AM	Tube furnace set to 0
8/1/2011	11:36:03 AM	Helium valve closed
8/1/2011	11:36:03 AM	H2 valve closed
8/1/2011	11:36:03 AM	BCl3 valve closed
8/1/2011	11:36:03 AM	PH3 valve closed
8/1/2011	11:36:03 AM	SiCl4 pre valve closed
8/1/2011	11:36:03 AM	SiCl4 post valve closed
8/1/2011	11:36:03 AM	Main Vac valve closed
8/1/2011	11:36:03 AM	Bubbler valve closed
8/1/2011	11:36:03 AM	Bypass valve opened
8/1/2011	11:36:03 AM	Helium MFC set to  0.000000
8/1/2011	11:36:03 AM	H2 MFC set to  0.000000
8/1/2011	11:36:03 AM	BCl3 MFC set to  0.000000
8/1/2011	11:36:03 AM	PHl3 MFC set to  0.000000
8/1/2011	11:36:03 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:36:03 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:36:03 AM	Tube furnace set to 0
8/1/2011	11:37:04 AM	Helium valve closed
8/1/2011	11:37:04 AM	H2 valve closed
8/1/2011	11:37:04 AM	BCl3 valve closed
8/1/2011	11:37:04 AM	PH3 valve closed
8/1/2011	11:37:04 AM	SiCl4 pre valve closed
8/1/2011	11:37:04 AM	SiCl4 post valve closed
8/1/2011	11:37:04 AM	Bypass valve closed
8/1/2011	11:37:04 AM	Bubbler valve closed
8/1/2011	11:37:04 AM	Main Vac valve opened
8/1/2011	11:37:04 AM	Helium MFC set to  0.000000
8/1/2011	11:37:04 AM	H2 MFC set to  0.000000
8/1/2011	11:37:04 AM	BCl3 MFC set to  0.000000
8/1/2011	11:37:04 AM	PHl3 MFC set to  0.000000
8/1/2011	11:37:04 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:37:04 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:37:04 AM	Tube furnace set to 0
8/1/2011	11:37:05 AM	Run finished at 11:37 AM
8/1/2011	11:37:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	11:39:13 AM	Helium MFC set to  20.000000
8/1/2011	11:39:31 AM	Helium valve opened
8/1/2011	11:54:06 AM	Helium valve closed
8/1/2011	11:54:09 AM	Helium MFC set to  0.000000
8/1/2011	11:54:47 AM	Recipe started at 11:54 AM
8/1/2011	11:54:47 AM	Helium valve closed
8/1/2011	11:54:47 AM	H2 valve closed
8/1/2011	11:54:47 AM	BCl3 valve closed
8/1/2011	11:54:47 AM	PH3 valve closed
8/1/2011	11:54:47 AM	SiCl4 pre valve closed
8/1/2011	11:54:47 AM	SiCl4 post valve closed
8/1/2011	11:54:47 AM	Bypass valve closed
8/1/2011	11:54:47 AM	Bubbler valve closed
8/1/2011	11:54:47 AM	Main Vac valve opened
8/1/2011	11:54:47 AM	Helium MFC set to  0.000000
8/1/2011	11:54:47 AM	H2 MFC set to  0.000000
8/1/2011	11:54:47 AM	BCl3 MFC set to  0.000000
8/1/2011	11:54:47 AM	PHl3 MFC set to  0.000000
8/1/2011	11:54:47 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:54:47 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:54:48 AM	Tube furnace set to 150
8/1/2011	11:55:18 AM	H2 valve closed
8/1/2011	11:55:18 AM	BCl3 valve closed
8/1/2011	11:55:18 AM	PH3 valve closed
8/1/2011	11:55:18 AM	SiCl4 pre valve closed
8/1/2011	11:55:18 AM	SiCl4 post valve closed
8/1/2011	11:55:18 AM	Bypass valve closed
8/1/2011	11:55:18 AM	Bubbler valve closed
8/1/2011	11:55:18 AM	Helium valve opened
8/1/2011	11:55:18 AM	Main Vac valve opened
8/1/2011	11:55:18 AM	Helium MFC set to  20.000000
8/1/2011	11:55:18 AM	H2 MFC set to  0.000000
8/1/2011	11:55:18 AM	BCl3 MFC set to  0.000000
8/1/2011	11:55:18 AM	PHl3 MFC set to  0.000000
8/1/2011	11:55:18 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:55:18 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:55:18 AM	Tube furnace set to 150
8/1/2011	11:55:48 AM	Helium valve closed
8/1/2011	11:55:48 AM	H2 valve closed
8/1/2011	11:55:48 AM	BCl3 valve closed
8/1/2011	11:55:48 AM	PH3 valve closed
8/1/2011	11:55:48 AM	SiCl4 pre valve closed
8/1/2011	11:55:48 AM	SiCl4 post valve closed
8/1/2011	11:55:48 AM	Bypass valve closed
8/1/2011	11:55:48 AM	Bubbler valve closed
8/1/2011	11:55:48 AM	Main Vac valve opened
8/1/2011	11:55:48 AM	Helium MFC set to  0.000000
8/1/2011	11:55:48 AM	H2 MFC set to  0.000000
8/1/2011	11:55:48 AM	BCl3 MFC set to  0.000000
8/1/2011	11:55:48 AM	PHl3 MFC set to  0.000000
8/1/2011	11:55:48 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:55:48 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:55:48 AM	Tube furnace set to 150
8/1/2011	11:56:18 AM	H2 valve closed
8/1/2011	11:56:18 AM	BCl3 valve closed
8/1/2011	11:56:18 AM	PH3 valve closed
8/1/2011	11:56:18 AM	SiCl4 pre valve closed
8/1/2011	11:56:18 AM	SiCl4 post valve closed
8/1/2011	11:56:18 AM	Bypass valve closed
8/1/2011	11:56:18 AM	Bubbler valve closed
8/1/2011	11:56:18 AM	Helium valve opened
8/1/2011	11:56:18 AM	Main Vac valve opened
8/1/2011	11:56:18 AM	Helium MFC set to  20.000000
8/1/2011	11:56:18 AM	H2 MFC set to  0.000000
8/1/2011	11:56:18 AM	BCl3 MFC set to  0.000000
8/1/2011	11:56:18 AM	PHl3 MFC set to  0.000000
8/1/2011	11:56:18 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:56:18 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:56:18 AM	Tube furnace set to 150
8/1/2011	11:56:48 AM	Helium valve closed
8/1/2011	11:56:48 AM	H2 valve closed
8/1/2011	11:56:48 AM	BCl3 valve closed
8/1/2011	11:56:48 AM	PH3 valve closed
8/1/2011	11:56:48 AM	SiCl4 pre valve closed
8/1/2011	11:56:48 AM	SiCl4 post valve closed
8/1/2011	11:56:48 AM	Bypass valve closed
8/1/2011	11:56:48 AM	Bubbler valve closed
8/1/2011	11:56:48 AM	Main Vac valve opened
8/1/2011	11:56:48 AM	Helium MFC set to  0.000000
8/1/2011	11:56:48 AM	H2 MFC set to  0.000000
8/1/2011	11:56:48 AM	BCl3 MFC set to  0.000000
8/1/2011	11:56:48 AM	PHl3 MFC set to  0.000000
8/1/2011	11:56:48 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:56:48 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:56:48 AM	Tube furnace set to 150
8/1/2011	11:57:18 AM	H2 valve closed
8/1/2011	11:57:18 AM	BCl3 valve closed
8/1/2011	11:57:18 AM	PH3 valve closed
8/1/2011	11:57:18 AM	SiCl4 pre valve closed
8/1/2011	11:57:18 AM	SiCl4 post valve closed
8/1/2011	11:57:18 AM	Bypass valve closed
8/1/2011	11:57:18 AM	Bubbler valve closed
8/1/2011	11:57:18 AM	Helium valve opened
8/1/2011	11:57:18 AM	Main Vac valve opened
8/1/2011	11:57:18 AM	Helium MFC set to  20.000000
8/1/2011	11:57:18 AM	H2 MFC set to  0.000000
8/1/2011	11:57:18 AM	BCl3 MFC set to  0.000000
8/1/2011	11:57:18 AM	PHl3 MFC set to  0.000000
8/1/2011	11:57:18 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:57:18 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:57:18 AM	Tube furnace set to 150
8/1/2011	11:57:49 AM	Helium valve closed
8/1/2011	11:57:49 AM	H2 valve closed
8/1/2011	11:57:49 AM	BCl3 valve closed
8/1/2011	11:57:49 AM	PH3 valve closed
8/1/2011	11:57:49 AM	SiCl4 pre valve closed
8/1/2011	11:57:49 AM	SiCl4 post valve closed
8/1/2011	11:57:49 AM	Bypass valve closed
8/1/2011	11:57:49 AM	Bubbler valve closed
8/1/2011	11:57:49 AM	Main Vac valve opened
8/1/2011	11:57:49 AM	Helium MFC set to  0.000000
8/1/2011	11:57:49 AM	H2 MFC set to  0.000000
8/1/2011	11:57:49 AM	BCl3 MFC set to  0.000000
8/1/2011	11:57:49 AM	PHl3 MFC set to  0.000000
8/1/2011	11:57:49 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:57:49 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:57:49 AM	Tube furnace set to 150
8/1/2011	11:58:19 AM	H2 valve closed
8/1/2011	11:58:19 AM	BCl3 valve closed
8/1/2011	11:58:19 AM	PH3 valve closed
8/1/2011	11:58:19 AM	SiCl4 pre valve closed
8/1/2011	11:58:19 AM	SiCl4 post valve closed
8/1/2011	11:58:19 AM	Bypass valve closed
8/1/2011	11:58:19 AM	Bubbler valve closed
8/1/2011	11:58:19 AM	Helium valve opened
8/1/2011	11:58:19 AM	Main Vac valve opened
8/1/2011	11:58:19 AM	Helium MFC set to  20.000000
8/1/2011	11:58:19 AM	H2 MFC set to  0.000000
8/1/2011	11:58:19 AM	BCl3 MFC set to  0.000000
8/1/2011	11:58:19 AM	PHl3 MFC set to  0.000000
8/1/2011	11:58:19 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:58:19 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:58:19 AM	Tube furnace set to 150
8/1/2011	11:58:49 AM	Helium valve closed
8/1/2011	11:58:49 AM	H2 valve closed
8/1/2011	11:58:49 AM	BCl3 valve closed
8/1/2011	11:58:49 AM	PH3 valve closed
8/1/2011	11:58:49 AM	SiCl4 pre valve closed
8/1/2011	11:58:49 AM	SiCl4 post valve closed
8/1/2011	11:58:49 AM	Bypass valve closed
8/1/2011	11:58:49 AM	Bubbler valve closed
8/1/2011	11:58:49 AM	Main Vac valve opened
8/1/2011	11:58:49 AM	Helium MFC set to  0.000000
8/1/2011	11:58:49 AM	H2 MFC set to  0.000000
8/1/2011	11:58:49 AM	BCl3 MFC set to  0.000000
8/1/2011	11:58:49 AM	PHl3 MFC set to  0.000000
8/1/2011	11:58:49 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:58:49 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:58:49 AM	Tube furnace set to 150
8/1/2011	11:59:19 AM	H2 valve closed
8/1/2011	11:59:19 AM	BCl3 valve closed
8/1/2011	11:59:19 AM	PH3 valve closed
8/1/2011	11:59:19 AM	SiCl4 pre valve closed
8/1/2011	11:59:19 AM	SiCl4 post valve closed
8/1/2011	11:59:19 AM	Bypass valve closed
8/1/2011	11:59:19 AM	Bubbler valve closed
8/1/2011	11:59:19 AM	Helium valve opened
8/1/2011	11:59:19 AM	Main Vac valve opened
8/1/2011	11:59:19 AM	Helium MFC set to  20.000000
8/1/2011	11:59:19 AM	H2 MFC set to  0.000000
8/1/2011	11:59:19 AM	BCl3 MFC set to  0.000000
8/1/2011	11:59:19 AM	PHl3 MFC set to  0.000000
8/1/2011	11:59:19 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:59:19 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:59:19 AM	Tube furnace set to 150
8/1/2011	11:59:49 AM	Helium valve closed
8/1/2011	11:59:49 AM	H2 valve closed
8/1/2011	11:59:49 AM	BCl3 valve closed
8/1/2011	11:59:49 AM	PH3 valve closed
8/1/2011	11:59:49 AM	SiCl4 pre valve closed
8/1/2011	11:59:49 AM	SiCl4 post valve closed
8/1/2011	11:59:49 AM	Bypass valve closed
8/1/2011	11:59:49 AM	Bubbler valve closed
8/1/2011	11:59:49 AM	Main Vac valve opened
8/1/2011	11:59:49 AM	Helium MFC set to  0.000000
8/1/2011	11:59:49 AM	H2 MFC set to  0.000000
8/1/2011	11:59:49 AM	BCl3 MFC set to  0.000000
8/1/2011	11:59:49 AM	PHl3 MFC set to  0.000000
8/1/2011	11:59:49 AM	SiCl4 MFC set to  0.000000
8/1/2011	11:59:49 AM	Bypass solenoid MFC set to  0.000000
8/1/2011	11:59:49 AM	Tube furnace set to 150
8/1/2011	12:00:20 PM	H2 valve closed
8/1/2011	12:00:20 PM	BCl3 valve closed
8/1/2011	12:00:20 PM	PH3 valve closed
8/1/2011	12:00:20 PM	SiCl4 pre valve closed
8/1/2011	12:00:20 PM	SiCl4 post valve closed
8/1/2011	12:00:20 PM	Bypass valve closed
8/1/2011	12:00:20 PM	Bubbler valve closed
8/1/2011	12:00:20 PM	Helium valve opened
8/1/2011	12:00:20 PM	Main Vac valve opened
8/1/2011	12:00:20 PM	Helium MFC set to  20.000000
8/1/2011	12:00:20 PM	H2 MFC set to  0.000000
8/1/2011	12:00:20 PM	BCl3 MFC set to  0.000000
8/1/2011	12:00:20 PM	PHl3 MFC set to  0.000000
8/1/2011	12:00:20 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:00:20 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:00:20 PM	Tube furnace set to 150
8/1/2011	12:00:50 PM	Helium valve closed
8/1/2011	12:00:50 PM	H2 valve closed
8/1/2011	12:00:50 PM	BCl3 valve closed
8/1/2011	12:00:50 PM	PH3 valve closed
8/1/2011	12:00:50 PM	SiCl4 pre valve closed
8/1/2011	12:00:50 PM	SiCl4 post valve closed
8/1/2011	12:00:50 PM	Bypass valve closed
8/1/2011	12:00:50 PM	Bubbler valve closed
8/1/2011	12:00:50 PM	Main Vac valve opened
8/1/2011	12:00:50 PM	Helium MFC set to  0.000000
8/1/2011	12:00:50 PM	H2 MFC set to  0.000000
8/1/2011	12:00:50 PM	BCl3 MFC set to  0.000000
8/1/2011	12:00:50 PM	PHl3 MFC set to  0.000000
8/1/2011	12:00:50 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:00:50 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:00:50 PM	Tube furnace set to 150
8/1/2011	12:01:20 PM	H2 valve closed
8/1/2011	12:01:20 PM	BCl3 valve closed
8/1/2011	12:01:20 PM	PH3 valve closed
8/1/2011	12:01:20 PM	SiCl4 pre valve closed
8/1/2011	12:01:20 PM	SiCl4 post valve closed
8/1/2011	12:01:20 PM	Bypass valve closed
8/1/2011	12:01:20 PM	Bubbler valve closed
8/1/2011	12:01:20 PM	Helium valve opened
8/1/2011	12:01:20 PM	Main Vac valve opened
8/1/2011	12:01:20 PM	Helium MFC set to  20.000000
8/1/2011	12:01:20 PM	H2 MFC set to  0.000000
8/1/2011	12:01:20 PM	BCl3 MFC set to  0.000000
8/1/2011	12:01:20 PM	PHl3 MFC set to  0.000000
8/1/2011	12:01:20 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:01:20 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:01:20 PM	Tube furnace set to 150
8/1/2011	12:01:50 PM	Helium valve closed
8/1/2011	12:01:50 PM	H2 valve closed
8/1/2011	12:01:50 PM	BCl3 valve closed
8/1/2011	12:01:50 PM	PH3 valve closed
8/1/2011	12:01:50 PM	SiCl4 pre valve closed
8/1/2011	12:01:50 PM	SiCl4 post valve closed
8/1/2011	12:01:50 PM	Bypass valve closed
8/1/2011	12:01:50 PM	Bubbler valve closed
8/1/2011	12:01:50 PM	Main Vac valve opened
8/1/2011	12:01:50 PM	Helium MFC set to  0.000000
8/1/2011	12:01:50 PM	H2 MFC set to  0.000000
8/1/2011	12:01:50 PM	BCl3 MFC set to  0.000000
8/1/2011	12:01:50 PM	PHl3 MFC set to  0.000000
8/1/2011	12:01:50 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:01:50 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:01:50 PM	Tube furnace set to 150
8/1/2011	12:02:20 PM	H2 valve closed
8/1/2011	12:02:20 PM	BCl3 valve closed
8/1/2011	12:02:20 PM	PH3 valve closed
8/1/2011	12:02:20 PM	SiCl4 pre valve closed
8/1/2011	12:02:20 PM	SiCl4 post valve closed
8/1/2011	12:02:20 PM	Bypass valve closed
8/1/2011	12:02:20 PM	Bubbler valve closed
8/1/2011	12:02:20 PM	Helium valve opened
8/1/2011	12:02:20 PM	Main Vac valve opened
8/1/2011	12:02:20 PM	Helium MFC set to  20.000000
8/1/2011	12:02:20 PM	H2 MFC set to  0.000000
8/1/2011	12:02:20 PM	BCl3 MFC set to  0.000000
8/1/2011	12:02:20 PM	PHl3 MFC set to  0.000000
8/1/2011	12:02:20 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:02:20 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:02:20 PM	Tube furnace set to 150
8/1/2011	12:02:50 PM	Helium valve closed
8/1/2011	12:02:50 PM	H2 valve closed
8/1/2011	12:02:51 PM	BCl3 valve closed
8/1/2011	12:02:51 PM	PH3 valve closed
8/1/2011	12:02:51 PM	SiCl4 pre valve closed
8/1/2011	12:02:51 PM	SiCl4 post valve closed
8/1/2011	12:02:51 PM	Bypass valve closed
8/1/2011	12:02:51 PM	Bubbler valve closed
8/1/2011	12:02:51 PM	Main Vac valve opened
8/1/2011	12:02:51 PM	Helium MFC set to  0.000000
8/1/2011	12:02:51 PM	H2 MFC set to  0.000000
8/1/2011	12:02:51 PM	BCl3 MFC set to  0.000000
8/1/2011	12:02:51 PM	PHl3 MFC set to  0.000000
8/1/2011	12:02:51 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:02:51 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:02:51 PM	Tube furnace set to 150
8/1/2011	12:03:21 PM	H2 valve closed
8/1/2011	12:03:21 PM	BCl3 valve closed
8/1/2011	12:03:21 PM	PH3 valve closed
8/1/2011	12:03:21 PM	SiCl4 pre valve closed
8/1/2011	12:03:21 PM	SiCl4 post valve closed
8/1/2011	12:03:21 PM	Bypass valve closed
8/1/2011	12:03:21 PM	Bubbler valve closed
8/1/2011	12:03:21 PM	Helium valve opened
8/1/2011	12:03:21 PM	Main Vac valve opened
8/1/2011	12:03:21 PM	Helium MFC set to  20.000000
8/1/2011	12:03:21 PM	H2 MFC set to  0.000000
8/1/2011	12:03:21 PM	BCl3 MFC set to  0.000000
8/1/2011	12:03:21 PM	PHl3 MFC set to  0.000000
8/1/2011	12:03:21 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:03:21 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:03:21 PM	Tube furnace set to 150
8/1/2011	12:03:51 PM	Helium valve closed
8/1/2011	12:03:51 PM	H2 valve closed
8/1/2011	12:03:51 PM	BCl3 valve closed
8/1/2011	12:03:51 PM	PH3 valve closed
8/1/2011	12:03:51 PM	SiCl4 pre valve closed
8/1/2011	12:03:51 PM	SiCl4 post valve closed
8/1/2011	12:03:51 PM	Bypass valve closed
8/1/2011	12:03:51 PM	Bubbler valve closed
8/1/2011	12:03:51 PM	Main Vac valve opened
8/1/2011	12:03:51 PM	Helium MFC set to  0.000000
8/1/2011	12:03:51 PM	H2 MFC set to  0.000000
8/1/2011	12:03:51 PM	BCl3 MFC set to  0.000000
8/1/2011	12:03:51 PM	PHl3 MFC set to  0.000000
8/1/2011	12:03:51 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:03:51 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:03:51 PM	Tube furnace set to 150
8/1/2011	12:04:21 PM	H2 valve closed
8/1/2011	12:04:21 PM	BCl3 valve closed
8/1/2011	12:04:21 PM	PH3 valve closed
8/1/2011	12:04:21 PM	SiCl4 pre valve closed
8/1/2011	12:04:21 PM	SiCl4 post valve closed
8/1/2011	12:04:21 PM	Bypass valve closed
8/1/2011	12:04:21 PM	Bubbler valve closed
8/1/2011	12:04:21 PM	Helium valve opened
8/1/2011	12:04:21 PM	Main Vac valve opened
8/1/2011	12:04:21 PM	Helium MFC set to  20.000000
8/1/2011	12:04:21 PM	H2 MFC set to  0.000000
8/1/2011	12:04:21 PM	BCl3 MFC set to  0.000000
8/1/2011	12:04:21 PM	PHl3 MFC set to  0.000000
8/1/2011	12:04:21 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:04:21 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:04:21 PM	Tube furnace set to 150
8/1/2011	12:04:51 PM	Helium valve closed
8/1/2011	12:04:51 PM	H2 valve closed
8/1/2011	12:04:51 PM	BCl3 valve closed
8/1/2011	12:04:51 PM	PH3 valve closed
8/1/2011	12:04:51 PM	SiCl4 pre valve closed
8/1/2011	12:04:51 PM	SiCl4 post valve closed
8/1/2011	12:04:51 PM	Bypass valve closed
8/1/2011	12:04:51 PM	Bubbler valve closed
8/1/2011	12:04:51 PM	Main Vac valve opened
8/1/2011	12:04:51 PM	Helium MFC set to  0.000000
8/1/2011	12:04:51 PM	H2 MFC set to  0.000000
8/1/2011	12:04:51 PM	BCl3 MFC set to  0.000000
8/1/2011	12:04:51 PM	PHl3 MFC set to  0.000000
8/1/2011	12:04:51 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:04:51 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:04:51 PM	Tube furnace set to 150
8/1/2011	12:04:52 PM	Run finished at 12:04 PM
8/1/2011	12:12:38 PM	Recipe started at 12:12 PM
8/1/2011	12:12:38 PM	Helium valve closed
8/1/2011	12:12:38 PM	H2 valve closed
8/1/2011	12:12:38 PM	BCl3 valve closed
8/1/2011	12:12:38 PM	PH3 valve closed
8/1/2011	12:12:38 PM	SiCl4 pre valve closed
8/1/2011	12:12:38 PM	SiCl4 post valve closed
8/1/2011	12:12:38 PM	Bypass valve closed
8/1/2011	12:12:38 PM	Bubbler valve closed
8/1/2011	12:12:38 PM	Main Vac valve opened
8/1/2011	12:12:38 PM	Helium MFC set to  0.000000
8/1/2011	12:12:38 PM	H2 MFC set to  0.000000
8/1/2011	12:12:38 PM	BCl3 MFC set to  0.000000
8/1/2011	12:12:38 PM	PHl3 MFC set to  0.000000
8/1/2011	12:12:38 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:12:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:12:38 PM	Tube furnace set to 150
8/1/2011	12:13:08 PM	H2 valve closed
8/1/2011	12:13:08 PM	BCl3 valve closed
8/1/2011	12:13:08 PM	PH3 valve closed
8/1/2011	12:13:08 PM	SiCl4 pre valve closed
8/1/2011	12:13:08 PM	SiCl4 post valve closed
8/1/2011	12:13:08 PM	Bypass valve closed
8/1/2011	12:13:08 PM	Bubbler valve closed
8/1/2011	12:13:08 PM	Helium valve opened
8/1/2011	12:13:08 PM	Main Vac valve opened
8/1/2011	12:13:08 PM	Helium MFC set to  20.000000
8/1/2011	12:13:08 PM	H2 MFC set to  0.000000
8/1/2011	12:13:08 PM	BCl3 MFC set to  0.000000
8/1/2011	12:13:08 PM	PHl3 MFC set to  0.000000
8/1/2011	12:13:08 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:13:08 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:13:08 PM	Tube furnace set to 150
8/1/2011	12:13:38 PM	Helium valve closed
8/1/2011	12:13:38 PM	H2 valve closed
8/1/2011	12:13:38 PM	BCl3 valve closed
8/1/2011	12:13:38 PM	PH3 valve closed
8/1/2011	12:13:38 PM	SiCl4 pre valve closed
8/1/2011	12:13:38 PM	SiCl4 post valve closed
8/1/2011	12:13:38 PM	Bypass valve closed
8/1/2011	12:13:38 PM	Bubbler valve closed
8/1/2011	12:13:38 PM	Main Vac valve opened
8/1/2011	12:13:38 PM	Helium MFC set to  0.000000
8/1/2011	12:13:38 PM	H2 MFC set to  0.000000
8/1/2011	12:13:38 PM	BCl3 MFC set to  0.000000
8/1/2011	12:13:38 PM	PHl3 MFC set to  0.000000
8/1/2011	12:13:38 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:13:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:13:38 PM	Tube furnace set to 150
8/1/2011	12:14:08 PM	H2 valve closed
8/1/2011	12:14:08 PM	BCl3 valve closed
8/1/2011	12:14:08 PM	PH3 valve closed
8/1/2011	12:14:08 PM	SiCl4 pre valve closed
8/1/2011	12:14:08 PM	SiCl4 post valve closed
8/1/2011	12:14:08 PM	Bypass valve closed
8/1/2011	12:14:08 PM	Bubbler valve closed
8/1/2011	12:14:08 PM	Helium valve opened
8/1/2011	12:14:08 PM	Main Vac valve opened
8/1/2011	12:14:08 PM	Helium MFC set to  20.000000
8/1/2011	12:14:08 PM	H2 MFC set to  0.000000
8/1/2011	12:14:08 PM	BCl3 MFC set to  0.000000
8/1/2011	12:14:08 PM	PHl3 MFC set to  0.000000
8/1/2011	12:14:08 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:14:08 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:14:08 PM	Tube furnace set to 150
8/1/2011	12:14:38 PM	Helium valve closed
8/1/2011	12:14:38 PM	H2 valve closed
8/1/2011	12:14:38 PM	BCl3 valve closed
8/1/2011	12:14:38 PM	PH3 valve closed
8/1/2011	12:14:38 PM	SiCl4 pre valve closed
8/1/2011	12:14:38 PM	SiCl4 post valve closed
8/1/2011	12:14:38 PM	Bypass valve closed
8/1/2011	12:14:38 PM	Bubbler valve closed
8/1/2011	12:14:38 PM	Main Vac valve opened
8/1/2011	12:14:38 PM	Helium MFC set to  0.000000
8/1/2011	12:14:39 PM	H2 MFC set to  0.000000
8/1/2011	12:14:39 PM	BCl3 MFC set to  0.000000
8/1/2011	12:14:39 PM	PHl3 MFC set to  0.000000
8/1/2011	12:14:39 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:14:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:14:39 PM	Tube furnace set to 150
8/1/2011	12:15:09 PM	H2 valve closed
8/1/2011	12:15:09 PM	BCl3 valve closed
8/1/2011	12:15:09 PM	PH3 valve closed
8/1/2011	12:15:09 PM	SiCl4 pre valve closed
8/1/2011	12:15:09 PM	SiCl4 post valve closed
8/1/2011	12:15:09 PM	Bypass valve closed
8/1/2011	12:15:09 PM	Bubbler valve closed
8/1/2011	12:15:09 PM	Helium valve opened
8/1/2011	12:15:09 PM	Main Vac valve opened
8/1/2011	12:15:09 PM	Helium MFC set to  20.000000
8/1/2011	12:15:09 PM	H2 MFC set to  0.000000
8/1/2011	12:15:09 PM	BCl3 MFC set to  0.000000
8/1/2011	12:15:09 PM	PHl3 MFC set to  0.000000
8/1/2011	12:15:09 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:15:09 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:15:09 PM	Tube furnace set to 150
8/1/2011	12:15:39 PM	Helium valve closed
8/1/2011	12:15:39 PM	H2 valve closed
8/1/2011	12:15:39 PM	BCl3 valve closed
8/1/2011	12:15:39 PM	PH3 valve closed
8/1/2011	12:15:39 PM	SiCl4 pre valve closed
8/1/2011	12:15:39 PM	SiCl4 post valve closed
8/1/2011	12:15:39 PM	Bypass valve closed
8/1/2011	12:15:39 PM	Bubbler valve closed
8/1/2011	12:15:39 PM	Main Vac valve opened
8/1/2011	12:15:39 PM	Helium MFC set to  0.000000
8/1/2011	12:15:39 PM	H2 MFC set to  0.000000
8/1/2011	12:15:39 PM	BCl3 MFC set to  0.000000
8/1/2011	12:15:39 PM	PHl3 MFC set to  0.000000
8/1/2011	12:15:39 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:15:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:15:39 PM	Tube furnace set to 150
8/1/2011	12:16:09 PM	H2 valve closed
8/1/2011	12:16:09 PM	BCl3 valve closed
8/1/2011	12:16:09 PM	PH3 valve closed
8/1/2011	12:16:09 PM	SiCl4 pre valve closed
8/1/2011	12:16:09 PM	SiCl4 post valve closed
8/1/2011	12:16:09 PM	Bypass valve closed
8/1/2011	12:16:09 PM	Bubbler valve closed
8/1/2011	12:16:09 PM	Helium valve opened
8/1/2011	12:16:09 PM	Main Vac valve opened
8/1/2011	12:16:09 PM	Helium MFC set to  20.000000
8/1/2011	12:16:09 PM	H2 MFC set to  0.000000
8/1/2011	12:16:09 PM	BCl3 MFC set to  0.000000
8/1/2011	12:16:09 PM	PHl3 MFC set to  0.000000
8/1/2011	12:16:09 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:16:09 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:16:09 PM	Tube furnace set to 150
8/1/2011	12:16:39 PM	Helium valve closed
8/1/2011	12:16:39 PM	H2 valve closed
8/1/2011	12:16:39 PM	BCl3 valve closed
8/1/2011	12:16:39 PM	PH3 valve closed
8/1/2011	12:16:39 PM	SiCl4 pre valve closed
8/1/2011	12:16:39 PM	SiCl4 post valve closed
8/1/2011	12:16:39 PM	Bypass valve closed
8/1/2011	12:16:39 PM	Bubbler valve closed
8/1/2011	12:16:39 PM	Main Vac valve opened
8/1/2011	12:16:39 PM	Helium MFC set to  0.000000
8/1/2011	12:16:39 PM	H2 MFC set to  0.000000
8/1/2011	12:16:39 PM	BCl3 MFC set to  0.000000
8/1/2011	12:16:39 PM	PHl3 MFC set to  0.000000
8/1/2011	12:16:39 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:16:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:16:39 PM	Tube furnace set to 150
8/1/2011	12:17:09 PM	H2 valve closed
8/1/2011	12:17:09 PM	BCl3 valve closed
8/1/2011	12:17:09 PM	PH3 valve closed
8/1/2011	12:17:09 PM	SiCl4 pre valve closed
8/1/2011	12:17:09 PM	SiCl4 post valve closed
8/1/2011	12:17:09 PM	Bypass valve closed
8/1/2011	12:17:09 PM	Bubbler valve closed
8/1/2011	12:17:09 PM	Helium valve opened
8/1/2011	12:17:09 PM	Main Vac valve opened
8/1/2011	12:17:09 PM	Helium MFC set to  20.000000
8/1/2011	12:17:09 PM	H2 MFC set to  0.000000
8/1/2011	12:17:09 PM	BCl3 MFC set to  0.000000
8/1/2011	12:17:09 PM	PHl3 MFC set to  0.000000
8/1/2011	12:17:09 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:17:09 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:17:10 PM	Tube furnace set to 150
8/1/2011	12:17:40 PM	Helium valve closed
8/1/2011	12:17:40 PM	H2 valve closed
8/1/2011	12:17:40 PM	BCl3 valve closed
8/1/2011	12:17:40 PM	PH3 valve closed
8/1/2011	12:17:40 PM	SiCl4 pre valve closed
8/1/2011	12:17:40 PM	SiCl4 post valve closed
8/1/2011	12:17:40 PM	Bypass valve closed
8/1/2011	12:17:40 PM	Bubbler valve closed
8/1/2011	12:17:40 PM	Main Vac valve opened
8/1/2011	12:17:40 PM	Helium MFC set to  0.000000
8/1/2011	12:17:40 PM	H2 MFC set to  0.000000
8/1/2011	12:17:40 PM	BCl3 MFC set to  0.000000
8/1/2011	12:17:40 PM	PHl3 MFC set to  0.000000
8/1/2011	12:17:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:17:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:17:40 PM	Tube furnace set to 150
8/1/2011	12:18:10 PM	H2 valve closed
8/1/2011	12:18:10 PM	BCl3 valve closed
8/1/2011	12:18:10 PM	PH3 valve closed
8/1/2011	12:18:10 PM	SiCl4 pre valve closed
8/1/2011	12:18:10 PM	SiCl4 post valve closed
8/1/2011	12:18:10 PM	Bypass valve closed
8/1/2011	12:18:10 PM	Bubbler valve closed
8/1/2011	12:18:10 PM	Helium valve opened
8/1/2011	12:18:10 PM	Main Vac valve opened
8/1/2011	12:18:10 PM	Helium MFC set to  20.000000
8/1/2011	12:18:10 PM	H2 MFC set to  0.000000
8/1/2011	12:18:10 PM	BCl3 MFC set to  0.000000
8/1/2011	12:18:10 PM	PHl3 MFC set to  0.000000
8/1/2011	12:18:10 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:18:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:18:10 PM	Tube furnace set to 150
8/1/2011	12:18:40 PM	Helium valve closed
8/1/2011	12:18:40 PM	H2 valve closed
8/1/2011	12:18:40 PM	BCl3 valve closed
8/1/2011	12:18:40 PM	PH3 valve closed
8/1/2011	12:18:40 PM	SiCl4 pre valve closed
8/1/2011	12:18:40 PM	SiCl4 post valve closed
8/1/2011	12:18:40 PM	Bypass valve closed
8/1/2011	12:18:40 PM	Bubbler valve closed
8/1/2011	12:18:40 PM	Main Vac valve opened
8/1/2011	12:18:40 PM	Helium MFC set to  0.000000
8/1/2011	12:18:40 PM	H2 MFC set to  0.000000
8/1/2011	12:18:40 PM	BCl3 MFC set to  0.000000
8/1/2011	12:18:40 PM	PHl3 MFC set to  0.000000
8/1/2011	12:18:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:18:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:18:40 PM	Tube furnace set to 150
8/1/2011	12:19:10 PM	H2 valve closed
8/1/2011	12:19:10 PM	BCl3 valve closed
8/1/2011	12:19:10 PM	PH3 valve closed
8/1/2011	12:19:10 PM	SiCl4 pre valve closed
8/1/2011	12:19:10 PM	SiCl4 post valve closed
8/1/2011	12:19:10 PM	Bypass valve closed
8/1/2011	12:19:10 PM	Bubbler valve closed
8/1/2011	12:19:10 PM	Helium valve opened
8/1/2011	12:19:10 PM	Main Vac valve opened
8/1/2011	12:19:10 PM	Helium MFC set to  20.000000
8/1/2011	12:19:10 PM	H2 MFC set to  0.000000
8/1/2011	12:19:10 PM	BCl3 MFC set to  0.000000
8/1/2011	12:19:10 PM	PHl3 MFC set to  0.000000
8/1/2011	12:19:10 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:19:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:19:10 PM	Tube furnace set to 150
8/1/2011	12:19:40 PM	Helium valve closed
8/1/2011	12:19:40 PM	H2 valve closed
8/1/2011	12:19:40 PM	BCl3 valve closed
8/1/2011	12:19:40 PM	PH3 valve closed
8/1/2011	12:19:40 PM	SiCl4 pre valve closed
8/1/2011	12:19:40 PM	SiCl4 post valve closed
8/1/2011	12:19:40 PM	Bypass valve closed
8/1/2011	12:19:40 PM	Bubbler valve closed
8/1/2011	12:19:40 PM	Main Vac valve opened
8/1/2011	12:19:40 PM	Helium MFC set to  0.000000
8/1/2011	12:19:40 PM	H2 MFC set to  0.000000
8/1/2011	12:19:40 PM	BCl3 MFC set to  0.000000
8/1/2011	12:19:40 PM	PHl3 MFC set to  0.000000
8/1/2011	12:19:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:19:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:19:41 PM	Tube furnace set to 150
8/1/2011	12:20:11 PM	H2 valve closed
8/1/2011	12:20:11 PM	BCl3 valve closed
8/1/2011	12:20:11 PM	PH3 valve closed
8/1/2011	12:20:11 PM	SiCl4 pre valve closed
8/1/2011	12:20:11 PM	SiCl4 post valve closed
8/1/2011	12:20:11 PM	Bypass valve closed
8/1/2011	12:20:11 PM	Bubbler valve closed
8/1/2011	12:20:11 PM	Helium valve opened
8/1/2011	12:20:11 PM	Main Vac valve opened
8/1/2011	12:20:11 PM	Helium MFC set to  20.000000
8/1/2011	12:20:11 PM	H2 MFC set to  0.000000
8/1/2011	12:20:11 PM	BCl3 MFC set to  0.000000
8/1/2011	12:20:11 PM	PHl3 MFC set to  0.000000
8/1/2011	12:20:11 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:20:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:20:11 PM	Tube furnace set to 150
8/1/2011	12:20:41 PM	Helium valve closed
8/1/2011	12:20:41 PM	H2 valve closed
8/1/2011	12:20:41 PM	BCl3 valve closed
8/1/2011	12:20:41 PM	PH3 valve closed
8/1/2011	12:20:41 PM	SiCl4 pre valve closed
8/1/2011	12:20:41 PM	SiCl4 post valve closed
8/1/2011	12:20:41 PM	Bypass valve closed
8/1/2011	12:20:41 PM	Bubbler valve closed
8/1/2011	12:20:41 PM	Main Vac valve opened
8/1/2011	12:20:41 PM	Helium MFC set to  0.000000
8/1/2011	12:20:41 PM	H2 MFC set to  0.000000
8/1/2011	12:20:41 PM	BCl3 MFC set to  0.000000
8/1/2011	12:20:41 PM	PHl3 MFC set to  0.000000
8/1/2011	12:20:41 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:20:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:20:41 PM	Tube furnace set to 150
8/1/2011	12:21:10 PM	Run aborted at 12:21 PM
8/1/2011	12:21:10 PM	Helium valve closed
8/1/2011	12:21:10 PM	H2 valve closed
8/1/2011	12:21:10 PM	BCl3 valve closed
8/1/2011	12:21:10 PM	PH3 valve closed
8/1/2011	12:21:10 PM	SiCl4 pre valve closed
8/1/2011	12:21:10 PM	SiCl4 post valve closed
8/1/2011	12:21:10 PM	Bypass valve closed
8/1/2011	12:21:10 PM	Main Vac valve closed
8/1/2011	12:21:10 PM	Bubbler valve closed
8/1/2011	12:21:10 PM	Helium MFC set to  0.000000
8/1/2011	12:21:10 PM	H2 MFC set to  0.000000
8/1/2011	12:21:10 PM	BCl3 MFC set to  0.000000
8/1/2011	12:21:10 PM	PHl3 MFC set to  0.000000
8/1/2011	12:21:10 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:21:10 PM	Tube furnace set to 0
8/1/2011	12:21:34 PM	Recipe started at 12:21 PM
8/1/2011	12:21:34 PM	Helium valve closed
8/1/2011	12:21:34 PM	H2 valve closed
8/1/2011	12:21:34 PM	BCl3 valve closed
8/1/2011	12:21:34 PM	PH3 valve closed
8/1/2011	12:21:34 PM	SiCl4 pre valve closed
8/1/2011	12:21:34 PM	SiCl4 post valve closed
8/1/2011	12:21:34 PM	Bypass valve closed
8/1/2011	12:21:34 PM	Bubbler valve closed
8/1/2011	12:21:34 PM	Main Vac valve opened
8/1/2011	12:21:34 PM	Helium MFC set to  0.000000
8/1/2011	12:21:34 PM	H2 MFC set to  0.000000
8/1/2011	12:21:34 PM	BCl3 MFC set to  0.000000
8/1/2011	12:21:34 PM	PHl3 MFC set to  0.000000
8/1/2011	12:21:34 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:21:34 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:21:35 PM	Tube furnace set to 150
8/1/2011	12:22:05 PM	H2 valve closed
8/1/2011	12:22:05 PM	BCl3 valve closed
8/1/2011	12:22:05 PM	PH3 valve closed
8/1/2011	12:22:05 PM	SiCl4 pre valve closed
8/1/2011	12:22:05 PM	SiCl4 post valve closed
8/1/2011	12:22:05 PM	Bypass valve closed
8/1/2011	12:22:05 PM	Bubbler valve closed
8/1/2011	12:22:05 PM	Helium valve opened
8/1/2011	12:22:05 PM	Main Vac valve opened
8/1/2011	12:22:05 PM	Helium MFC set to  20.000000
8/1/2011	12:22:05 PM	H2 MFC set to  0.000000
8/1/2011	12:22:05 PM	BCl3 MFC set to  0.000000
8/1/2011	12:22:05 PM	PHl3 MFC set to  0.000000
8/1/2011	12:22:05 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:22:05 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:22:05 PM	Tube furnace set to 150
8/1/2011	12:22:35 PM	Helium valve closed
8/1/2011	12:22:35 PM	H2 valve closed
8/1/2011	12:22:35 PM	BCl3 valve closed
8/1/2011	12:22:35 PM	PH3 valve closed
8/1/2011	12:22:35 PM	SiCl4 pre valve closed
8/1/2011	12:22:35 PM	SiCl4 post valve closed
8/1/2011	12:22:35 PM	Bypass valve closed
8/1/2011	12:22:35 PM	Bubbler valve closed
8/1/2011	12:22:35 PM	Main Vac valve opened
8/1/2011	12:22:35 PM	Helium MFC set to  0.000000
8/1/2011	12:22:35 PM	H2 MFC set to  0.000000
8/1/2011	12:22:35 PM	BCl3 MFC set to  0.000000
8/1/2011	12:22:35 PM	PHl3 MFC set to  0.000000
8/1/2011	12:22:35 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:22:35 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:22:35 PM	Tube furnace set to 150
8/1/2011	12:23:05 PM	H2 valve closed
8/1/2011	12:23:05 PM	BCl3 valve closed
8/1/2011	12:23:05 PM	PH3 valve closed
8/1/2011	12:23:05 PM	SiCl4 pre valve closed
8/1/2011	12:23:05 PM	SiCl4 post valve closed
8/1/2011	12:23:05 PM	Bypass valve closed
8/1/2011	12:23:05 PM	Bubbler valve closed
8/1/2011	12:23:05 PM	Helium valve opened
8/1/2011	12:23:05 PM	Main Vac valve opened
8/1/2011	12:23:05 PM	Helium MFC set to  20.000000
8/1/2011	12:23:05 PM	H2 MFC set to  0.000000
8/1/2011	12:23:05 PM	BCl3 MFC set to  0.000000
8/1/2011	12:23:05 PM	PHl3 MFC set to  0.000000
8/1/2011	12:23:05 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:23:05 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:23:05 PM	Tube furnace set to 150
8/1/2011	12:23:35 PM	Helium valve closed
8/1/2011	12:23:35 PM	H2 valve closed
8/1/2011	12:23:35 PM	BCl3 valve closed
8/1/2011	12:23:35 PM	PH3 valve closed
8/1/2011	12:23:35 PM	SiCl4 pre valve closed
8/1/2011	12:23:35 PM	SiCl4 post valve closed
8/1/2011	12:23:35 PM	Bypass valve closed
8/1/2011	12:23:35 PM	Bubbler valve closed
8/1/2011	12:23:35 PM	Main Vac valve opened
8/1/2011	12:23:35 PM	Helium MFC set to  0.000000
8/1/2011	12:23:35 PM	H2 MFC set to  0.000000
8/1/2011	12:23:35 PM	BCl3 MFC set to  0.000000
8/1/2011	12:23:35 PM	PHl3 MFC set to  0.000000
8/1/2011	12:23:35 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:23:35 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:23:35 PM	Tube furnace set to 150
8/1/2011	12:24:05 PM	H2 valve closed
8/1/2011	12:24:05 PM	BCl3 valve closed
8/1/2011	12:24:05 PM	PH3 valve closed
8/1/2011	12:24:05 PM	SiCl4 pre valve closed
8/1/2011	12:24:05 PM	SiCl4 post valve closed
8/1/2011	12:24:05 PM	Bypass valve closed
8/1/2011	12:24:05 PM	Bubbler valve closed
8/1/2011	12:24:05 PM	Helium valve opened
8/1/2011	12:24:05 PM	Main Vac valve opened
8/1/2011	12:24:05 PM	Helium MFC set to  20.000000
8/1/2011	12:24:05 PM	H2 MFC set to  0.000000
8/1/2011	12:24:05 PM	BCl3 MFC set to  0.000000
8/1/2011	12:24:05 PM	PHl3 MFC set to  0.000000
8/1/2011	12:24:05 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:24:05 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:24:06 PM	Tube furnace set to 150
8/1/2011	12:24:36 PM	Helium valve closed
8/1/2011	12:24:36 PM	H2 valve closed
8/1/2011	12:24:36 PM	BCl3 valve closed
8/1/2011	12:24:36 PM	PH3 valve closed
8/1/2011	12:24:36 PM	SiCl4 pre valve closed
8/1/2011	12:24:36 PM	SiCl4 post valve closed
8/1/2011	12:24:36 PM	Bypass valve closed
8/1/2011	12:24:36 PM	Bubbler valve closed
8/1/2011	12:24:36 PM	Main Vac valve opened
8/1/2011	12:24:36 PM	Helium MFC set to  0.000000
8/1/2011	12:24:36 PM	H2 MFC set to  0.000000
8/1/2011	12:24:36 PM	BCl3 MFC set to  0.000000
8/1/2011	12:24:36 PM	PHl3 MFC set to  0.000000
8/1/2011	12:24:36 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:24:36 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:24:36 PM	Tube furnace set to 150
8/1/2011	12:25:06 PM	H2 valve closed
8/1/2011	12:25:06 PM	BCl3 valve closed
8/1/2011	12:25:06 PM	PH3 valve closed
8/1/2011	12:25:06 PM	SiCl4 pre valve closed
8/1/2011	12:25:06 PM	SiCl4 post valve closed
8/1/2011	12:25:06 PM	Bypass valve closed
8/1/2011	12:25:06 PM	Bubbler valve closed
8/1/2011	12:25:06 PM	Helium valve opened
8/1/2011	12:25:06 PM	Main Vac valve opened
8/1/2011	12:25:06 PM	Helium MFC set to  20.000000
8/1/2011	12:25:06 PM	H2 MFC set to  0.000000
8/1/2011	12:25:06 PM	BCl3 MFC set to  0.000000
8/1/2011	12:25:06 PM	PHl3 MFC set to  0.000000
8/1/2011	12:25:06 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:25:06 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:25:06 PM	Tube furnace set to 150
8/1/2011	12:25:36 PM	Helium valve closed
8/1/2011	12:25:36 PM	H2 valve closed
8/1/2011	12:25:36 PM	BCl3 valve closed
8/1/2011	12:25:36 PM	PH3 valve closed
8/1/2011	12:25:36 PM	SiCl4 pre valve closed
8/1/2011	12:25:36 PM	SiCl4 post valve closed
8/1/2011	12:25:36 PM	Bypass valve closed
8/1/2011	12:25:36 PM	Bubbler valve closed
8/1/2011	12:25:36 PM	Main Vac valve opened
8/1/2011	12:25:36 PM	Helium MFC set to  0.000000
8/1/2011	12:25:36 PM	H2 MFC set to  0.000000
8/1/2011	12:25:36 PM	BCl3 MFC set to  0.000000
8/1/2011	12:25:36 PM	PHl3 MFC set to  0.000000
8/1/2011	12:25:36 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:25:36 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:25:36 PM	Tube furnace set to 150
8/1/2011	12:26:06 PM	H2 valve closed
8/1/2011	12:26:06 PM	BCl3 valve closed
8/1/2011	12:26:06 PM	PH3 valve closed
8/1/2011	12:26:06 PM	SiCl4 pre valve closed
8/1/2011	12:26:06 PM	SiCl4 post valve closed
8/1/2011	12:26:06 PM	Bypass valve closed
8/1/2011	12:26:06 PM	Bubbler valve closed
8/1/2011	12:26:06 PM	Helium valve opened
8/1/2011	12:26:06 PM	Main Vac valve opened
8/1/2011	12:26:06 PM	Helium MFC set to  20.000000
8/1/2011	12:26:06 PM	H2 MFC set to  0.000000
8/1/2011	12:26:06 PM	BCl3 MFC set to  0.000000
8/1/2011	12:26:06 PM	PHl3 MFC set to  0.000000
8/1/2011	12:26:06 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:26:06 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:26:06 PM	Tube furnace set to 150
8/1/2011	12:26:36 PM	Helium valve closed
8/1/2011	12:26:36 PM	H2 valve closed
8/1/2011	12:26:36 PM	BCl3 valve closed
8/1/2011	12:26:36 PM	PH3 valve closed
8/1/2011	12:26:36 PM	SiCl4 pre valve closed
8/1/2011	12:26:36 PM	SiCl4 post valve closed
8/1/2011	12:26:36 PM	Bypass valve closed
8/1/2011	12:26:36 PM	Bubbler valve closed
8/1/2011	12:26:36 PM	Main Vac valve opened
8/1/2011	12:26:36 PM	Helium MFC set to  0.000000
8/1/2011	12:26:36 PM	H2 MFC set to  0.000000
8/1/2011	12:26:36 PM	BCl3 MFC set to  0.000000
8/1/2011	12:26:36 PM	PHl3 MFC set to  0.000000
8/1/2011	12:26:36 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:26:36 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:26:37 PM	Tube furnace set to 150
8/1/2011	12:27:07 PM	H2 valve closed
8/1/2011	12:27:07 PM	BCl3 valve closed
8/1/2011	12:27:07 PM	PH3 valve closed
8/1/2011	12:27:07 PM	SiCl4 pre valve closed
8/1/2011	12:27:07 PM	SiCl4 post valve closed
8/1/2011	12:27:07 PM	Bypass valve closed
8/1/2011	12:27:07 PM	Bubbler valve closed
8/1/2011	12:27:07 PM	Helium valve opened
8/1/2011	12:27:07 PM	Main Vac valve opened
8/1/2011	12:27:07 PM	Helium MFC set to  20.000000
8/1/2011	12:27:07 PM	H2 MFC set to  0.000000
8/1/2011	12:27:07 PM	BCl3 MFC set to  0.000000
8/1/2011	12:27:07 PM	PHl3 MFC set to  0.000000
8/1/2011	12:27:07 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:27:07 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:27:07 PM	Tube furnace set to 150
8/1/2011	12:27:37 PM	Helium valve closed
8/1/2011	12:27:37 PM	H2 valve closed
8/1/2011	12:27:37 PM	BCl3 valve closed
8/1/2011	12:27:37 PM	PH3 valve closed
8/1/2011	12:27:37 PM	SiCl4 pre valve closed
8/1/2011	12:27:37 PM	SiCl4 post valve closed
8/1/2011	12:27:37 PM	Bypass valve closed
8/1/2011	12:27:37 PM	Bubbler valve closed
8/1/2011	12:27:37 PM	Main Vac valve opened
8/1/2011	12:27:37 PM	Helium MFC set to  0.000000
8/1/2011	12:27:37 PM	H2 MFC set to  0.000000
8/1/2011	12:27:37 PM	BCl3 MFC set to  0.000000
8/1/2011	12:27:37 PM	PHl3 MFC set to  0.000000
8/1/2011	12:27:37 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:27:37 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:27:37 PM	Tube furnace set to 150
8/1/2011	12:28:07 PM	H2 valve closed
8/1/2011	12:28:07 PM	BCl3 valve closed
8/1/2011	12:28:07 PM	PH3 valve closed
8/1/2011	12:28:07 PM	SiCl4 pre valve closed
8/1/2011	12:28:07 PM	SiCl4 post valve closed
8/1/2011	12:28:07 PM	Bypass valve closed
8/1/2011	12:28:07 PM	Bubbler valve closed
8/1/2011	12:28:07 PM	Helium valve opened
8/1/2011	12:28:07 PM	Main Vac valve opened
8/1/2011	12:28:07 PM	Helium MFC set to  20.000000
8/1/2011	12:28:07 PM	H2 MFC set to  0.000000
8/1/2011	12:28:07 PM	BCl3 MFC set to  0.000000
8/1/2011	12:28:07 PM	PHl3 MFC set to  0.000000
8/1/2011	12:28:07 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:28:07 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:28:07 PM	Tube furnace set to 150
8/1/2011	12:28:37 PM	Helium valve closed
8/1/2011	12:28:37 PM	H2 valve closed
8/1/2011	12:28:37 PM	BCl3 valve closed
8/1/2011	12:28:37 PM	PH3 valve closed
8/1/2011	12:28:37 PM	SiCl4 pre valve closed
8/1/2011	12:28:37 PM	SiCl4 post valve closed
8/1/2011	12:28:37 PM	Bypass valve closed
8/1/2011	12:28:37 PM	Bubbler valve closed
8/1/2011	12:28:37 PM	Main Vac valve opened
8/1/2011	12:28:37 PM	Helium MFC set to  0.000000
8/1/2011	12:28:37 PM	H2 MFC set to  0.000000
8/1/2011	12:28:37 PM	BCl3 MFC set to  0.000000
8/1/2011	12:28:37 PM	PHl3 MFC set to  0.000000
8/1/2011	12:28:37 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:28:37 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:28:38 PM	Tube furnace set to 150
8/1/2011	12:29:08 PM	H2 valve closed
8/1/2011	12:29:08 PM	BCl3 valve closed
8/1/2011	12:29:08 PM	PH3 valve closed
8/1/2011	12:29:08 PM	SiCl4 pre valve closed
8/1/2011	12:29:08 PM	SiCl4 post valve closed
8/1/2011	12:29:08 PM	Bypass valve closed
8/1/2011	12:29:08 PM	Bubbler valve closed
8/1/2011	12:29:08 PM	Helium valve opened
8/1/2011	12:29:08 PM	Main Vac valve opened
8/1/2011	12:29:08 PM	Helium MFC set to  20.000000
8/1/2011	12:29:08 PM	H2 MFC set to  0.000000
8/1/2011	12:29:08 PM	BCl3 MFC set to  0.000000
8/1/2011	12:29:08 PM	PHl3 MFC set to  0.000000
8/1/2011	12:29:08 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:29:08 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:29:08 PM	Tube furnace set to 150
8/1/2011	12:29:38 PM	Helium valve closed
8/1/2011	12:29:38 PM	H2 valve closed
8/1/2011	12:29:38 PM	BCl3 valve closed
8/1/2011	12:29:38 PM	PH3 valve closed
8/1/2011	12:29:38 PM	SiCl4 pre valve closed
8/1/2011	12:29:38 PM	SiCl4 post valve closed
8/1/2011	12:29:38 PM	Bypass valve closed
8/1/2011	12:29:38 PM	Bubbler valve closed
8/1/2011	12:29:38 PM	Main Vac valve opened
8/1/2011	12:29:38 PM	Helium MFC set to  0.000000
8/1/2011	12:29:38 PM	H2 MFC set to  0.000000
8/1/2011	12:29:38 PM	BCl3 MFC set to  0.000000
8/1/2011	12:29:38 PM	PHl3 MFC set to  0.000000
8/1/2011	12:29:38 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:29:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:29:38 PM	Tube furnace set to 150
8/1/2011	12:30:08 PM	H2 valve closed
8/1/2011	12:30:08 PM	BCl3 valve closed
8/1/2011	12:30:08 PM	PH3 valve closed
8/1/2011	12:30:08 PM	SiCl4 pre valve closed
8/1/2011	12:30:08 PM	SiCl4 post valve closed
8/1/2011	12:30:08 PM	Bypass valve closed
8/1/2011	12:30:08 PM	Bubbler valve closed
8/1/2011	12:30:08 PM	Helium valve opened
8/1/2011	12:30:08 PM	Main Vac valve opened
8/1/2011	12:30:08 PM	Helium MFC set to  20.000000
8/1/2011	12:30:08 PM	H2 MFC set to  0.000000
8/1/2011	12:30:08 PM	BCl3 MFC set to  0.000000
8/1/2011	12:30:08 PM	PHl3 MFC set to  0.000000
8/1/2011	12:30:08 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:30:08 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:30:08 PM	Tube furnace set to 150
8/1/2011	12:30:38 PM	Helium valve closed
8/1/2011	12:30:38 PM	H2 valve closed
8/1/2011	12:30:38 PM	BCl3 valve closed
8/1/2011	12:30:38 PM	PH3 valve closed
8/1/2011	12:30:38 PM	SiCl4 pre valve closed
8/1/2011	12:30:38 PM	SiCl4 post valve closed
8/1/2011	12:30:38 PM	Bypass valve closed
8/1/2011	12:30:38 PM	Bubbler valve closed
8/1/2011	12:30:38 PM	Main Vac valve opened
8/1/2011	12:30:38 PM	Helium MFC set to  0.000000
8/1/2011	12:30:38 PM	H2 MFC set to  0.000000
8/1/2011	12:30:38 PM	BCl3 MFC set to  0.000000
8/1/2011	12:30:38 PM	PHl3 MFC set to  0.000000
8/1/2011	12:30:38 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:30:38 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:30:38 PM	Tube furnace set to 150
8/1/2011	12:31:08 PM	H2 valve closed
8/1/2011	12:31:08 PM	BCl3 valve closed
8/1/2011	12:31:08 PM	PH3 valve closed
8/1/2011	12:31:08 PM	SiCl4 pre valve closed
8/1/2011	12:31:08 PM	SiCl4 post valve closed
8/1/2011	12:31:08 PM	Bypass valve closed
8/1/2011	12:31:08 PM	Bubbler valve closed
8/1/2011	12:31:08 PM	Helium valve opened
8/1/2011	12:31:08 PM	Main Vac valve opened
8/1/2011	12:31:08 PM	Helium MFC set to  20.000000
8/1/2011	12:31:08 PM	H2 MFC set to  0.000000
8/1/2011	12:31:08 PM	BCl3 MFC set to  0.000000
8/1/2011	12:31:08 PM	PHl3 MFC set to  0.000000
8/1/2011	12:31:08 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:31:08 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:31:09 PM	Tube furnace set to 150
8/1/2011	12:31:39 PM	Helium valve closed
8/1/2011	12:31:39 PM	H2 valve closed
8/1/2011	12:31:39 PM	BCl3 valve closed
8/1/2011	12:31:39 PM	PH3 valve closed
8/1/2011	12:31:39 PM	SiCl4 pre valve closed
8/1/2011	12:31:39 PM	SiCl4 post valve closed
8/1/2011	12:31:39 PM	Bypass valve closed
8/1/2011	12:31:39 PM	Bubbler valve closed
8/1/2011	12:31:39 PM	Main Vac valve opened
8/1/2011	12:31:39 PM	Helium MFC set to  0.000000
8/1/2011	12:31:39 PM	H2 MFC set to  0.000000
8/1/2011	12:31:39 PM	BCl3 MFC set to  0.000000
8/1/2011	12:31:39 PM	PHl3 MFC set to  0.000000
8/1/2011	12:31:39 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:31:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:31:39 PM	Tube furnace set to 150
8/1/2011	12:31:40 PM	Run finished at 12:31 PM
8/1/2011	12:55:07 PM	Recipe started at 12:55 PM
8/1/2011	12:55:07 PM	Helium valve closed
8/1/2011	12:55:07 PM	H2 valve closed
8/1/2011	12:55:07 PM	BCl3 valve closed
8/1/2011	12:55:07 PM	PH3 valve closed
8/1/2011	12:55:07 PM	SiCl4 pre valve closed
8/1/2011	12:55:07 PM	SiCl4 post valve closed
8/1/2011	12:55:07 PM	Main Vac valve closed
8/1/2011	12:55:07 PM	Bypass valve closed
8/1/2011	12:55:07 PM	Bubbler valve closed
8/1/2011	12:55:07 PM	Helium MFC set to  0.000000
8/1/2011	12:55:07 PM	H2 MFC set to  0.000000
8/1/2011	12:55:07 PM	BCl3 MFC set to  0.000000
8/1/2011	12:55:07 PM	PHl3 MFC set to  0.000000
8/1/2011	12:55:07 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:55:07 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:55:07 PM	Tube furnace set to 0
8/1/2011	12:55:10 PM	Helium valve closed
8/1/2011	12:55:10 PM	BCl3 valve closed
8/1/2011	12:55:10 PM	PH3 valve closed
8/1/2011	12:55:10 PM	SiCl4 pre valve closed
8/1/2011	12:55:10 PM	SiCl4 post valve closed
8/1/2011	12:55:10 PM	Main Vac valve closed
8/1/2011	12:55:10 PM	Bypass valve closed
8/1/2011	12:55:10 PM	Bubbler valve closed
8/1/2011	12:55:11 PM	H2 valve opened
8/1/2011	12:55:11 PM	Helium MFC set to  0.000000
8/1/2011	12:55:11 PM	H2 MFC set to  500.000000
8/1/2011	12:55:11 PM	BCl3 MFC set to  0.000000
8/1/2011	12:55:11 PM	PHl3 MFC set to  0.000000
8/1/2011	12:55:11 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:55:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:55:11 PM	Tube furnace set to 0
8/1/2011	12:56:14 PM	Helium valve closed
8/1/2011	12:56:14 PM	BCl3 valve closed
8/1/2011	12:56:14 PM	PH3 valve closed
8/1/2011	12:56:14 PM	SiCl4 pre valve closed
8/1/2011	12:56:14 PM	SiCl4 post valve closed
8/1/2011	12:56:14 PM	Main Vac valve closed
8/1/2011	12:56:14 PM	Bypass valve closed
8/1/2011	12:56:14 PM	H2 valve opened
8/1/2011	12:56:14 PM	Bubbler valve opened
8/1/2011	12:56:14 PM	Helium MFC set to  0.000000
8/1/2011	12:56:14 PM	H2 MFC set to  500.000000
8/1/2011	12:56:14 PM	BCl3 MFC set to  0.000000
8/1/2011	12:56:14 PM	PHl3 MFC set to  0.000000
8/1/2011	12:56:14 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:56:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:56:14 PM	Tube furnace set to 0
8/1/2011	12:56:15 PM	Helium valve closed
8/1/2011	12:56:15 PM	BCl3 valve closed
8/1/2011	12:56:15 PM	PH3 valve closed
8/1/2011	12:56:15 PM	SiCl4 pre valve closed
8/1/2011	12:56:15 PM	SiCl4 post valve closed
8/1/2011	12:56:15 PM	Main Vac valve closed
8/1/2011	12:56:15 PM	Bypass valve closed
8/1/2011	12:56:15 PM	H2 valve opened
8/1/2011	12:56:15 PM	Bubbler valve opened
8/1/2011	12:56:15 PM	Helium MFC set to  0.000000
8/1/2011	12:56:15 PM	H2 MFC set to  500.000000
8/1/2011	12:56:15 PM	BCl3 MFC set to  0.000000
8/1/2011	12:56:15 PM	PHl3 MFC set to  0.000000
8/1/2011	12:56:15 PM	SiCl4 MFC set to  0.000000
8/1/2011	12:56:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	12:56:15 PM	Tube furnace set to 1000
8/1/2011	1:16:15 PM	Helium valve closed
8/1/2011	1:16:15 PM	PH3 valve closed
8/1/2011	1:16:15 PM	Main Vac valve closed
8/1/2011	1:16:15 PM	Bypass valve closed
8/1/2011	1:16:15 PM	H2 valve opened
8/1/2011	1:16:15 PM	BCl3 valve opened
8/1/2011	1:16:15 PM	SiCl4 pre valve opened
8/1/2011	1:16:15 PM	SiCl4 post valve opened
8/1/2011	1:16:15 PM	Bubbler valve opened
8/1/2011	1:16:15 PM	Helium MFC set to  0.000000
8/1/2011	1:16:15 PM	H2 MFC set to  500.000000
8/1/2011	1:16:15 PM	BCl3 MFC set to  2.300000
8/1/2011	1:16:15 PM	PHl3 MFC set to  0.000000
8/1/2011	1:16:15 PM	SiCl4 MFC set to  50.000000
8/1/2011	1:16:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	1:16:15 PM	Tube furnace set to 1000
8/1/2011	1:32:55 PM	Helium valve closed
8/1/2011	1:32:55 PM	BCl3 valve closed
8/1/2011	1:32:55 PM	PH3 valve closed
8/1/2011	1:32:55 PM	SiCl4 pre valve closed
8/1/2011	1:32:55 PM	SiCl4 post valve closed
8/1/2011	1:32:55 PM	Main Vac valve closed
8/1/2011	1:32:55 PM	Bypass valve closed
8/1/2011	1:32:55 PM	H2 valve opened
8/1/2011	1:32:55 PM	Bubbler valve opened
8/1/2011	1:32:55 PM	Helium MFC set to  0.000000
8/1/2011	1:32:55 PM	H2 MFC set to  500.000000
8/1/2011	1:32:55 PM	BCl3 MFC set to  0.000000
8/1/2011	1:32:55 PM	PHl3 MFC set to  0.000000
8/1/2011	1:32:55 PM	SiCl4 MFC set to  0.000000
8/1/2011	1:32:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	1:32:56 PM	Tube furnace set to 750
8/1/2011	1:37:56 PM	H2 valve closed
8/1/2011	1:37:56 PM	BCl3 valve closed
8/1/2011	1:37:56 PM	PH3 valve closed
8/1/2011	1:37:56 PM	SiCl4 pre valve closed
8/1/2011	1:37:56 PM	SiCl4 post valve closed
8/1/2011	1:37:56 PM	Main Vac valve closed
8/1/2011	1:37:56 PM	Bypass valve closed
8/1/2011	1:37:56 PM	Helium valve opened
8/1/2011	1:37:56 PM	Bubbler valve opened
8/1/2011	1:37:56 PM	Helium MFC set to  500.000000
8/1/2011	1:37:56 PM	H2 MFC set to  0.000000
8/1/2011	1:37:56 PM	BCl3 MFC set to  0.000000
8/1/2011	1:37:56 PM	PHl3 MFC set to  0.000000
8/1/2011	1:37:56 PM	SiCl4 MFC set to  0.000000
8/1/2011	1:37:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	1:37:56 PM	Tube furnace set to 0
8/1/2011	1:49:11 PM	Run aborted at 1:49 PM
8/1/2011	1:49:11 PM	Helium valve closed
8/1/2011	1:49:11 PM	H2 valve closed
8/1/2011	1:49:11 PM	BCl3 valve closed
8/1/2011	1:49:11 PM	PH3 valve closed
8/1/2011	1:49:11 PM	SiCl4 pre valve closed
8/1/2011	1:49:11 PM	SiCl4 post valve closed
8/1/2011	1:49:11 PM	Bypass valve closed
8/1/2011	1:49:11 PM	Main Vac valve closed
8/1/2011	1:49:11 PM	Bubbler valve closed
8/1/2011	1:49:11 PM	Helium MFC set to  0.000000
8/1/2011	1:49:11 PM	H2 MFC set to  0.000000
8/1/2011	1:49:11 PM	BCl3 MFC set to  0.000000
8/1/2011	1:49:11 PM	PHl3 MFC set to  0.000000
8/1/2011	1:49:11 PM	SiCl4 MFC set to  0.000000
8/1/2011	1:49:11 PM	Tube furnace set to 0
8/1/2011	1:49:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	1:49:14 PM	Recipe started at 1:49 PM
8/1/2011	1:49:14 PM	Helium valve closed
8/1/2011	1:49:14 PM	H2 valve closed
8/1/2011	1:49:14 PM	BCl3 valve closed
8/1/2011	1:49:14 PM	PH3 valve closed
8/1/2011	1:49:14 PM	SiCl4 pre valve closed
8/1/2011	1:49:14 PM	SiCl4 post valve closed
8/1/2011	1:49:14 PM	Main Vac valve closed
8/1/2011	1:49:14 PM	Bypass valve closed
8/1/2011	1:49:14 PM	Bubbler valve closed
8/1/2011	1:49:14 PM	Helium MFC set to  0.000000
8/1/2011	1:49:14 PM	H2 MFC set to  0.000000
8/1/2011	1:49:14 PM	BCl3 MFC set to  0.000000
8/1/2011	1:49:14 PM	PHl3 MFC set to  0.000000
8/1/2011	1:49:14 PM	SiCl4 MFC set to  0.000000
8/1/2011	1:49:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	1:49:15 PM	Tube furnace set to 0
8/1/2011	1:49:18 PM	H2 valve closed
8/1/2011	1:49:18 PM	BCl3 valve closed
8/1/2011	1:49:18 PM	PH3 valve closed
8/1/2011	1:49:18 PM	SiCl4 pre valve closed
8/1/2011	1:49:18 PM	SiCl4 post valve closed
8/1/2011	1:49:18 PM	Main Vac valve closed
8/1/2011	1:49:18 PM	Bypass valve closed
8/1/2011	1:49:18 PM	Bubbler valve closed
8/1/2011	1:49:18 PM	Helium valve opened
8/1/2011	1:49:18 PM	Helium MFC set to  500.000000
8/1/2011	1:49:18 PM	H2 MFC set to  0.000000
8/1/2011	1:49:18 PM	BCl3 MFC set to  0.000000
8/1/2011	1:49:18 PM	PHl3 MFC set to  0.000000
8/1/2011	1:49:18 PM	SiCl4 MFC set to  0.000000
8/1/2011	1:49:18 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	1:49:18 PM	Tube furnace set to 0
8/1/2011	1:49:18 PM	Helium valve closed
8/1/2011	1:49:18 PM	H2 valve closed
8/1/2011	1:49:18 PM	BCl3 valve closed
8/1/2011	1:49:18 PM	PH3 valve closed
8/1/2011	1:49:18 PM	SiCl4 pre valve closed
8/1/2011	1:49:18 PM	SiCl4 post valve closed
8/1/2011	1:49:18 PM	Main Vac valve closed
8/1/2011	1:49:18 PM	Bypass valve closed
8/1/2011	1:49:18 PM	Bubbler valve closed
8/1/2011	1:49:18 PM	Helium MFC set to  0.000000
8/1/2011	1:49:18 PM	H2 MFC set to  0.000000
8/1/2011	1:49:18 PM	BCl3 MFC set to  0.000000
8/1/2011	1:49:18 PM	PHl3 MFC set to  0.000000
8/1/2011	1:49:18 PM	SiCl4 MFC set to  0.000000
8/1/2011	1:49:18 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	1:49:18 PM	Tube furnace set to 0
8/1/2011	1:49:19 PM	Run finished at 1:49 PM
8/1/2011	1:49:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	2:00:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	2:00:08 PM	Recipe started at 2:00 PM
8/1/2011	2:00:08 PM	Helium valve closed
8/1/2011	2:00:08 PM	H2 valve closed
8/1/2011	2:00:08 PM	BCl3 valve closed
8/1/2011	2:00:08 PM	PH3 valve closed
8/1/2011	2:00:08 PM	SiCl4 pre valve closed
8/1/2011	2:00:08 PM	SiCl4 post valve closed
8/1/2011	2:00:08 PM	Main Vac valve closed
8/1/2011	2:00:08 PM	Bubbler valve closed
8/1/2011	2:00:08 PM	Bypass valve opened
8/1/2011	2:00:08 PM	Helium MFC set to  0.000000
8/1/2011	2:00:08 PM	H2 MFC set to  0.000000
8/1/2011	2:00:08 PM	BCl3 MFC set to  0.000000
8/1/2011	2:00:08 PM	PHl3 MFC set to  0.000000
8/1/2011	2:00:08 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:00:08 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:00:08 PM	Tube furnace set to 0
8/1/2011	2:01:20 PM	Helium valve closed
8/1/2011	2:01:20 PM	H2 valve closed
8/1/2011	2:01:20 PM	BCl3 valve closed
8/1/2011	2:01:20 PM	PH3 valve closed
8/1/2011	2:01:20 PM	SiCl4 pre valve closed
8/1/2011	2:01:20 PM	SiCl4 post valve closed
8/1/2011	2:01:20 PM	Main Vac valve closed
8/1/2011	2:01:20 PM	Bubbler valve closed
8/1/2011	2:01:20 PM	Bypass valve opened
8/1/2011	2:01:20 PM	Helium MFC set to  0.000000
8/1/2011	2:01:20 PM	H2 MFC set to  0.000000
8/1/2011	2:01:20 PM	BCl3 MFC set to  0.000000
8/1/2011	2:01:20 PM	PHl3 MFC set to  0.000000
8/1/2011	2:01:20 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:01:20 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:01:20 PM	Tube furnace set to 0
8/1/2011	2:02:20 PM	Helium valve closed
8/1/2011	2:02:20 PM	H2 valve closed
8/1/2011	2:02:20 PM	BCl3 valve closed
8/1/2011	2:02:20 PM	PH3 valve closed
8/1/2011	2:02:20 PM	SiCl4 pre valve closed
8/1/2011	2:02:20 PM	SiCl4 post valve closed
8/1/2011	2:02:20 PM	Bypass valve closed
8/1/2011	2:02:20 PM	Bubbler valve closed
8/1/2011	2:02:20 PM	Main Vac valve opened
8/1/2011	2:02:20 PM	Helium MFC set to  0.000000
8/1/2011	2:02:20 PM	H2 MFC set to  0.000000
8/1/2011	2:02:20 PM	BCl3 MFC set to  0.000000
8/1/2011	2:02:20 PM	PHl3 MFC set to  0.000000
8/1/2011	2:02:20 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:02:20 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:02:21 PM	Tube furnace set to 0
8/1/2011	2:02:22 PM	Run finished at 2:02 PM
8/1/2011	2:02:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	2:11:39 PM	Recipe started at 2:11 PM
8/1/2011	2:11:39 PM	Helium valve closed
8/1/2011	2:11:39 PM	H2 valve closed
8/1/2011	2:11:39 PM	BCl3 valve closed
8/1/2011	2:11:39 PM	PH3 valve closed
8/1/2011	2:11:39 PM	SiCl4 pre valve closed
8/1/2011	2:11:39 PM	SiCl4 post valve closed
8/1/2011	2:11:39 PM	Bypass valve closed
8/1/2011	2:11:39 PM	Bubbler valve closed
8/1/2011	2:11:39 PM	Main Vac valve opened
8/1/2011	2:11:39 PM	Helium MFC set to  0.000000
8/1/2011	2:11:39 PM	H2 MFC set to  0.000000
8/1/2011	2:11:39 PM	BCl3 MFC set to  0.000000
8/1/2011	2:11:39 PM	PHl3 MFC set to  0.000000
8/1/2011	2:11:39 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:11:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:11:39 PM	Tube furnace set to 150
8/1/2011	2:12:09 PM	H2 valve closed
8/1/2011	2:12:09 PM	BCl3 valve closed
8/1/2011	2:12:09 PM	PH3 valve closed
8/1/2011	2:12:09 PM	SiCl4 pre valve closed
8/1/2011	2:12:09 PM	SiCl4 post valve closed
8/1/2011	2:12:09 PM	Bypass valve closed
8/1/2011	2:12:09 PM	Bubbler valve closed
8/1/2011	2:12:09 PM	Helium valve opened
8/1/2011	2:12:09 PM	Main Vac valve opened
8/1/2011	2:12:09 PM	Helium MFC set to  20.000000
8/1/2011	2:12:09 PM	H2 MFC set to  0.000000
8/1/2011	2:12:09 PM	BCl3 MFC set to  0.000000
8/1/2011	2:12:09 PM	PHl3 MFC set to  0.000000
8/1/2011	2:12:09 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:12:09 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:12:09 PM	Tube furnace set to 150
8/1/2011	2:12:39 PM	Helium valve closed
8/1/2011	2:12:39 PM	H2 valve closed
8/1/2011	2:12:39 PM	BCl3 valve closed
8/1/2011	2:12:39 PM	PH3 valve closed
8/1/2011	2:12:39 PM	SiCl4 pre valve closed
8/1/2011	2:12:39 PM	SiCl4 post valve closed
8/1/2011	2:12:39 PM	Bypass valve closed
8/1/2011	2:12:39 PM	Bubbler valve closed
8/1/2011	2:12:39 PM	Main Vac valve opened
8/1/2011	2:12:39 PM	Helium MFC set to  0.000000
8/1/2011	2:12:39 PM	H2 MFC set to  0.000000
8/1/2011	2:12:39 PM	BCl3 MFC set to  0.000000
8/1/2011	2:12:39 PM	PHl3 MFC set to  0.000000
8/1/2011	2:12:39 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:12:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:12:39 PM	Tube furnace set to 150
8/1/2011	2:13:09 PM	H2 valve closed
8/1/2011	2:13:09 PM	BCl3 valve closed
8/1/2011	2:13:09 PM	PH3 valve closed
8/1/2011	2:13:09 PM	SiCl4 pre valve closed
8/1/2011	2:13:09 PM	SiCl4 post valve closed
8/1/2011	2:13:09 PM	Bypass valve closed
8/1/2011	2:13:09 PM	Bubbler valve closed
8/1/2011	2:13:09 PM	Helium valve opened
8/1/2011	2:13:09 PM	Main Vac valve opened
8/1/2011	2:13:09 PM	Helium MFC set to  20.000000
8/1/2011	2:13:09 PM	H2 MFC set to  0.000000
8/1/2011	2:13:09 PM	BCl3 MFC set to  0.000000
8/1/2011	2:13:09 PM	PHl3 MFC set to  0.000000
8/1/2011	2:13:09 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:13:09 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:13:10 PM	Tube furnace set to 150
8/1/2011	2:13:40 PM	Helium valve closed
8/1/2011	2:13:40 PM	H2 valve closed
8/1/2011	2:13:40 PM	BCl3 valve closed
8/1/2011	2:13:40 PM	PH3 valve closed
8/1/2011	2:13:40 PM	SiCl4 pre valve closed
8/1/2011	2:13:40 PM	SiCl4 post valve closed
8/1/2011	2:13:40 PM	Bypass valve closed
8/1/2011	2:13:40 PM	Bubbler valve closed
8/1/2011	2:13:40 PM	Main Vac valve opened
8/1/2011	2:13:40 PM	Helium MFC set to  0.000000
8/1/2011	2:13:40 PM	H2 MFC set to  0.000000
8/1/2011	2:13:40 PM	BCl3 MFC set to  0.000000
8/1/2011	2:13:40 PM	PHl3 MFC set to  0.000000
8/1/2011	2:13:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:13:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:13:40 PM	Tube furnace set to 150
8/1/2011	2:14:10 PM	H2 valve closed
8/1/2011	2:14:10 PM	BCl3 valve closed
8/1/2011	2:14:10 PM	PH3 valve closed
8/1/2011	2:14:10 PM	SiCl4 pre valve closed
8/1/2011	2:14:10 PM	SiCl4 post valve closed
8/1/2011	2:14:10 PM	Bypass valve closed
8/1/2011	2:14:10 PM	Bubbler valve closed
8/1/2011	2:14:10 PM	Helium valve opened
8/1/2011	2:14:10 PM	Main Vac valve opened
8/1/2011	2:14:10 PM	Helium MFC set to  20.000000
8/1/2011	2:14:10 PM	H2 MFC set to  0.000000
8/1/2011	2:14:10 PM	BCl3 MFC set to  0.000000
8/1/2011	2:14:10 PM	PHl3 MFC set to  0.000000
8/1/2011	2:14:10 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:14:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:14:10 PM	Tube furnace set to 150
8/1/2011	2:14:40 PM	Helium valve closed
8/1/2011	2:14:40 PM	H2 valve closed
8/1/2011	2:14:40 PM	BCl3 valve closed
8/1/2011	2:14:40 PM	PH3 valve closed
8/1/2011	2:14:40 PM	SiCl4 pre valve closed
8/1/2011	2:14:40 PM	SiCl4 post valve closed
8/1/2011	2:14:40 PM	Bypass valve closed
8/1/2011	2:14:40 PM	Bubbler valve closed
8/1/2011	2:14:40 PM	Main Vac valve opened
8/1/2011	2:14:40 PM	Helium MFC set to  0.000000
8/1/2011	2:14:40 PM	H2 MFC set to  0.000000
8/1/2011	2:14:40 PM	BCl3 MFC set to  0.000000
8/1/2011	2:14:40 PM	PHl3 MFC set to  0.000000
8/1/2011	2:14:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:14:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:14:40 PM	Tube furnace set to 150
8/1/2011	2:15:10 PM	H2 valve closed
8/1/2011	2:15:10 PM	BCl3 valve closed
8/1/2011	2:15:10 PM	PH3 valve closed
8/1/2011	2:15:10 PM	SiCl4 pre valve closed
8/1/2011	2:15:10 PM	SiCl4 post valve closed
8/1/2011	2:15:10 PM	Bypass valve closed
8/1/2011	2:15:10 PM	Bubbler valve closed
8/1/2011	2:15:10 PM	Helium valve opened
8/1/2011	2:15:10 PM	Main Vac valve opened
8/1/2011	2:15:10 PM	Helium MFC set to  20.000000
8/1/2011	2:15:10 PM	H2 MFC set to  0.000000
8/1/2011	2:15:10 PM	BCl3 MFC set to  0.000000
8/1/2011	2:15:10 PM	PHl3 MFC set to  0.000000
8/1/2011	2:15:10 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:15:10 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:15:10 PM	Tube furnace set to 150
8/1/2011	2:15:40 PM	Helium valve closed
8/1/2011	2:15:40 PM	H2 valve closed
8/1/2011	2:15:40 PM	BCl3 valve closed
8/1/2011	2:15:40 PM	PH3 valve closed
8/1/2011	2:15:40 PM	SiCl4 pre valve closed
8/1/2011	2:15:40 PM	SiCl4 post valve closed
8/1/2011	2:15:40 PM	Bypass valve closed
8/1/2011	2:15:40 PM	Bubbler valve closed
8/1/2011	2:15:40 PM	Main Vac valve opened
8/1/2011	2:15:40 PM	Helium MFC set to  0.000000
8/1/2011	2:15:40 PM	H2 MFC set to  0.000000
8/1/2011	2:15:40 PM	BCl3 MFC set to  0.000000
8/1/2011	2:15:40 PM	PHl3 MFC set to  0.000000
8/1/2011	2:15:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:15:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:15:41 PM	Tube furnace set to 150
8/1/2011	2:16:11 PM	H2 valve closed
8/1/2011	2:16:11 PM	BCl3 valve closed
8/1/2011	2:16:11 PM	PH3 valve closed
8/1/2011	2:16:11 PM	SiCl4 pre valve closed
8/1/2011	2:16:11 PM	SiCl4 post valve closed
8/1/2011	2:16:11 PM	Bypass valve closed
8/1/2011	2:16:11 PM	Bubbler valve closed
8/1/2011	2:16:11 PM	Helium valve opened
8/1/2011	2:16:11 PM	Main Vac valve opened
8/1/2011	2:16:11 PM	Helium MFC set to  20.000000
8/1/2011	2:16:11 PM	H2 MFC set to  0.000000
8/1/2011	2:16:11 PM	BCl3 MFC set to  0.000000
8/1/2011	2:16:11 PM	PHl3 MFC set to  0.000000
8/1/2011	2:16:11 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:16:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:16:11 PM	Tube furnace set to 150
8/1/2011	2:16:41 PM	Helium valve closed
8/1/2011	2:16:41 PM	H2 valve closed
8/1/2011	2:16:41 PM	BCl3 valve closed
8/1/2011	2:16:41 PM	PH3 valve closed
8/1/2011	2:16:41 PM	SiCl4 pre valve closed
8/1/2011	2:16:41 PM	SiCl4 post valve closed
8/1/2011	2:16:41 PM	Bypass valve closed
8/1/2011	2:16:41 PM	Bubbler valve closed
8/1/2011	2:16:41 PM	Main Vac valve opened
8/1/2011	2:16:41 PM	Helium MFC set to  0.000000
8/1/2011	2:16:41 PM	H2 MFC set to  0.000000
8/1/2011	2:16:41 PM	BCl3 MFC set to  0.000000
8/1/2011	2:16:41 PM	PHl3 MFC set to  0.000000
8/1/2011	2:16:41 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:16:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:16:41 PM	Tube furnace set to 150
8/1/2011	2:17:11 PM	H2 valve closed
8/1/2011	2:17:11 PM	BCl3 valve closed
8/1/2011	2:17:11 PM	PH3 valve closed
8/1/2011	2:17:11 PM	SiCl4 pre valve closed
8/1/2011	2:17:11 PM	SiCl4 post valve closed
8/1/2011	2:17:11 PM	Bypass valve closed
8/1/2011	2:17:11 PM	Bubbler valve closed
8/1/2011	2:17:11 PM	Helium valve opened
8/1/2011	2:17:11 PM	Main Vac valve opened
8/1/2011	2:17:11 PM	Helium MFC set to  20.000000
8/1/2011	2:17:11 PM	H2 MFC set to  0.000000
8/1/2011	2:17:11 PM	BCl3 MFC set to  0.000000
8/1/2011	2:17:11 PM	PHl3 MFC set to  0.000000
8/1/2011	2:17:11 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:17:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:17:11 PM	Tube furnace set to 150
8/1/2011	2:17:41 PM	Helium valve closed
8/1/2011	2:17:41 PM	H2 valve closed
8/1/2011	2:17:41 PM	BCl3 valve closed
8/1/2011	2:17:41 PM	PH3 valve closed
8/1/2011	2:17:41 PM	SiCl4 pre valve closed
8/1/2011	2:17:41 PM	SiCl4 post valve closed
8/1/2011	2:17:41 PM	Bypass valve closed
8/1/2011	2:17:41 PM	Bubbler valve closed
8/1/2011	2:17:41 PM	Main Vac valve opened
8/1/2011	2:17:41 PM	Helium MFC set to  0.000000
8/1/2011	2:17:41 PM	H2 MFC set to  0.000000
8/1/2011	2:17:41 PM	BCl3 MFC set to  0.000000
8/1/2011	2:17:41 PM	PHl3 MFC set to  0.000000
8/1/2011	2:17:41 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:17:41 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:17:41 PM	Tube furnace set to 150
8/1/2011	2:18:11 PM	H2 valve closed
8/1/2011	2:18:11 PM	BCl3 valve closed
8/1/2011	2:18:11 PM	PH3 valve closed
8/1/2011	2:18:11 PM	SiCl4 pre valve closed
8/1/2011	2:18:11 PM	SiCl4 post valve closed
8/1/2011	2:18:11 PM	Bypass valve closed
8/1/2011	2:18:11 PM	Bubbler valve closed
8/1/2011	2:18:11 PM	Helium valve opened
8/1/2011	2:18:11 PM	Main Vac valve opened
8/1/2011	2:18:11 PM	Helium MFC set to  20.000000
8/1/2011	2:18:11 PM	H2 MFC set to  0.000000
8/1/2011	2:18:11 PM	BCl3 MFC set to  0.000000
8/1/2011	2:18:11 PM	PHl3 MFC set to  0.000000
8/1/2011	2:18:11 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:18:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:18:12 PM	Tube furnace set to 150
8/1/2011	2:18:42 PM	Helium valve closed
8/1/2011	2:18:42 PM	H2 valve closed
8/1/2011	2:18:42 PM	BCl3 valve closed
8/1/2011	2:18:42 PM	PH3 valve closed
8/1/2011	2:18:42 PM	SiCl4 pre valve closed
8/1/2011	2:18:42 PM	SiCl4 post valve closed
8/1/2011	2:18:42 PM	Bypass valve closed
8/1/2011	2:18:42 PM	Bubbler valve closed
8/1/2011	2:18:42 PM	Main Vac valve opened
8/1/2011	2:18:42 PM	Helium MFC set to  0.000000
8/1/2011	2:18:42 PM	H2 MFC set to  0.000000
8/1/2011	2:18:42 PM	BCl3 MFC set to  0.000000
8/1/2011	2:18:42 PM	PHl3 MFC set to  0.000000
8/1/2011	2:18:42 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:18:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:18:42 PM	Tube furnace set to 150
8/1/2011	2:19:12 PM	H2 valve closed
8/1/2011	2:19:12 PM	BCl3 valve closed
8/1/2011	2:19:12 PM	PH3 valve closed
8/1/2011	2:19:12 PM	SiCl4 pre valve closed
8/1/2011	2:19:12 PM	SiCl4 post valve closed
8/1/2011	2:19:12 PM	Bypass valve closed
8/1/2011	2:19:12 PM	Bubbler valve closed
8/1/2011	2:19:12 PM	Helium valve opened
8/1/2011	2:19:12 PM	Main Vac valve opened
8/1/2011	2:19:12 PM	Helium MFC set to  20.000000
8/1/2011	2:19:12 PM	H2 MFC set to  0.000000
8/1/2011	2:19:12 PM	BCl3 MFC set to  0.000000
8/1/2011	2:19:12 PM	PHl3 MFC set to  0.000000
8/1/2011	2:19:12 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:19:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:19:12 PM	Tube furnace set to 150
8/1/2011	2:19:42 PM	Helium valve closed
8/1/2011	2:19:42 PM	H2 valve closed
8/1/2011	2:19:42 PM	BCl3 valve closed
8/1/2011	2:19:42 PM	PH3 valve closed
8/1/2011	2:19:42 PM	SiCl4 pre valve closed
8/1/2011	2:19:42 PM	SiCl4 post valve closed
8/1/2011	2:19:42 PM	Bypass valve closed
8/1/2011	2:19:42 PM	Bubbler valve closed
8/1/2011	2:19:42 PM	Main Vac valve opened
8/1/2011	2:19:42 PM	Helium MFC set to  0.000000
8/1/2011	2:19:42 PM	H2 MFC set to  0.000000
8/1/2011	2:19:42 PM	BCl3 MFC set to  0.000000
8/1/2011	2:19:42 PM	PHl3 MFC set to  0.000000
8/1/2011	2:19:42 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:19:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:19:42 PM	Tube furnace set to 150
8/1/2011	2:20:12 PM	H2 valve closed
8/1/2011	2:20:12 PM	BCl3 valve closed
8/1/2011	2:20:12 PM	PH3 valve closed
8/1/2011	2:20:12 PM	SiCl4 pre valve closed
8/1/2011	2:20:12 PM	SiCl4 post valve closed
8/1/2011	2:20:12 PM	Bypass valve closed
8/1/2011	2:20:12 PM	Bubbler valve closed
8/1/2011	2:20:12 PM	Helium valve opened
8/1/2011	2:20:12 PM	Main Vac valve opened
8/1/2011	2:20:12 PM	Helium MFC set to  20.000000
8/1/2011	2:20:12 PM	H2 MFC set to  0.000000
8/1/2011	2:20:12 PM	BCl3 MFC set to  0.000000
8/1/2011	2:20:12 PM	PHl3 MFC set to  0.000000
8/1/2011	2:20:12 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:20:12 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:20:12 PM	Tube furnace set to 150
8/1/2011	2:20:42 PM	Helium valve closed
8/1/2011	2:20:42 PM	H2 valve closed
8/1/2011	2:20:42 PM	BCl3 valve closed
8/1/2011	2:20:42 PM	PH3 valve closed
8/1/2011	2:20:42 PM	SiCl4 pre valve closed
8/1/2011	2:20:42 PM	SiCl4 post valve closed
8/1/2011	2:20:42 PM	Bypass valve closed
8/1/2011	2:20:42 PM	Bubbler valve closed
8/1/2011	2:20:42 PM	Main Vac valve opened
8/1/2011	2:20:42 PM	Helium MFC set to  0.000000
8/1/2011	2:20:42 PM	H2 MFC set to  0.000000
8/1/2011	2:20:42 PM	BCl3 MFC set to  0.000000
8/1/2011	2:20:42 PM	PHl3 MFC set to  0.000000
8/1/2011	2:20:42 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:20:42 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:20:43 PM	Tube furnace set to 150
8/1/2011	2:21:13 PM	H2 valve closed
8/1/2011	2:21:13 PM	BCl3 valve closed
8/1/2011	2:21:13 PM	PH3 valve closed
8/1/2011	2:21:13 PM	SiCl4 pre valve closed
8/1/2011	2:21:13 PM	SiCl4 post valve closed
8/1/2011	2:21:13 PM	Bypass valve closed
8/1/2011	2:21:13 PM	Bubbler valve closed
8/1/2011	2:21:13 PM	Helium valve opened
8/1/2011	2:21:13 PM	Main Vac valve opened
8/1/2011	2:21:13 PM	Helium MFC set to  20.000000
8/1/2011	2:21:13 PM	H2 MFC set to  0.000000
8/1/2011	2:21:13 PM	BCl3 MFC set to  0.000000
8/1/2011	2:21:13 PM	PHl3 MFC set to  0.000000
8/1/2011	2:21:13 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:21:13 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:21:13 PM	Tube furnace set to 150
8/1/2011	2:21:43 PM	Helium valve closed
8/1/2011	2:21:43 PM	H2 valve closed
8/1/2011	2:21:43 PM	BCl3 valve closed
8/1/2011	2:21:43 PM	PH3 valve closed
8/1/2011	2:21:43 PM	SiCl4 pre valve closed
8/1/2011	2:21:43 PM	SiCl4 post valve closed
8/1/2011	2:21:43 PM	Bypass valve closed
8/1/2011	2:21:43 PM	Bubbler valve closed
8/1/2011	2:21:43 PM	Main Vac valve opened
8/1/2011	2:21:43 PM	Helium MFC set to  0.000000
8/1/2011	2:21:43 PM	H2 MFC set to  0.000000
8/1/2011	2:21:43 PM	BCl3 MFC set to  0.000000
8/1/2011	2:21:43 PM	PHl3 MFC set to  0.000000
8/1/2011	2:21:43 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:21:43 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:21:43 PM	Tube furnace set to 150
8/1/2011	2:21:44 PM	Run finished at 2:21 PM
8/1/2011	2:22:20 PM	Recipe started at 2:22 PM
8/1/2011	2:22:20 PM	Helium valve closed
8/1/2011	2:22:20 PM	H2 valve closed
8/1/2011	2:22:20 PM	BCl3 valve closed
8/1/2011	2:22:20 PM	PH3 valve closed
8/1/2011	2:22:20 PM	SiCl4 pre valve closed
8/1/2011	2:22:20 PM	SiCl4 post valve closed
8/1/2011	2:22:20 PM	Bypass valve closed
8/1/2011	2:22:20 PM	Bubbler valve closed
8/1/2011	2:22:20 PM	Main Vac valve opened
8/1/2011	2:22:20 PM	Helium MFC set to  0.000000
8/1/2011	2:22:20 PM	H2 MFC set to  0.000000
8/1/2011	2:22:20 PM	BCl3 MFC set to  0.000000
8/1/2011	2:22:20 PM	PHl3 MFC set to  0.000000
8/1/2011	2:22:20 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:22:20 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:22:20 PM	Tube furnace set to 150
8/1/2011	2:22:50 PM	H2 valve closed
8/1/2011	2:22:50 PM	BCl3 valve closed
8/1/2011	2:22:50 PM	PH3 valve closed
8/1/2011	2:22:50 PM	SiCl4 pre valve closed
8/1/2011	2:22:50 PM	SiCl4 post valve closed
8/1/2011	2:22:50 PM	Bypass valve closed
8/1/2011	2:22:50 PM	Bubbler valve closed
8/1/2011	2:22:50 PM	Helium valve opened
8/1/2011	2:22:50 PM	Main Vac valve opened
8/1/2011	2:22:50 PM	Helium MFC set to  20.000000
8/1/2011	2:22:50 PM	H2 MFC set to  0.000000
8/1/2011	2:22:50 PM	BCl3 MFC set to  0.000000
8/1/2011	2:22:50 PM	PHl3 MFC set to  0.000000
8/1/2011	2:22:50 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:22:50 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:22:51 PM	Tube furnace set to 150
8/1/2011	2:23:21 PM	Helium valve closed
8/1/2011	2:23:21 PM	H2 valve closed
8/1/2011	2:23:21 PM	BCl3 valve closed
8/1/2011	2:23:21 PM	PH3 valve closed
8/1/2011	2:23:21 PM	SiCl4 pre valve closed
8/1/2011	2:23:21 PM	SiCl4 post valve closed
8/1/2011	2:23:21 PM	Bypass valve closed
8/1/2011	2:23:21 PM	Bubbler valve closed
8/1/2011	2:23:21 PM	Main Vac valve opened
8/1/2011	2:23:21 PM	Helium MFC set to  0.000000
8/1/2011	2:23:21 PM	H2 MFC set to  0.000000
8/1/2011	2:23:21 PM	BCl3 MFC set to  0.000000
8/1/2011	2:23:21 PM	PHl3 MFC set to  0.000000
8/1/2011	2:23:21 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:23:21 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:23:21 PM	Tube furnace set to 150
8/1/2011	2:23:51 PM	H2 valve closed
8/1/2011	2:23:51 PM	BCl3 valve closed
8/1/2011	2:23:51 PM	PH3 valve closed
8/1/2011	2:23:51 PM	SiCl4 pre valve closed
8/1/2011	2:23:51 PM	SiCl4 post valve closed
8/1/2011	2:23:51 PM	Bypass valve closed
8/1/2011	2:23:51 PM	Bubbler valve closed
8/1/2011	2:23:51 PM	Helium valve opened
8/1/2011	2:23:51 PM	Main Vac valve opened
8/1/2011	2:23:51 PM	Helium MFC set to  20.000000
8/1/2011	2:23:51 PM	H2 MFC set to  0.000000
8/1/2011	2:23:51 PM	BCl3 MFC set to  0.000000
8/1/2011	2:23:51 PM	PHl3 MFC set to  0.000000
8/1/2011	2:23:51 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:23:51 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:23:51 PM	Tube furnace set to 150
8/1/2011	2:24:21 PM	Helium valve closed
8/1/2011	2:24:21 PM	H2 valve closed
8/1/2011	2:24:21 PM	BCl3 valve closed
8/1/2011	2:24:21 PM	PH3 valve closed
8/1/2011	2:24:21 PM	SiCl4 pre valve closed
8/1/2011	2:24:21 PM	SiCl4 post valve closed
8/1/2011	2:24:21 PM	Bypass valve closed
8/1/2011	2:24:21 PM	Bubbler valve closed
8/1/2011	2:24:21 PM	Main Vac valve opened
8/1/2011	2:24:21 PM	Helium MFC set to  0.000000
8/1/2011	2:24:21 PM	H2 MFC set to  0.000000
8/1/2011	2:24:21 PM	BCl3 MFC set to  0.000000
8/1/2011	2:24:21 PM	PHl3 MFC set to  0.000000
8/1/2011	2:24:21 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:24:21 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:24:21 PM	Tube furnace set to 150
8/1/2011	2:24:51 PM	H2 valve closed
8/1/2011	2:24:51 PM	BCl3 valve closed
8/1/2011	2:24:51 PM	PH3 valve closed
8/1/2011	2:24:51 PM	SiCl4 pre valve closed
8/1/2011	2:24:51 PM	SiCl4 post valve closed
8/1/2011	2:24:51 PM	Bypass valve closed
8/1/2011	2:24:51 PM	Bubbler valve closed
8/1/2011	2:24:51 PM	Helium valve opened
8/1/2011	2:24:51 PM	Main Vac valve opened
8/1/2011	2:24:51 PM	Helium MFC set to  20.000000
8/1/2011	2:24:51 PM	H2 MFC set to  0.000000
8/1/2011	2:24:51 PM	BCl3 MFC set to  0.000000
8/1/2011	2:24:51 PM	PHl3 MFC set to  0.000000
8/1/2011	2:24:51 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:24:51 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:24:51 PM	Tube furnace set to 150
8/1/2011	2:25:21 PM	Helium valve closed
8/1/2011	2:25:21 PM	H2 valve closed
8/1/2011	2:25:21 PM	BCl3 valve closed
8/1/2011	2:25:21 PM	PH3 valve closed
8/1/2011	2:25:21 PM	SiCl4 pre valve closed
8/1/2011	2:25:21 PM	SiCl4 post valve closed
8/1/2011	2:25:21 PM	Bypass valve closed
8/1/2011	2:25:21 PM	Bubbler valve closed
8/1/2011	2:25:21 PM	Main Vac valve opened
8/1/2011	2:25:21 PM	Helium MFC set to  0.000000
8/1/2011	2:25:21 PM	H2 MFC set to  0.000000
8/1/2011	2:25:21 PM	BCl3 MFC set to  0.000000
8/1/2011	2:25:21 PM	PHl3 MFC set to  0.000000
8/1/2011	2:25:21 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:25:21 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:25:22 PM	Tube furnace set to 150
8/1/2011	2:25:52 PM	H2 valve closed
8/1/2011	2:25:52 PM	BCl3 valve closed
8/1/2011	2:25:52 PM	PH3 valve closed
8/1/2011	2:25:52 PM	SiCl4 pre valve closed
8/1/2011	2:25:52 PM	SiCl4 post valve closed
8/1/2011	2:25:52 PM	Bypass valve closed
8/1/2011	2:25:52 PM	Bubbler valve closed
8/1/2011	2:25:52 PM	Helium valve opened
8/1/2011	2:25:52 PM	Main Vac valve opened
8/1/2011	2:25:52 PM	Helium MFC set to  20.000000
8/1/2011	2:25:52 PM	H2 MFC set to  0.000000
8/1/2011	2:25:52 PM	BCl3 MFC set to  0.000000
8/1/2011	2:25:52 PM	PHl3 MFC set to  0.000000
8/1/2011	2:25:52 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:25:52 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:25:52 PM	Tube furnace set to 150
8/1/2011	2:26:22 PM	Helium valve closed
8/1/2011	2:26:22 PM	H2 valve closed
8/1/2011	2:26:22 PM	BCl3 valve closed
8/1/2011	2:26:22 PM	PH3 valve closed
8/1/2011	2:26:22 PM	SiCl4 pre valve closed
8/1/2011	2:26:22 PM	SiCl4 post valve closed
8/1/2011	2:26:22 PM	Bypass valve closed
8/1/2011	2:26:22 PM	Bubbler valve closed
8/1/2011	2:26:22 PM	Main Vac valve opened
8/1/2011	2:26:22 PM	Helium MFC set to  0.000000
8/1/2011	2:26:22 PM	H2 MFC set to  0.000000
8/1/2011	2:26:22 PM	BCl3 MFC set to  0.000000
8/1/2011	2:26:22 PM	PHl3 MFC set to  0.000000
8/1/2011	2:26:22 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:26:22 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:26:22 PM	Tube furnace set to 150
8/1/2011	2:26:52 PM	H2 valve closed
8/1/2011	2:26:52 PM	BCl3 valve closed
8/1/2011	2:26:52 PM	PH3 valve closed
8/1/2011	2:26:52 PM	SiCl4 pre valve closed
8/1/2011	2:26:52 PM	SiCl4 post valve closed
8/1/2011	2:26:52 PM	Bypass valve closed
8/1/2011	2:26:52 PM	Bubbler valve closed
8/1/2011	2:26:52 PM	Helium valve opened
8/1/2011	2:26:52 PM	Main Vac valve opened
8/1/2011	2:26:52 PM	Helium MFC set to  20.000000
8/1/2011	2:26:52 PM	H2 MFC set to  0.000000
8/1/2011	2:26:52 PM	BCl3 MFC set to  0.000000
8/1/2011	2:26:52 PM	PHl3 MFC set to  0.000000
8/1/2011	2:26:52 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:26:52 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:26:52 PM	Tube furnace set to 150
8/1/2011	2:27:22 PM	Helium valve closed
8/1/2011	2:27:22 PM	H2 valve closed
8/1/2011	2:27:22 PM	BCl3 valve closed
8/1/2011	2:27:22 PM	PH3 valve closed
8/1/2011	2:27:22 PM	SiCl4 pre valve closed
8/1/2011	2:27:22 PM	SiCl4 post valve closed
8/1/2011	2:27:22 PM	Bypass valve closed
8/1/2011	2:27:22 PM	Bubbler valve closed
8/1/2011	2:27:22 PM	Main Vac valve opened
8/1/2011	2:27:22 PM	Helium MFC set to  0.000000
8/1/2011	2:27:22 PM	H2 MFC set to  0.000000
8/1/2011	2:27:22 PM	BCl3 MFC set to  0.000000
8/1/2011	2:27:22 PM	PHl3 MFC set to  0.000000
8/1/2011	2:27:22 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:27:22 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:27:22 PM	Tube furnace set to 150
8/1/2011	2:27:52 PM	H2 valve closed
8/1/2011	2:27:52 PM	BCl3 valve closed
8/1/2011	2:27:52 PM	PH3 valve closed
8/1/2011	2:27:52 PM	SiCl4 pre valve closed
8/1/2011	2:27:52 PM	SiCl4 post valve closed
8/1/2011	2:27:52 PM	Bypass valve closed
8/1/2011	2:27:52 PM	Bubbler valve closed
8/1/2011	2:27:52 PM	Helium valve opened
8/1/2011	2:27:52 PM	Main Vac valve opened
8/1/2011	2:27:52 PM	Helium MFC set to  20.000000
8/1/2011	2:27:52 PM	H2 MFC set to  0.000000
8/1/2011	2:27:52 PM	BCl3 MFC set to  0.000000
8/1/2011	2:27:52 PM	PHl3 MFC set to  0.000000
8/1/2011	2:27:52 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:27:52 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:27:53 PM	Tube furnace set to 150
8/1/2011	2:28:23 PM	Helium valve closed
8/1/2011	2:28:23 PM	H2 valve closed
8/1/2011	2:28:23 PM	BCl3 valve closed
8/1/2011	2:28:23 PM	PH3 valve closed
8/1/2011	2:28:23 PM	SiCl4 pre valve closed
8/1/2011	2:28:23 PM	SiCl4 post valve closed
8/1/2011	2:28:23 PM	Bypass valve closed
8/1/2011	2:28:23 PM	Bubbler valve closed
8/1/2011	2:28:23 PM	Main Vac valve opened
8/1/2011	2:28:23 PM	Helium MFC set to  0.000000
8/1/2011	2:28:23 PM	H2 MFC set to  0.000000
8/1/2011	2:28:23 PM	BCl3 MFC set to  0.000000
8/1/2011	2:28:23 PM	PHl3 MFC set to  0.000000
8/1/2011	2:28:23 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:28:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:28:23 PM	Tube furnace set to 150
8/1/2011	2:28:53 PM	H2 valve closed
8/1/2011	2:28:53 PM	BCl3 valve closed
8/1/2011	2:28:53 PM	PH3 valve closed
8/1/2011	2:28:53 PM	SiCl4 pre valve closed
8/1/2011	2:28:53 PM	SiCl4 post valve closed
8/1/2011	2:28:53 PM	Bypass valve closed
8/1/2011	2:28:53 PM	Bubbler valve closed
8/1/2011	2:28:53 PM	Helium valve opened
8/1/2011	2:28:53 PM	Main Vac valve opened
8/1/2011	2:28:53 PM	Helium MFC set to  20.000000
8/1/2011	2:28:53 PM	H2 MFC set to  0.000000
8/1/2011	2:28:53 PM	BCl3 MFC set to  0.000000
8/1/2011	2:28:53 PM	PHl3 MFC set to  0.000000
8/1/2011	2:28:53 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:28:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:28:53 PM	Tube furnace set to 150
8/1/2011	2:29:23 PM	Helium valve closed
8/1/2011	2:29:23 PM	H2 valve closed
8/1/2011	2:29:23 PM	BCl3 valve closed
8/1/2011	2:29:23 PM	PH3 valve closed
8/1/2011	2:29:23 PM	SiCl4 pre valve closed
8/1/2011	2:29:23 PM	SiCl4 post valve closed
8/1/2011	2:29:23 PM	Bypass valve closed
8/1/2011	2:29:23 PM	Bubbler valve closed
8/1/2011	2:29:23 PM	Main Vac valve opened
8/1/2011	2:29:23 PM	Helium MFC set to  0.000000
8/1/2011	2:29:23 PM	H2 MFC set to  0.000000
8/1/2011	2:29:23 PM	BCl3 MFC set to  0.000000
8/1/2011	2:29:23 PM	PHl3 MFC set to  0.000000
8/1/2011	2:29:23 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:29:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:29:23 PM	Tube furnace set to 150
8/1/2011	2:29:53 PM	H2 valve closed
8/1/2011	2:29:53 PM	BCl3 valve closed
8/1/2011	2:29:53 PM	PH3 valve closed
8/1/2011	2:29:53 PM	SiCl4 pre valve closed
8/1/2011	2:29:53 PM	SiCl4 post valve closed
8/1/2011	2:29:53 PM	Bypass valve closed
8/1/2011	2:29:53 PM	Bubbler valve closed
8/1/2011	2:29:53 PM	Helium valve opened
8/1/2011	2:29:53 PM	Main Vac valve opened
8/1/2011	2:29:53 PM	Helium MFC set to  20.000000
8/1/2011	2:29:53 PM	H2 MFC set to  0.000000
8/1/2011	2:29:53 PM	BCl3 MFC set to  0.000000
8/1/2011	2:29:53 PM	PHl3 MFC set to  0.000000
8/1/2011	2:29:53 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:29:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:29:53 PM	Tube furnace set to 150
8/1/2011	2:30:23 PM	Helium valve closed
8/1/2011	2:30:23 PM	H2 valve closed
8/1/2011	2:30:23 PM	BCl3 valve closed
8/1/2011	2:30:23 PM	PH3 valve closed
8/1/2011	2:30:23 PM	SiCl4 pre valve closed
8/1/2011	2:30:23 PM	SiCl4 post valve closed
8/1/2011	2:30:23 PM	Bypass valve closed
8/1/2011	2:30:23 PM	Bubbler valve closed
8/1/2011	2:30:23 PM	Main Vac valve opened
8/1/2011	2:30:23 PM	Helium MFC set to  0.000000
8/1/2011	2:30:23 PM	H2 MFC set to  0.000000
8/1/2011	2:30:23 PM	BCl3 MFC set to  0.000000
8/1/2011	2:30:23 PM	PHl3 MFC set to  0.000000
8/1/2011	2:30:23 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:30:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:30:24 PM	Tube furnace set to 150
8/1/2011	2:30:54 PM	H2 valve closed
8/1/2011	2:30:54 PM	BCl3 valve closed
8/1/2011	2:30:54 PM	PH3 valve closed
8/1/2011	2:30:54 PM	SiCl4 pre valve closed
8/1/2011	2:30:54 PM	SiCl4 post valve closed
8/1/2011	2:30:54 PM	Bypass valve closed
8/1/2011	2:30:54 PM	Bubbler valve closed
8/1/2011	2:30:54 PM	Helium valve opened
8/1/2011	2:30:54 PM	Main Vac valve opened
8/1/2011	2:30:54 PM	Helium MFC set to  20.000000
8/1/2011	2:30:54 PM	H2 MFC set to  0.000000
8/1/2011	2:30:54 PM	BCl3 MFC set to  0.000000
8/1/2011	2:30:54 PM	PHl3 MFC set to  0.000000
8/1/2011	2:30:54 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:30:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:30:54 PM	Tube furnace set to 150
8/1/2011	2:31:24 PM	Helium valve closed
8/1/2011	2:31:24 PM	H2 valve closed
8/1/2011	2:31:24 PM	BCl3 valve closed
8/1/2011	2:31:24 PM	PH3 valve closed
8/1/2011	2:31:24 PM	SiCl4 pre valve closed
8/1/2011	2:31:24 PM	SiCl4 post valve closed
8/1/2011	2:31:24 PM	Bypass valve closed
8/1/2011	2:31:24 PM	Bubbler valve closed
8/1/2011	2:31:24 PM	Main Vac valve opened
8/1/2011	2:31:24 PM	Helium MFC set to  0.000000
8/1/2011	2:31:24 PM	H2 MFC set to  0.000000
8/1/2011	2:31:24 PM	BCl3 MFC set to  0.000000
8/1/2011	2:31:24 PM	PHl3 MFC set to  0.000000
8/1/2011	2:31:24 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:31:24 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:31:24 PM	Tube furnace set to 150
8/1/2011	2:31:54 PM	H2 valve closed
8/1/2011	2:31:54 PM	BCl3 valve closed
8/1/2011	2:31:54 PM	PH3 valve closed
8/1/2011	2:31:54 PM	SiCl4 pre valve closed
8/1/2011	2:31:54 PM	SiCl4 post valve closed
8/1/2011	2:31:54 PM	Bypass valve closed
8/1/2011	2:31:54 PM	Bubbler valve closed
8/1/2011	2:31:54 PM	Helium valve opened
8/1/2011	2:31:54 PM	Main Vac valve opened
8/1/2011	2:31:54 PM	Helium MFC set to  20.000000
8/1/2011	2:31:54 PM	H2 MFC set to  0.000000
8/1/2011	2:31:54 PM	BCl3 MFC set to  0.000000
8/1/2011	2:31:54 PM	PHl3 MFC set to  0.000000
8/1/2011	2:31:54 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:31:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:31:54 PM	Tube furnace set to 150
8/1/2011	2:32:24 PM	Helium valve closed
8/1/2011	2:32:24 PM	H2 valve closed
8/1/2011	2:32:24 PM	BCl3 valve closed
8/1/2011	2:32:24 PM	PH3 valve closed
8/1/2011	2:32:24 PM	SiCl4 pre valve closed
8/1/2011	2:32:24 PM	SiCl4 post valve closed
8/1/2011	2:32:24 PM	Bypass valve closed
8/1/2011	2:32:24 PM	Bubbler valve closed
8/1/2011	2:32:24 PM	Main Vac valve opened
8/1/2011	2:32:24 PM	Helium MFC set to  0.000000
8/1/2011	2:32:24 PM	H2 MFC set to  0.000000
8/1/2011	2:32:24 PM	BCl3 MFC set to  0.000000
8/1/2011	2:32:24 PM	PHl3 MFC set to  0.000000
8/1/2011	2:32:24 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:32:24 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:32:24 PM	Tube furnace set to 150
8/1/2011	2:32:25 PM	Run finished at 2:32 PM
8/1/2011	2:33:11 PM	Helium MFC set to  20.000000
8/1/2011	2:33:13 PM	Helium valve opened
8/1/2011	2:35:53 PM	Helium valve closed
8/1/2011	2:35:56 PM	Helium MFC set to  0.000000
8/1/2011	2:37:52 PM	Recipe started at 2:37 PM
8/1/2011	2:37:52 PM	Helium valve closed
8/1/2011	2:37:52 PM	H2 valve closed
8/1/2011	2:37:52 PM	BCl3 valve closed
8/1/2011	2:37:52 PM	PH3 valve closed
8/1/2011	2:37:52 PM	SiCl4 pre valve closed
8/1/2011	2:37:52 PM	SiCl4 post valve closed
8/1/2011	2:37:52 PM	Main Vac valve closed
8/1/2011	2:37:52 PM	Bypass valve closed
8/1/2011	2:37:52 PM	Bubbler valve closed
8/1/2011	2:37:52 PM	Helium MFC set to  0.000000
8/1/2011	2:37:52 PM	H2 MFC set to  0.000000
8/1/2011	2:37:52 PM	BCl3 MFC set to  0.000000
8/1/2011	2:37:52 PM	PHl3 MFC set to  0.000000
8/1/2011	2:37:52 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:37:52 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:37:52 PM	Tube furnace set to 0
8/1/2011	2:37:55 PM	Helium valve closed
8/1/2011	2:37:55 PM	BCl3 valve closed
8/1/2011	2:37:55 PM	PH3 valve closed
8/1/2011	2:37:55 PM	SiCl4 pre valve closed
8/1/2011	2:37:55 PM	SiCl4 post valve closed
8/1/2011	2:37:55 PM	Main Vac valve closed
8/1/2011	2:37:55 PM	Bypass valve closed
8/1/2011	2:37:55 PM	Bubbler valve closed
8/1/2011	2:37:55 PM	H2 valve opened
8/1/2011	2:37:55 PM	Helium MFC set to  0.000000
8/1/2011	2:37:55 PM	H2 MFC set to  500.000000
8/1/2011	2:37:55 PM	BCl3 MFC set to  0.000000
8/1/2011	2:37:55 PM	PHl3 MFC set to  0.000000
8/1/2011	2:37:55 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:37:55 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:37:55 PM	Tube furnace set to 0
8/1/2011	2:38:58 PM	Helium valve closed
8/1/2011	2:38:58 PM	BCl3 valve closed
8/1/2011	2:38:58 PM	PH3 valve closed
8/1/2011	2:38:58 PM	SiCl4 pre valve closed
8/1/2011	2:38:58 PM	SiCl4 post valve closed
8/1/2011	2:38:58 PM	Main Vac valve closed
8/1/2011	2:38:58 PM	Bypass valve closed
8/1/2011	2:38:58 PM	H2 valve opened
8/1/2011	2:38:58 PM	Bubbler valve opened
8/1/2011	2:38:58 PM	Helium MFC set to  0.000000
8/1/2011	2:38:58 PM	H2 MFC set to  500.000000
8/1/2011	2:38:58 PM	BCl3 MFC set to  0.000000
8/1/2011	2:38:58 PM	PHl3 MFC set to  0.000000
8/1/2011	2:38:58 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:38:58 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:38:58 PM	Tube furnace set to 0
8/1/2011	2:38:59 PM	Helium valve closed
8/1/2011	2:38:59 PM	BCl3 valve closed
8/1/2011	2:38:59 PM	PH3 valve closed
8/1/2011	2:38:59 PM	SiCl4 pre valve closed
8/1/2011	2:38:59 PM	SiCl4 post valve closed
8/1/2011	2:38:59 PM	Main Vac valve closed
8/1/2011	2:38:59 PM	Bypass valve closed
8/1/2011	2:38:59 PM	H2 valve opened
8/1/2011	2:38:59 PM	Bubbler valve opened
8/1/2011	2:38:59 PM	Helium MFC set to  0.000000
8/1/2011	2:38:59 PM	H2 MFC set to  500.000000
8/1/2011	2:38:59 PM	BCl3 MFC set to  0.000000
8/1/2011	2:38:59 PM	PHl3 MFC set to  0.000000
8/1/2011	2:38:59 PM	SiCl4 MFC set to  0.000000
8/1/2011	2:38:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:39:00 PM	Tube furnace set to 1000
8/1/2011	2:59:00 PM	Helium valve closed
8/1/2011	2:59:00 PM	PH3 valve closed
8/1/2011	2:59:00 PM	Main Vac valve closed
8/1/2011	2:59:00 PM	Bypass valve closed
8/1/2011	2:59:00 PM	H2 valve opened
8/1/2011	2:59:00 PM	BCl3 valve opened
8/1/2011	2:59:00 PM	SiCl4 pre valve opened
8/1/2011	2:59:00 PM	SiCl4 post valve opened
8/1/2011	2:59:00 PM	Bubbler valve opened
8/1/2011	2:59:00 PM	Helium MFC set to  0.000000
8/1/2011	2:59:00 PM	H2 MFC set to  500.000000
8/1/2011	2:59:00 PM	BCl3 MFC set to  2.000000
8/1/2011	2:59:00 PM	PHl3 MFC set to  0.000000
8/1/2011	2:59:00 PM	SiCl4 MFC set to  50.000000
8/1/2011	2:59:00 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	2:59:00 PM	Tube furnace set to 1000
8/1/2011	3:15:40 PM	Helium valve closed
8/1/2011	3:15:40 PM	BCl3 valve closed
8/1/2011	3:15:40 PM	PH3 valve closed
8/1/2011	3:15:40 PM	SiCl4 pre valve closed
8/1/2011	3:15:40 PM	SiCl4 post valve closed
8/1/2011	3:15:40 PM	Main Vac valve closed
8/1/2011	3:15:40 PM	Bypass valve closed
8/1/2011	3:15:40 PM	H2 valve opened
8/1/2011	3:15:40 PM	Bubbler valve opened
8/1/2011	3:15:40 PM	Helium MFC set to  0.000000
8/1/2011	3:15:40 PM	H2 MFC set to  500.000000
8/1/2011	3:15:40 PM	BCl3 MFC set to  0.000000
8/1/2011	3:15:40 PM	PHl3 MFC set to  0.000000
8/1/2011	3:15:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:15:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:15:40 PM	Tube furnace set to 750
8/1/2011	3:20:40 PM	H2 valve closed
8/1/2011	3:20:40 PM	BCl3 valve closed
8/1/2011	3:20:40 PM	PH3 valve closed
8/1/2011	3:20:40 PM	SiCl4 pre valve closed
8/1/2011	3:20:40 PM	SiCl4 post valve closed
8/1/2011	3:20:40 PM	Main Vac valve closed
8/1/2011	3:20:40 PM	Bypass valve closed
8/1/2011	3:20:40 PM	Helium valve opened
8/1/2011	3:20:40 PM	Bubbler valve opened
8/1/2011	3:20:40 PM	Helium MFC set to  500.000000
8/1/2011	3:20:40 PM	H2 MFC set to  0.000000
8/1/2011	3:20:40 PM	BCl3 MFC set to  0.000000
8/1/2011	3:20:40 PM	PHl3 MFC set to  0.000000
8/1/2011	3:20:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:20:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:20:40 PM	Tube furnace set to 0
8/1/2011	3:35:54 PM	Helium valve closed
8/1/2011	3:35:54 PM	H2 valve closed
8/1/2011	3:35:54 PM	BCl3 valve closed
8/1/2011	3:35:54 PM	PH3 valve closed
8/1/2011	3:35:54 PM	SiCl4 pre valve closed
8/1/2011	3:35:54 PM	SiCl4 post valve closed
8/1/2011	3:35:54 PM	Main Vac valve closed
8/1/2011	3:35:54 PM	Bypass valve closed
8/1/2011	3:35:54 PM	Bubbler valve closed
8/1/2011	3:35:54 PM	Helium MFC set to  0.000000
8/1/2011	3:35:54 PM	H2 MFC set to  0.000000
8/1/2011	3:35:54 PM	BCl3 MFC set to  0.000000
8/1/2011	3:35:54 PM	PHl3 MFC set to  0.000000
8/1/2011	3:35:54 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:35:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:35:55 PM	Tube furnace set to 0
8/1/2011	3:35:56 PM	Run finished at 3:35 PM
8/1/2011	3:35:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	3:35:59 PM	Recipe started at 3:35 PM
8/1/2011	3:35:59 PM	Helium valve closed
8/1/2011	3:35:59 PM	H2 valve closed
8/1/2011	3:35:59 PM	BCl3 valve closed
8/1/2011	3:35:59 PM	PH3 valve closed
8/1/2011	3:35:59 PM	SiCl4 pre valve closed
8/1/2011	3:35:59 PM	SiCl4 post valve closed
8/1/2011	3:35:59 PM	Main Vac valve closed
8/1/2011	3:35:59 PM	Bypass valve closed
8/1/2011	3:35:59 PM	Bubbler valve closed
8/1/2011	3:35:59 PM	Helium MFC set to  0.000000
8/1/2011	3:35:59 PM	H2 MFC set to  0.000000
8/1/2011	3:35:59 PM	BCl3 MFC set to  0.000000
8/1/2011	3:35:59 PM	PHl3 MFC set to  0.000000
8/1/2011	3:35:59 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:35:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:35:59 PM	Tube furnace set to 0
8/1/2011	3:36:02 PM	H2 valve closed
8/1/2011	3:36:02 PM	BCl3 valve closed
8/1/2011	3:36:02 PM	PH3 valve closed
8/1/2011	3:36:02 PM	SiCl4 pre valve closed
8/1/2011	3:36:02 PM	SiCl4 post valve closed
8/1/2011	3:36:02 PM	Main Vac valve closed
8/1/2011	3:36:02 PM	Bypass valve closed
8/1/2011	3:36:02 PM	Bubbler valve closed
8/1/2011	3:36:02 PM	Helium valve opened
8/1/2011	3:36:02 PM	Helium MFC set to  500.000000
8/1/2011	3:36:02 PM	H2 MFC set to  0.000000
8/1/2011	3:36:02 PM	BCl3 MFC set to  0.000000
8/1/2011	3:36:02 PM	PHl3 MFC set to  0.000000
8/1/2011	3:36:02 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:36:02 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:36:03 PM	Tube furnace set to 0
8/1/2011	3:36:03 PM	Helium valve closed
8/1/2011	3:36:03 PM	H2 valve closed
8/1/2011	3:36:03 PM	BCl3 valve closed
8/1/2011	3:36:03 PM	PH3 valve closed
8/1/2011	3:36:03 PM	SiCl4 pre valve closed
8/1/2011	3:36:03 PM	SiCl4 post valve closed
8/1/2011	3:36:03 PM	Main Vac valve closed
8/1/2011	3:36:03 PM	Bypass valve closed
8/1/2011	3:36:03 PM	Bubbler valve closed
8/1/2011	3:36:03 PM	Helium MFC set to  0.000000
8/1/2011	3:36:03 PM	H2 MFC set to  0.000000
8/1/2011	3:36:03 PM	BCl3 MFC set to  0.000000
8/1/2011	3:36:03 PM	PHl3 MFC set to  0.000000
8/1/2011	3:36:03 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:36:03 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:36:03 PM	Tube furnace set to 0
8/1/2011	3:36:04 PM	Run finished at 3:36 PM
8/1/2011	3:36:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	3:42:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	3:42:39 PM	Recipe started at 3:42 PM
8/1/2011	3:42:39 PM	Helium valve closed
8/1/2011	3:42:39 PM	H2 valve closed
8/1/2011	3:42:39 PM	BCl3 valve closed
8/1/2011	3:42:39 PM	PH3 valve closed
8/1/2011	3:42:39 PM	SiCl4 pre valve closed
8/1/2011	3:42:39 PM	SiCl4 post valve closed
8/1/2011	3:42:39 PM	Main Vac valve closed
8/1/2011	3:42:39 PM	Bubbler valve closed
8/1/2011	3:42:39 PM	Bypass valve opened
8/1/2011	3:42:39 PM	Helium MFC set to  0.000000
8/1/2011	3:42:39 PM	H2 MFC set to  0.000000
8/1/2011	3:42:39 PM	BCl3 MFC set to  0.000000
8/1/2011	3:42:39 PM	PHl3 MFC set to  0.000000
8/1/2011	3:42:39 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:42:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:42:39 PM	Tube furnace set to 0
8/1/2011	3:43:50 PM	Helium valve closed
8/1/2011	3:43:50 PM	H2 valve closed
8/1/2011	3:43:50 PM	BCl3 valve closed
8/1/2011	3:43:50 PM	PH3 valve closed
8/1/2011	3:43:50 PM	SiCl4 pre valve closed
8/1/2011	3:43:50 PM	SiCl4 post valve closed
8/1/2011	3:43:50 PM	Main Vac valve closed
8/1/2011	3:43:50 PM	Bubbler valve closed
8/1/2011	3:43:50 PM	Bypass valve opened
8/1/2011	3:43:50 PM	Helium MFC set to  0.000000
8/1/2011	3:43:50 PM	H2 MFC set to  0.000000
8/1/2011	3:43:50 PM	BCl3 MFC set to  0.000000
8/1/2011	3:43:50 PM	PHl3 MFC set to  0.000000
8/1/2011	3:43:50 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:43:50 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:43:50 PM	Tube furnace set to 0
8/1/2011	3:44:50 PM	Helium valve closed
8/1/2011	3:44:50 PM	H2 valve closed
8/1/2011	3:44:50 PM	BCl3 valve closed
8/1/2011	3:44:50 PM	PH3 valve closed
8/1/2011	3:44:50 PM	SiCl4 pre valve closed
8/1/2011	3:44:50 PM	SiCl4 post valve closed
8/1/2011	3:44:50 PM	Bypass valve closed
8/1/2011	3:44:50 PM	Bubbler valve closed
8/1/2011	3:44:50 PM	Main Vac valve opened
8/1/2011	3:44:50 PM	Helium MFC set to  0.000000
8/1/2011	3:44:50 PM	H2 MFC set to  0.000000
8/1/2011	3:44:50 PM	BCl3 MFC set to  0.000000
8/1/2011	3:44:50 PM	PHl3 MFC set to  0.000000
8/1/2011	3:44:50 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:44:50 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:44:50 PM	Tube furnace set to 0
8/1/2011	3:44:51 PM	Run finished at 3:44 PM
8/1/2011	3:44:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	3:45:55 PM	Recipe started at 3:45 PM
8/1/2011	3:45:55 PM	Helium valve closed
8/1/2011	3:45:55 PM	H2 valve closed
8/1/2011	3:45:55 PM	BCl3 valve closed
8/1/2011	3:45:55 PM	PH3 valve closed
8/1/2011	3:45:55 PM	SiCl4 pre valve closed
8/1/2011	3:45:55 PM	SiCl4 post valve closed
8/1/2011	3:45:55 PM	Bypass valve closed
8/1/2011	3:45:55 PM	Bubbler valve closed
8/1/2011	3:45:55 PM	Main Vac valve opened
8/1/2011	3:45:55 PM	Helium MFC set to  0.000000
8/1/2011	3:45:55 PM	H2 MFC set to  0.000000
8/1/2011	3:45:55 PM	BCl3 MFC set to  0.000000
8/1/2011	3:45:55 PM	PHl3 MFC set to  0.000000
8/1/2011	3:45:55 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:45:55 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:45:55 PM	Tube furnace set to 150
8/1/2011	3:46:25 PM	H2 valve closed
8/1/2011	3:46:25 PM	BCl3 valve closed
8/1/2011	3:46:25 PM	PH3 valve closed
8/1/2011	3:46:25 PM	SiCl4 pre valve closed
8/1/2011	3:46:25 PM	SiCl4 post valve closed
8/1/2011	3:46:25 PM	Bypass valve closed
8/1/2011	3:46:25 PM	Bubbler valve closed
8/1/2011	3:46:25 PM	Helium valve opened
8/1/2011	3:46:25 PM	Main Vac valve opened
8/1/2011	3:46:25 PM	Helium MFC set to  20.000000
8/1/2011	3:46:25 PM	H2 MFC set to  0.000000
8/1/2011	3:46:25 PM	BCl3 MFC set to  0.000000
8/1/2011	3:46:25 PM	PHl3 MFC set to  0.000000
8/1/2011	3:46:25 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:46:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:46:25 PM	Tube furnace set to 150
8/1/2011	3:46:55 PM	Helium valve closed
8/1/2011	3:46:55 PM	H2 valve closed
8/1/2011	3:46:55 PM	BCl3 valve closed
8/1/2011	3:46:55 PM	PH3 valve closed
8/1/2011	3:46:55 PM	SiCl4 pre valve closed
8/1/2011	3:46:55 PM	SiCl4 post valve closed
8/1/2011	3:46:55 PM	Bypass valve closed
8/1/2011	3:46:55 PM	Bubbler valve closed
8/1/2011	3:46:55 PM	Main Vac valve opened
8/1/2011	3:46:55 PM	Helium MFC set to  0.000000
8/1/2011	3:46:55 PM	H2 MFC set to  0.000000
8/1/2011	3:46:55 PM	BCl3 MFC set to  0.000000
8/1/2011	3:46:55 PM	PHl3 MFC set to  0.000000
8/1/2011	3:46:55 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:46:55 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:46:55 PM	Tube furnace set to 150
8/1/2011	3:47:25 PM	H2 valve closed
8/1/2011	3:47:25 PM	BCl3 valve closed
8/1/2011	3:47:25 PM	PH3 valve closed
8/1/2011	3:47:26 PM	SiCl4 pre valve closed
8/1/2011	3:47:26 PM	SiCl4 post valve closed
8/1/2011	3:47:26 PM	Bypass valve closed
8/1/2011	3:47:26 PM	Bubbler valve closed
8/1/2011	3:47:26 PM	Helium valve opened
8/1/2011	3:47:26 PM	Main Vac valve opened
8/1/2011	3:47:26 PM	Helium MFC set to  20.000000
8/1/2011	3:47:26 PM	H2 MFC set to  0.000000
8/1/2011	3:47:26 PM	BCl3 MFC set to  0.000000
8/1/2011	3:47:26 PM	PHl3 MFC set to  0.000000
8/1/2011	3:47:26 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:47:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:47:26 PM	Tube furnace set to 150
8/1/2011	3:47:56 PM	Helium valve closed
8/1/2011	3:47:56 PM	H2 valve closed
8/1/2011	3:47:56 PM	BCl3 valve closed
8/1/2011	3:47:56 PM	PH3 valve closed
8/1/2011	3:47:56 PM	SiCl4 pre valve closed
8/1/2011	3:47:56 PM	SiCl4 post valve closed
8/1/2011	3:47:56 PM	Bypass valve closed
8/1/2011	3:47:56 PM	Bubbler valve closed
8/1/2011	3:47:56 PM	Main Vac valve opened
8/1/2011	3:47:56 PM	Helium MFC set to  0.000000
8/1/2011	3:47:56 PM	H2 MFC set to  0.000000
8/1/2011	3:47:56 PM	BCl3 MFC set to  0.000000
8/1/2011	3:47:56 PM	PHl3 MFC set to  0.000000
8/1/2011	3:47:56 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:47:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:47:56 PM	Tube furnace set to 150
8/1/2011	3:48:26 PM	H2 valve closed
8/1/2011	3:48:26 PM	BCl3 valve closed
8/1/2011	3:48:26 PM	PH3 valve closed
8/1/2011	3:48:26 PM	SiCl4 pre valve closed
8/1/2011	3:48:26 PM	SiCl4 post valve closed
8/1/2011	3:48:26 PM	Bypass valve closed
8/1/2011	3:48:26 PM	Bubbler valve closed
8/1/2011	3:48:26 PM	Helium valve opened
8/1/2011	3:48:26 PM	Main Vac valve opened
8/1/2011	3:48:26 PM	Helium MFC set to  20.000000
8/1/2011	3:48:26 PM	H2 MFC set to  0.000000
8/1/2011	3:48:26 PM	BCl3 MFC set to  0.000000
8/1/2011	3:48:26 PM	PHl3 MFC set to  0.000000
8/1/2011	3:48:26 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:48:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:48:26 PM	Tube furnace set to 150
8/1/2011	3:48:56 PM	Helium valve closed
8/1/2011	3:48:56 PM	H2 valve closed
8/1/2011	3:48:56 PM	BCl3 valve closed
8/1/2011	3:48:56 PM	PH3 valve closed
8/1/2011	3:48:56 PM	SiCl4 pre valve closed
8/1/2011	3:48:56 PM	SiCl4 post valve closed
8/1/2011	3:48:56 PM	Bypass valve closed
8/1/2011	3:48:56 PM	Bubbler valve closed
8/1/2011	3:48:56 PM	Main Vac valve opened
8/1/2011	3:48:56 PM	Helium MFC set to  0.000000
8/1/2011	3:48:56 PM	H2 MFC set to  0.000000
8/1/2011	3:48:56 PM	BCl3 MFC set to  0.000000
8/1/2011	3:48:56 PM	PHl3 MFC set to  0.000000
8/1/2011	3:48:56 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:48:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:48:56 PM	Tube furnace set to 150
8/1/2011	3:49:26 PM	H2 valve closed
8/1/2011	3:49:26 PM	BCl3 valve closed
8/1/2011	3:49:26 PM	PH3 valve closed
8/1/2011	3:49:26 PM	SiCl4 pre valve closed
8/1/2011	3:49:26 PM	SiCl4 post valve closed
8/1/2011	3:49:26 PM	Bypass valve closed
8/1/2011	3:49:26 PM	Bubbler valve closed
8/1/2011	3:49:26 PM	Helium valve opened
8/1/2011	3:49:26 PM	Main Vac valve opened
8/1/2011	3:49:26 PM	Helium MFC set to  20.000000
8/1/2011	3:49:26 PM	H2 MFC set to  0.000000
8/1/2011	3:49:26 PM	BCl3 MFC set to  0.000000
8/1/2011	3:49:26 PM	PHl3 MFC set to  0.000000
8/1/2011	3:49:26 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:49:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:49:26 PM	Tube furnace set to 150
8/1/2011	3:49:56 PM	Helium valve closed
8/1/2011	3:49:56 PM	H2 valve closed
8/1/2011	3:49:56 PM	BCl3 valve closed
8/1/2011	3:49:56 PM	PH3 valve closed
8/1/2011	3:49:56 PM	SiCl4 pre valve closed
8/1/2011	3:49:56 PM	SiCl4 post valve closed
8/1/2011	3:49:56 PM	Bypass valve closed
8/1/2011	3:49:56 PM	Bubbler valve closed
8/1/2011	3:49:56 PM	Main Vac valve opened
8/1/2011	3:49:56 PM	Helium MFC set to  0.000000
8/1/2011	3:49:57 PM	H2 MFC set to  0.000000
8/1/2011	3:49:57 PM	BCl3 MFC set to  0.000000
8/1/2011	3:49:57 PM	PHl3 MFC set to  0.000000
8/1/2011	3:49:57 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:49:57 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:49:57 PM	Tube furnace set to 150
8/1/2011	3:50:27 PM	H2 valve closed
8/1/2011	3:50:27 PM	BCl3 valve closed
8/1/2011	3:50:27 PM	PH3 valve closed
8/1/2011	3:50:27 PM	SiCl4 pre valve closed
8/1/2011	3:50:27 PM	SiCl4 post valve closed
8/1/2011	3:50:27 PM	Bypass valve closed
8/1/2011	3:50:27 PM	Bubbler valve closed
8/1/2011	3:50:27 PM	Helium valve opened
8/1/2011	3:50:27 PM	Main Vac valve opened
8/1/2011	3:50:27 PM	Helium MFC set to  20.000000
8/1/2011	3:50:27 PM	H2 MFC set to  0.000000
8/1/2011	3:50:27 PM	BCl3 MFC set to  0.000000
8/1/2011	3:50:27 PM	PHl3 MFC set to  0.000000
8/1/2011	3:50:27 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:50:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:50:27 PM	Tube furnace set to 150
8/1/2011	3:50:57 PM	Helium valve closed
8/1/2011	3:50:57 PM	H2 valve closed
8/1/2011	3:50:57 PM	BCl3 valve closed
8/1/2011	3:50:57 PM	PH3 valve closed
8/1/2011	3:50:57 PM	SiCl4 pre valve closed
8/1/2011	3:50:57 PM	SiCl4 post valve closed
8/1/2011	3:50:57 PM	Bypass valve closed
8/1/2011	3:50:57 PM	Bubbler valve closed
8/1/2011	3:50:57 PM	Main Vac valve opened
8/1/2011	3:50:57 PM	Helium MFC set to  0.000000
8/1/2011	3:50:57 PM	H2 MFC set to  0.000000
8/1/2011	3:50:57 PM	BCl3 MFC set to  0.000000
8/1/2011	3:50:57 PM	PHl3 MFC set to  0.000000
8/1/2011	3:50:57 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:50:57 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:50:57 PM	Tube furnace set to 150
8/1/2011	3:51:27 PM	H2 valve closed
8/1/2011	3:51:27 PM	BCl3 valve closed
8/1/2011	3:51:27 PM	PH3 valve closed
8/1/2011	3:51:27 PM	SiCl4 pre valve closed
8/1/2011	3:51:27 PM	SiCl4 post valve closed
8/1/2011	3:51:27 PM	Bypass valve closed
8/1/2011	3:51:27 PM	Bubbler valve closed
8/1/2011	3:51:27 PM	Helium valve opened
8/1/2011	3:51:27 PM	Main Vac valve opened
8/1/2011	3:51:27 PM	Helium MFC set to  20.000000
8/1/2011	3:51:27 PM	H2 MFC set to  0.000000
8/1/2011	3:51:27 PM	BCl3 MFC set to  0.000000
8/1/2011	3:51:27 PM	PHl3 MFC set to  0.000000
8/1/2011	3:51:27 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:51:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:51:27 PM	Tube furnace set to 150
8/1/2011	3:51:57 PM	Helium valve closed
8/1/2011	3:51:57 PM	H2 valve closed
8/1/2011	3:51:57 PM	BCl3 valve closed
8/1/2011	3:51:57 PM	PH3 valve closed
8/1/2011	3:51:57 PM	SiCl4 pre valve closed
8/1/2011	3:51:57 PM	SiCl4 post valve closed
8/1/2011	3:51:57 PM	Bypass valve closed
8/1/2011	3:51:57 PM	Bubbler valve closed
8/1/2011	3:51:57 PM	Main Vac valve opened
8/1/2011	3:51:57 PM	Helium MFC set to  0.000000
8/1/2011	3:51:57 PM	H2 MFC set to  0.000000
8/1/2011	3:51:57 PM	BCl3 MFC set to  0.000000
8/1/2011	3:51:57 PM	PHl3 MFC set to  0.000000
8/1/2011	3:51:57 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:51:57 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:51:58 PM	Tube furnace set to 150
8/1/2011	3:52:28 PM	H2 valve closed
8/1/2011	3:52:28 PM	BCl3 valve closed
8/1/2011	3:52:28 PM	PH3 valve closed
8/1/2011	3:52:28 PM	SiCl4 pre valve closed
8/1/2011	3:52:28 PM	SiCl4 post valve closed
8/1/2011	3:52:28 PM	Bypass valve closed
8/1/2011	3:52:28 PM	Bubbler valve closed
8/1/2011	3:52:28 PM	Helium valve opened
8/1/2011	3:52:28 PM	Main Vac valve opened
8/1/2011	3:52:28 PM	Helium MFC set to  20.000000
8/1/2011	3:52:28 PM	H2 MFC set to  0.000000
8/1/2011	3:52:28 PM	BCl3 MFC set to  0.000000
8/1/2011	3:52:28 PM	PHl3 MFC set to  0.000000
8/1/2011	3:52:28 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:52:28 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:52:28 PM	Tube furnace set to 150
8/1/2011	3:52:58 PM	Helium valve closed
8/1/2011	3:52:58 PM	H2 valve closed
8/1/2011	3:52:58 PM	BCl3 valve closed
8/1/2011	3:52:58 PM	PH3 valve closed
8/1/2011	3:52:58 PM	SiCl4 pre valve closed
8/1/2011	3:52:58 PM	SiCl4 post valve closed
8/1/2011	3:52:58 PM	Bypass valve closed
8/1/2011	3:52:58 PM	Bubbler valve closed
8/1/2011	3:52:58 PM	Main Vac valve opened
8/1/2011	3:52:58 PM	Helium MFC set to  0.000000
8/1/2011	3:52:58 PM	H2 MFC set to  0.000000
8/1/2011	3:52:58 PM	BCl3 MFC set to  0.000000
8/1/2011	3:52:58 PM	PHl3 MFC set to  0.000000
8/1/2011	3:52:58 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:52:58 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:52:58 PM	Tube furnace set to 150
8/1/2011	3:53:28 PM	H2 valve closed
8/1/2011	3:53:28 PM	BCl3 valve closed
8/1/2011	3:53:28 PM	PH3 valve closed
8/1/2011	3:53:28 PM	SiCl4 pre valve closed
8/1/2011	3:53:28 PM	SiCl4 post valve closed
8/1/2011	3:53:28 PM	Bypass valve closed
8/1/2011	3:53:28 PM	Bubbler valve closed
8/1/2011	3:53:28 PM	Helium valve opened
8/1/2011	3:53:28 PM	Main Vac valve opened
8/1/2011	3:53:28 PM	Helium MFC set to  20.000000
8/1/2011	3:53:28 PM	H2 MFC set to  0.000000
8/1/2011	3:53:28 PM	BCl3 MFC set to  0.000000
8/1/2011	3:53:28 PM	PHl3 MFC set to  0.000000
8/1/2011	3:53:28 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:53:28 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:53:28 PM	Tube furnace set to 150
8/1/2011	3:53:58 PM	Helium valve closed
8/1/2011	3:53:58 PM	H2 valve closed
8/1/2011	3:53:58 PM	BCl3 valve closed
8/1/2011	3:53:58 PM	PH3 valve closed
8/1/2011	3:53:58 PM	SiCl4 pre valve closed
8/1/2011	3:53:58 PM	SiCl4 post valve closed
8/1/2011	3:53:58 PM	Bypass valve closed
8/1/2011	3:53:58 PM	Bubbler valve closed
8/1/2011	3:53:58 PM	Main Vac valve opened
8/1/2011	3:53:58 PM	Helium MFC set to  0.000000
8/1/2011	3:53:58 PM	H2 MFC set to  0.000000
8/1/2011	3:53:58 PM	BCl3 MFC set to  0.000000
8/1/2011	3:53:58 PM	PHl3 MFC set to  0.000000
8/1/2011	3:53:58 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:53:58 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:53:58 PM	Tube furnace set to 150
8/1/2011	3:54:28 PM	H2 valve closed
8/1/2011	3:54:28 PM	BCl3 valve closed
8/1/2011	3:54:28 PM	PH3 valve closed
8/1/2011	3:54:28 PM	SiCl4 pre valve closed
8/1/2011	3:54:28 PM	SiCl4 post valve closed
8/1/2011	3:54:28 PM	Bypass valve closed
8/1/2011	3:54:28 PM	Bubbler valve closed
8/1/2011	3:54:28 PM	Helium valve opened
8/1/2011	3:54:28 PM	Main Vac valve opened
8/1/2011	3:54:28 PM	Helium MFC set to  20.000000
8/1/2011	3:54:28 PM	H2 MFC set to  0.000000
8/1/2011	3:54:28 PM	BCl3 MFC set to  0.000000
8/1/2011	3:54:28 PM	PHl3 MFC set to  0.000000
8/1/2011	3:54:28 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:54:28 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:54:29 PM	Tube furnace set to 150
8/1/2011	3:54:59 PM	Helium valve closed
8/1/2011	3:54:59 PM	H2 valve closed
8/1/2011	3:54:59 PM	BCl3 valve closed
8/1/2011	3:54:59 PM	PH3 valve closed
8/1/2011	3:54:59 PM	SiCl4 pre valve closed
8/1/2011	3:54:59 PM	SiCl4 post valve closed
8/1/2011	3:54:59 PM	Bypass valve closed
8/1/2011	3:54:59 PM	Bubbler valve closed
8/1/2011	3:54:59 PM	Main Vac valve opened
8/1/2011	3:54:59 PM	Helium MFC set to  0.000000
8/1/2011	3:54:59 PM	H2 MFC set to  0.000000
8/1/2011	3:54:59 PM	BCl3 MFC set to  0.000000
8/1/2011	3:54:59 PM	PHl3 MFC set to  0.000000
8/1/2011	3:54:59 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:54:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:54:59 PM	Tube furnace set to 150
8/1/2011	3:55:29 PM	H2 valve closed
8/1/2011	3:55:29 PM	BCl3 valve closed
8/1/2011	3:55:29 PM	PH3 valve closed
8/1/2011	3:55:29 PM	SiCl4 pre valve closed
8/1/2011	3:55:29 PM	SiCl4 post valve closed
8/1/2011	3:55:29 PM	Bypass valve closed
8/1/2011	3:55:29 PM	Bubbler valve closed
8/1/2011	3:55:29 PM	Helium valve opened
8/1/2011	3:55:29 PM	Main Vac valve opened
8/1/2011	3:55:29 PM	Helium MFC set to  20.000000
8/1/2011	3:55:29 PM	H2 MFC set to  0.000000
8/1/2011	3:55:29 PM	BCl3 MFC set to  0.000000
8/1/2011	3:55:29 PM	PHl3 MFC set to  0.000000
8/1/2011	3:55:29 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:55:29 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:55:29 PM	Tube furnace set to 150
8/1/2011	3:55:59 PM	Helium valve closed
8/1/2011	3:55:59 PM	H2 valve closed
8/1/2011	3:55:59 PM	BCl3 valve closed
8/1/2011	3:55:59 PM	PH3 valve closed
8/1/2011	3:55:59 PM	SiCl4 pre valve closed
8/1/2011	3:55:59 PM	SiCl4 post valve closed
8/1/2011	3:55:59 PM	Bypass valve closed
8/1/2011	3:55:59 PM	Bubbler valve closed
8/1/2011	3:55:59 PM	Main Vac valve opened
8/1/2011	3:55:59 PM	Helium MFC set to  0.000000
8/1/2011	3:55:59 PM	H2 MFC set to  0.000000
8/1/2011	3:55:59 PM	BCl3 MFC set to  0.000000
8/1/2011	3:55:59 PM	PHl3 MFC set to  0.000000
8/1/2011	3:55:59 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:55:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:55:59 PM	Tube furnace set to 150
8/1/2011	3:56:00 PM	Run finished at 3:56 PM
8/1/2011	3:59:06 PM	Helium MFC set to  0.000000
8/1/2011	3:59:23 PM	Recipe started at 3:59 PM
8/1/2011	3:59:23 PM	Helium valve closed
8/1/2011	3:59:23 PM	H2 valve closed
8/1/2011	3:59:23 PM	BCl3 valve closed
8/1/2011	3:59:23 PM	PH3 valve closed
8/1/2011	3:59:23 PM	SiCl4 pre valve closed
8/1/2011	3:59:23 PM	SiCl4 post valve closed
8/1/2011	3:59:23 PM	Bypass valve closed
8/1/2011	3:59:23 PM	Bubbler valve closed
8/1/2011	3:59:23 PM	Main Vac valve opened
8/1/2011	3:59:23 PM	Helium MFC set to  0.000000
8/1/2011	3:59:23 PM	H2 MFC set to  0.000000
8/1/2011	3:59:23 PM	BCl3 MFC set to  0.000000
8/1/2011	3:59:23 PM	PHl3 MFC set to  0.000000
8/1/2011	3:59:23 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:59:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:59:23 PM	Tube furnace set to 150
8/1/2011	3:59:53 PM	H2 valve closed
8/1/2011	3:59:53 PM	BCl3 valve closed
8/1/2011	3:59:53 PM	PH3 valve closed
8/1/2011	3:59:53 PM	SiCl4 pre valve closed
8/1/2011	3:59:53 PM	SiCl4 post valve closed
8/1/2011	3:59:53 PM	Bypass valve closed
8/1/2011	3:59:53 PM	Bubbler valve closed
8/1/2011	3:59:53 PM	Helium valve opened
8/1/2011	3:59:53 PM	Main Vac valve opened
8/1/2011	3:59:53 PM	Helium MFC set to  20.000000
8/1/2011	3:59:53 PM	H2 MFC set to  0.000000
8/1/2011	3:59:53 PM	BCl3 MFC set to  0.000000
8/1/2011	3:59:53 PM	PHl3 MFC set to  0.000000
8/1/2011	3:59:53 PM	SiCl4 MFC set to  0.000000
8/1/2011	3:59:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	3:59:53 PM	Tube furnace set to 150
8/1/2011	4:00:23 PM	Helium valve closed
8/1/2011	4:00:23 PM	H2 valve closed
8/1/2011	4:00:23 PM	BCl3 valve closed
8/1/2011	4:00:23 PM	PH3 valve closed
8/1/2011	4:00:23 PM	SiCl4 pre valve closed
8/1/2011	4:00:23 PM	SiCl4 post valve closed
8/1/2011	4:00:23 PM	Bypass valve closed
8/1/2011	4:00:23 PM	Bubbler valve closed
8/1/2011	4:00:23 PM	Main Vac valve opened
8/1/2011	4:00:23 PM	Helium MFC set to  0.000000
8/1/2011	4:00:23 PM	H2 MFC set to  0.000000
8/1/2011	4:00:23 PM	BCl3 MFC set to  0.000000
8/1/2011	4:00:23 PM	PHl3 MFC set to  0.000000
8/1/2011	4:00:23 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:00:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:00:23 PM	Tube furnace set to 150
8/1/2011	4:00:53 PM	H2 valve closed
8/1/2011	4:00:53 PM	BCl3 valve closed
8/1/2011	4:00:53 PM	PH3 valve closed
8/1/2011	4:00:53 PM	SiCl4 pre valve closed
8/1/2011	4:00:53 PM	SiCl4 post valve closed
8/1/2011	4:00:53 PM	Bypass valve closed
8/1/2011	4:00:53 PM	Bubbler valve closed
8/1/2011	4:00:53 PM	Helium valve opened
8/1/2011	4:00:53 PM	Main Vac valve opened
8/1/2011	4:00:53 PM	Helium MFC set to  20.000000
8/1/2011	4:00:53 PM	H2 MFC set to  0.000000
8/1/2011	4:00:53 PM	BCl3 MFC set to  0.000000
8/1/2011	4:00:53 PM	PHl3 MFC set to  0.000000
8/1/2011	4:00:53 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:00:53 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:00:53 PM	Tube furnace set to 150
8/1/2011	4:01:23 PM	Helium valve closed
8/1/2011	4:01:23 PM	H2 valve closed
8/1/2011	4:01:23 PM	BCl3 valve closed
8/1/2011	4:01:23 PM	PH3 valve closed
8/1/2011	4:01:23 PM	SiCl4 pre valve closed
8/1/2011	4:01:23 PM	SiCl4 post valve closed
8/1/2011	4:01:23 PM	Bypass valve closed
8/1/2011	4:01:23 PM	Bubbler valve closed
8/1/2011	4:01:23 PM	Main Vac valve opened
8/1/2011	4:01:23 PM	Helium MFC set to  0.000000
8/1/2011	4:01:23 PM	H2 MFC set to  0.000000
8/1/2011	4:01:23 PM	BCl3 MFC set to  0.000000
8/1/2011	4:01:23 PM	PHl3 MFC set to  0.000000
8/1/2011	4:01:23 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:01:23 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:01:24 PM	Tube furnace set to 150
8/1/2011	4:01:54 PM	H2 valve closed
8/1/2011	4:01:54 PM	BCl3 valve closed
8/1/2011	4:01:54 PM	PH3 valve closed
8/1/2011	4:01:54 PM	SiCl4 pre valve closed
8/1/2011	4:01:54 PM	SiCl4 post valve closed
8/1/2011	4:01:54 PM	Bypass valve closed
8/1/2011	4:01:54 PM	Bubbler valve closed
8/1/2011	4:01:54 PM	Helium valve opened
8/1/2011	4:01:54 PM	Main Vac valve opened
8/1/2011	4:01:54 PM	Helium MFC set to  20.000000
8/1/2011	4:01:54 PM	H2 MFC set to  0.000000
8/1/2011	4:01:54 PM	BCl3 MFC set to  0.000000
8/1/2011	4:01:54 PM	PHl3 MFC set to  0.000000
8/1/2011	4:01:54 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:01:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:01:54 PM	Tube furnace set to 150
8/1/2011	4:02:24 PM	Helium valve closed
8/1/2011	4:02:24 PM	H2 valve closed
8/1/2011	4:02:24 PM	BCl3 valve closed
8/1/2011	4:02:24 PM	PH3 valve closed
8/1/2011	4:02:24 PM	SiCl4 pre valve closed
8/1/2011	4:02:24 PM	SiCl4 post valve closed
8/1/2011	4:02:24 PM	Bypass valve closed
8/1/2011	4:02:24 PM	Bubbler valve closed
8/1/2011	4:02:24 PM	Main Vac valve opened
8/1/2011	4:02:24 PM	Helium MFC set to  0.000000
8/1/2011	4:02:24 PM	H2 MFC set to  0.000000
8/1/2011	4:02:24 PM	BCl3 MFC set to  0.000000
8/1/2011	4:02:24 PM	PHl3 MFC set to  0.000000
8/1/2011	4:02:24 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:02:24 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:02:24 PM	Tube furnace set to 150
8/1/2011	4:02:54 PM	H2 valve closed
8/1/2011	4:02:54 PM	BCl3 valve closed
8/1/2011	4:02:54 PM	PH3 valve closed
8/1/2011	4:02:54 PM	SiCl4 pre valve closed
8/1/2011	4:02:54 PM	SiCl4 post valve closed
8/1/2011	4:02:54 PM	Bypass valve closed
8/1/2011	4:02:54 PM	Bubbler valve closed
8/1/2011	4:02:54 PM	Helium valve opened
8/1/2011	4:02:54 PM	Main Vac valve opened
8/1/2011	4:02:54 PM	Helium MFC set to  20.000000
8/1/2011	4:02:54 PM	H2 MFC set to  0.000000
8/1/2011	4:02:54 PM	BCl3 MFC set to  0.000000
8/1/2011	4:02:54 PM	PHl3 MFC set to  0.000000
8/1/2011	4:02:54 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:02:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:02:54 PM	Tube furnace set to 150
8/1/2011	4:03:24 PM	Helium valve closed
8/1/2011	4:03:24 PM	H2 valve closed
8/1/2011	4:03:24 PM	BCl3 valve closed
8/1/2011	4:03:24 PM	PH3 valve closed
8/1/2011	4:03:24 PM	SiCl4 pre valve closed
8/1/2011	4:03:24 PM	SiCl4 post valve closed
8/1/2011	4:03:24 PM	Bypass valve closed
8/1/2011	4:03:24 PM	Bubbler valve closed
8/1/2011	4:03:24 PM	Main Vac valve opened
8/1/2011	4:03:24 PM	Helium MFC set to  0.000000
8/1/2011	4:03:24 PM	H2 MFC set to  0.000000
8/1/2011	4:03:24 PM	BCl3 MFC set to  0.000000
8/1/2011	4:03:24 PM	PHl3 MFC set to  0.000000
8/1/2011	4:03:24 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:03:24 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:03:24 PM	Tube furnace set to 150
8/1/2011	4:03:54 PM	H2 valve closed
8/1/2011	4:03:54 PM	BCl3 valve closed
8/1/2011	4:03:54 PM	PH3 valve closed
8/1/2011	4:03:54 PM	SiCl4 pre valve closed
8/1/2011	4:03:54 PM	SiCl4 post valve closed
8/1/2011	4:03:54 PM	Bypass valve closed
8/1/2011	4:03:54 PM	Bubbler valve closed
8/1/2011	4:03:54 PM	Helium valve opened
8/1/2011	4:03:54 PM	Main Vac valve opened
8/1/2011	4:03:54 PM	Helium MFC set to  20.000000
8/1/2011	4:03:54 PM	H2 MFC set to  0.000000
8/1/2011	4:03:54 PM	BCl3 MFC set to  0.000000
8/1/2011	4:03:54 PM	PHl3 MFC set to  0.000000
8/1/2011	4:03:54 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:03:54 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:03:54 PM	Tube furnace set to 150
8/1/2011	4:04:25 PM	Helium valve closed
8/1/2011	4:04:25 PM	H2 valve closed
8/1/2011	4:04:25 PM	BCl3 valve closed
8/1/2011	4:04:25 PM	PH3 valve closed
8/1/2011	4:04:25 PM	SiCl4 pre valve closed
8/1/2011	4:04:25 PM	SiCl4 post valve closed
8/1/2011	4:04:25 PM	Bypass valve closed
8/1/2011	4:04:25 PM	Bubbler valve closed
8/1/2011	4:04:25 PM	Main Vac valve opened
8/1/2011	4:04:25 PM	Helium MFC set to  0.000000
8/1/2011	4:04:25 PM	H2 MFC set to  0.000000
8/1/2011	4:04:25 PM	BCl3 MFC set to  0.000000
8/1/2011	4:04:25 PM	PHl3 MFC set to  0.000000
8/1/2011	4:04:25 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:04:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:04:25 PM	Tube furnace set to 150
8/1/2011	4:04:55 PM	H2 valve closed
8/1/2011	4:04:55 PM	BCl3 valve closed
8/1/2011	4:04:55 PM	PH3 valve closed
8/1/2011	4:04:55 PM	SiCl4 pre valve closed
8/1/2011	4:04:55 PM	SiCl4 post valve closed
8/1/2011	4:04:55 PM	Bypass valve closed
8/1/2011	4:04:55 PM	Bubbler valve closed
8/1/2011	4:04:55 PM	Helium valve opened
8/1/2011	4:04:55 PM	Main Vac valve opened
8/1/2011	4:04:55 PM	Helium MFC set to  20.000000
8/1/2011	4:04:55 PM	H2 MFC set to  0.000000
8/1/2011	4:04:55 PM	BCl3 MFC set to  0.000000
8/1/2011	4:04:55 PM	PHl3 MFC set to  0.000000
8/1/2011	4:04:55 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:04:55 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:04:55 PM	Tube furnace set to 150
8/1/2011	4:05:25 PM	Helium valve closed
8/1/2011	4:05:25 PM	H2 valve closed
8/1/2011	4:05:25 PM	BCl3 valve closed
8/1/2011	4:05:25 PM	PH3 valve closed
8/1/2011	4:05:25 PM	SiCl4 pre valve closed
8/1/2011	4:05:25 PM	SiCl4 post valve closed
8/1/2011	4:05:25 PM	Bypass valve closed
8/1/2011	4:05:25 PM	Bubbler valve closed
8/1/2011	4:05:25 PM	Main Vac valve opened
8/1/2011	4:05:25 PM	Helium MFC set to  0.000000
8/1/2011	4:05:25 PM	H2 MFC set to  0.000000
8/1/2011	4:05:25 PM	BCl3 MFC set to  0.000000
8/1/2011	4:05:25 PM	PHl3 MFC set to  0.000000
8/1/2011	4:05:25 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:05:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:05:25 PM	Tube furnace set to 150
8/1/2011	4:05:55 PM	H2 valve closed
8/1/2011	4:05:55 PM	BCl3 valve closed
8/1/2011	4:05:55 PM	PH3 valve closed
8/1/2011	4:05:55 PM	SiCl4 pre valve closed
8/1/2011	4:05:55 PM	SiCl4 post valve closed
8/1/2011	4:05:55 PM	Bypass valve closed
8/1/2011	4:05:55 PM	Bubbler valve closed
8/1/2011	4:05:55 PM	Helium valve opened
8/1/2011	4:05:55 PM	Main Vac valve opened
8/1/2011	4:05:55 PM	Helium MFC set to  20.000000
8/1/2011	4:05:55 PM	H2 MFC set to  0.000000
8/1/2011	4:05:55 PM	BCl3 MFC set to  0.000000
8/1/2011	4:05:55 PM	PHl3 MFC set to  0.000000
8/1/2011	4:05:55 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:05:55 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:05:55 PM	Tube furnace set to 150
8/1/2011	4:06:25 PM	Helium valve closed
8/1/2011	4:06:25 PM	H2 valve closed
8/1/2011	4:06:25 PM	BCl3 valve closed
8/1/2011	4:06:25 PM	PH3 valve closed
8/1/2011	4:06:25 PM	SiCl4 pre valve closed
8/1/2011	4:06:25 PM	SiCl4 post valve closed
8/1/2011	4:06:25 PM	Bypass valve closed
8/1/2011	4:06:25 PM	Bubbler valve closed
8/1/2011	4:06:25 PM	Main Vac valve opened
8/1/2011	4:06:25 PM	Helium MFC set to  0.000000
8/1/2011	4:06:25 PM	H2 MFC set to  0.000000
8/1/2011	4:06:25 PM	BCl3 MFC set to  0.000000
8/1/2011	4:06:25 PM	PHl3 MFC set to  0.000000
8/1/2011	4:06:25 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:06:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:06:25 PM	Tube furnace set to 150
8/1/2011	4:06:55 PM	H2 valve closed
8/1/2011	4:06:56 PM	BCl3 valve closed
8/1/2011	4:06:56 PM	PH3 valve closed
8/1/2011	4:06:56 PM	SiCl4 pre valve closed
8/1/2011	4:06:56 PM	SiCl4 post valve closed
8/1/2011	4:06:56 PM	Bypass valve closed
8/1/2011	4:06:56 PM	Bubbler valve closed
8/1/2011	4:06:56 PM	Helium valve opened
8/1/2011	4:06:56 PM	Main Vac valve opened
8/1/2011	4:06:56 PM	Helium MFC set to  20.000000
8/1/2011	4:06:56 PM	H2 MFC set to  0.000000
8/1/2011	4:06:56 PM	BCl3 MFC set to  0.000000
8/1/2011	4:06:56 PM	PHl3 MFC set to  0.000000
8/1/2011	4:06:56 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:06:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:06:56 PM	Tube furnace set to 150
8/1/2011	4:07:26 PM	Helium valve closed
8/1/2011	4:07:26 PM	H2 valve closed
8/1/2011	4:07:26 PM	BCl3 valve closed
8/1/2011	4:07:26 PM	PH3 valve closed
8/1/2011	4:07:26 PM	SiCl4 pre valve closed
8/1/2011	4:07:26 PM	SiCl4 post valve closed
8/1/2011	4:07:26 PM	Bypass valve closed
8/1/2011	4:07:26 PM	Bubbler valve closed
8/1/2011	4:07:26 PM	Main Vac valve opened
8/1/2011	4:07:26 PM	Helium MFC set to  0.000000
8/1/2011	4:07:26 PM	H2 MFC set to  0.000000
8/1/2011	4:07:26 PM	BCl3 MFC set to  0.000000
8/1/2011	4:07:26 PM	PHl3 MFC set to  0.000000
8/1/2011	4:07:26 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:07:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:07:26 PM	Tube furnace set to 150
8/1/2011	4:07:56 PM	H2 valve closed
8/1/2011	4:07:56 PM	BCl3 valve closed
8/1/2011	4:07:56 PM	PH3 valve closed
8/1/2011	4:07:56 PM	SiCl4 pre valve closed
8/1/2011	4:07:56 PM	SiCl4 post valve closed
8/1/2011	4:07:56 PM	Bypass valve closed
8/1/2011	4:07:56 PM	Bubbler valve closed
8/1/2011	4:07:56 PM	Helium valve opened
8/1/2011	4:07:56 PM	Main Vac valve opened
8/1/2011	4:07:56 PM	Helium MFC set to  20.000000
8/1/2011	4:07:56 PM	H2 MFC set to  0.000000
8/1/2011	4:07:56 PM	BCl3 MFC set to  0.000000
8/1/2011	4:07:56 PM	PHl3 MFC set to  0.000000
8/1/2011	4:07:56 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:07:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:07:56 PM	Tube furnace set to 150
8/1/2011	4:08:26 PM	Helium valve closed
8/1/2011	4:08:26 PM	H2 valve closed
8/1/2011	4:08:26 PM	BCl3 valve closed
8/1/2011	4:08:26 PM	PH3 valve closed
8/1/2011	4:08:26 PM	SiCl4 pre valve closed
8/1/2011	4:08:26 PM	SiCl4 post valve closed
8/1/2011	4:08:26 PM	Bypass valve closed
8/1/2011	4:08:26 PM	Bubbler valve closed
8/1/2011	4:08:26 PM	Main Vac valve opened
8/1/2011	4:08:26 PM	Helium MFC set to  0.000000
8/1/2011	4:08:26 PM	H2 MFC set to  0.000000
8/1/2011	4:08:26 PM	BCl3 MFC set to  0.000000
8/1/2011	4:08:26 PM	PHl3 MFC set to  0.000000
8/1/2011	4:08:26 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:08:26 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:08:26 PM	Tube furnace set to 150
8/1/2011	4:08:56 PM	H2 valve closed
8/1/2011	4:08:56 PM	BCl3 valve closed
8/1/2011	4:08:56 PM	PH3 valve closed
8/1/2011	4:08:56 PM	SiCl4 pre valve closed
8/1/2011	4:08:56 PM	SiCl4 post valve closed
8/1/2011	4:08:56 PM	Bypass valve closed
8/1/2011	4:08:56 PM	Bubbler valve closed
8/1/2011	4:08:56 PM	Helium valve opened
8/1/2011	4:08:56 PM	Main Vac valve opened
8/1/2011	4:08:56 PM	Helium MFC set to  20.000000
8/1/2011	4:08:56 PM	H2 MFC set to  0.000000
8/1/2011	4:08:56 PM	BCl3 MFC set to  0.000000
8/1/2011	4:08:56 PM	PHl3 MFC set to  0.000000
8/1/2011	4:08:56 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:08:56 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:08:56 PM	Tube furnace set to 150
8/1/2011	4:09:26 PM	Helium valve closed
8/1/2011	4:09:26 PM	H2 valve closed
8/1/2011	4:09:26 PM	BCl3 valve closed
8/1/2011	4:09:26 PM	PH3 valve closed
8/1/2011	4:09:26 PM	SiCl4 pre valve closed
8/1/2011	4:09:26 PM	SiCl4 post valve closed
8/1/2011	4:09:26 PM	Bypass valve closed
8/1/2011	4:09:26 PM	Bubbler valve closed
8/1/2011	4:09:27 PM	Main Vac valve opened
8/1/2011	4:09:27 PM	Helium MFC set to  0.000000
8/1/2011	4:09:27 PM	H2 MFC set to  0.000000
8/1/2011	4:09:27 PM	BCl3 MFC set to  0.000000
8/1/2011	4:09:27 PM	PHl3 MFC set to  0.000000
8/1/2011	4:09:27 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:09:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:09:27 PM	Tube furnace set to 150
8/1/2011	4:09:28 PM	Run finished at 4:09 PM
8/1/2011	4:14:50 PM	Helium MFC set to  20.000000
8/1/2011	4:14:51 PM	Helium valve opened
8/1/2011	4:17:23 PM	Helium valve closed
8/1/2011	4:17:27 PM	Helium MFC set to  0.000000
8/1/2011	4:18:27 PM	Recipe started at 4:18 PM
8/1/2011	4:18:27 PM	Helium valve closed
8/1/2011	4:18:27 PM	H2 valve closed
8/1/2011	4:18:27 PM	BCl3 valve closed
8/1/2011	4:18:27 PM	PH3 valve closed
8/1/2011	4:18:27 PM	SiCl4 pre valve closed
8/1/2011	4:18:27 PM	SiCl4 post valve closed
8/1/2011	4:18:27 PM	Main Vac valve closed
8/1/2011	4:18:27 PM	Bypass valve closed
8/1/2011	4:18:27 PM	Bubbler valve closed
8/1/2011	4:18:27 PM	Helium MFC set to  0.000000
8/1/2011	4:18:27 PM	H2 MFC set to  0.000000
8/1/2011	4:18:27 PM	BCl3 MFC set to  0.000000
8/1/2011	4:18:27 PM	PHl3 MFC set to  0.000000
8/1/2011	4:18:27 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:18:27 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:18:27 PM	Tube furnace set to 0
8/1/2011	4:18:30 PM	Helium valve closed
8/1/2011	4:18:30 PM	BCl3 valve closed
8/1/2011	4:18:30 PM	PH3 valve closed
8/1/2011	4:18:30 PM	SiCl4 pre valve closed
8/1/2011	4:18:30 PM	SiCl4 post valve closed
8/1/2011	4:18:30 PM	Main Vac valve closed
8/1/2011	4:18:30 PM	Bypass valve closed
8/1/2011	4:18:31 PM	Bubbler valve closed
8/1/2011	4:18:31 PM	H2 valve opened
8/1/2011	4:18:31 PM	Helium MFC set to  0.000000
8/1/2011	4:18:31 PM	H2 MFC set to  500.000000
8/1/2011	4:18:31 PM	BCl3 MFC set to  0.000000
8/1/2011	4:18:31 PM	PHl3 MFC set to  0.000000
8/1/2011	4:18:31 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:18:31 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:18:31 PM	Tube furnace set to 0
8/1/2011	4:19:34 PM	Helium valve closed
8/1/2011	4:19:34 PM	BCl3 valve closed
8/1/2011	4:19:34 PM	PH3 valve closed
8/1/2011	4:19:34 PM	SiCl4 pre valve closed
8/1/2011	4:19:34 PM	SiCl4 post valve closed
8/1/2011	4:19:34 PM	Main Vac valve closed
8/1/2011	4:19:34 PM	Bypass valve closed
8/1/2011	4:19:34 PM	H2 valve opened
8/1/2011	4:19:34 PM	Bubbler valve opened
8/1/2011	4:19:34 PM	Helium MFC set to  0.000000
8/1/2011	4:19:34 PM	H2 MFC set to  500.000000
8/1/2011	4:19:34 PM	BCl3 MFC set to  0.000000
8/1/2011	4:19:34 PM	PHl3 MFC set to  0.000000
8/1/2011	4:19:34 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:19:34 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:19:34 PM	Tube furnace set to 0
8/1/2011	4:19:35 PM	Helium valve closed
8/1/2011	4:19:35 PM	BCl3 valve closed
8/1/2011	4:19:35 PM	PH3 valve closed
8/1/2011	4:19:35 PM	SiCl4 pre valve closed
8/1/2011	4:19:35 PM	SiCl4 post valve closed
8/1/2011	4:19:35 PM	Main Vac valve closed
8/1/2011	4:19:35 PM	Bypass valve closed
8/1/2011	4:19:35 PM	H2 valve opened
8/1/2011	4:19:35 PM	Bubbler valve opened
8/1/2011	4:19:35 PM	Helium MFC set to  0.000000
8/1/2011	4:19:35 PM	H2 MFC set to  500.000000
8/1/2011	4:19:35 PM	BCl3 MFC set to  0.000000
8/1/2011	4:19:35 PM	PHl3 MFC set to  0.000000
8/1/2011	4:19:35 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:19:35 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:19:36 PM	Tube furnace set to 1000
8/1/2011	4:39:36 PM	Helium valve closed
8/1/2011	4:39:36 PM	PH3 valve closed
8/1/2011	4:39:36 PM	Main Vac valve closed
8/1/2011	4:39:36 PM	Bypass valve closed
8/1/2011	4:39:36 PM	H2 valve opened
8/1/2011	4:39:36 PM	BCl3 valve opened
8/1/2011	4:39:36 PM	SiCl4 pre valve opened
8/1/2011	4:39:36 PM	SiCl4 post valve opened
8/1/2011	4:39:36 PM	Bubbler valve opened
8/1/2011	4:39:36 PM	Helium MFC set to  0.000000
8/1/2011	4:39:36 PM	H2 MFC set to  500.000000
8/1/2011	4:39:36 PM	BCl3 MFC set to  2.300000
8/1/2011	4:39:36 PM	PHl3 MFC set to  0.000000
8/1/2011	4:39:36 PM	SiCl4 MFC set to  50.000000
8/1/2011	4:39:36 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:39:36 PM	Tube furnace set to 1000
8/1/2011	4:56:16 PM	Helium valve closed
8/1/2011	4:56:16 PM	BCl3 valve closed
8/1/2011	4:56:16 PM	PH3 valve closed
8/1/2011	4:56:16 PM	SiCl4 pre valve closed
8/1/2011	4:56:16 PM	SiCl4 post valve closed
8/1/2011	4:56:16 PM	Main Vac valve closed
8/1/2011	4:56:16 PM	Bypass valve closed
8/1/2011	4:56:16 PM	H2 valve opened
8/1/2011	4:56:16 PM	Bubbler valve opened
8/1/2011	4:56:16 PM	Helium MFC set to  0.000000
8/1/2011	4:56:16 PM	H2 MFC set to  500.000000
8/1/2011	4:56:16 PM	BCl3 MFC set to  0.000000
8/1/2011	4:56:16 PM	PHl3 MFC set to  0.000000
8/1/2011	4:56:16 PM	SiCl4 MFC set to  0.000000
8/1/2011	4:56:16 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	4:56:16 PM	Tube furnace set to 750
8/1/2011	5:01:16 PM	H2 valve closed
8/1/2011	5:01:16 PM	BCl3 valve closed
8/1/2011	5:01:16 PM	PH3 valve closed
8/1/2011	5:01:16 PM	SiCl4 pre valve closed
8/1/2011	5:01:16 PM	SiCl4 post valve closed
8/1/2011	5:01:16 PM	Main Vac valve closed
8/1/2011	5:01:16 PM	Bypass valve closed
8/1/2011	5:01:16 PM	Helium valve opened
8/1/2011	5:01:16 PM	Bubbler valve opened
8/1/2011	5:01:16 PM	Helium MFC set to  500.000000
8/1/2011	5:01:16 PM	H2 MFC set to  0.000000
8/1/2011	5:01:16 PM	BCl3 MFC set to  0.000000
8/1/2011	5:01:16 PM	PHl3 MFC set to  0.000000
8/1/2011	5:01:16 PM	SiCl4 MFC set to  0.000000
8/1/2011	5:01:16 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:01:16 PM	Tube furnace set to 0
8/1/2011	5:07:18 PM	Run aborted at 5:07 PM
8/1/2011	5:07:18 PM	Helium valve closed
8/1/2011	5:07:18 PM	H2 valve closed
8/1/2011	5:07:18 PM	BCl3 valve closed
8/1/2011	5:07:18 PM	PH3 valve closed
8/1/2011	5:07:18 PM	SiCl4 pre valve closed
8/1/2011	5:07:18 PM	SiCl4 post valve closed
8/1/2011	5:07:18 PM	Bypass valve closed
8/1/2011	5:07:18 PM	Main Vac valve closed
8/1/2011	5:07:18 PM	Bubbler valve closed
8/1/2011	5:07:18 PM	Helium MFC set to  0.000000
8/1/2011	5:07:18 PM	H2 MFC set to  0.000000
8/1/2011	5:07:18 PM	BCl3 MFC set to  0.000000
8/1/2011	5:07:18 PM	PHl3 MFC set to  0.000000
8/1/2011	5:07:18 PM	SiCl4 MFC set to  0.000000
8/1/2011	5:07:18 PM	Tube furnace set to 0
8/1/2011	5:07:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	5:07:21 PM	Recipe started at 5:07 PM
8/1/2011	5:07:21 PM	Helium valve closed
8/1/2011	5:07:21 PM	H2 valve closed
8/1/2011	5:07:21 PM	BCl3 valve closed
8/1/2011	5:07:21 PM	PH3 valve closed
8/1/2011	5:07:21 PM	SiCl4 pre valve closed
8/1/2011	5:07:21 PM	SiCl4 post valve closed
8/1/2011	5:07:21 PM	Main Vac valve closed
8/1/2011	5:07:21 PM	Bypass valve closed
8/1/2011	5:07:21 PM	Bubbler valve closed
8/1/2011	5:07:21 PM	Helium MFC set to  0.000000
8/1/2011	5:07:21 PM	H2 MFC set to  0.000000
8/1/2011	5:07:21 PM	BCl3 MFC set to  0.000000
8/1/2011	5:07:21 PM	PHl3 MFC set to  0.000000
8/1/2011	5:07:21 PM	SiCl4 MFC set to  0.000000
8/1/2011	5:07:21 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:07:21 PM	Tube furnace set to 0
8/1/2011	5:07:24 PM	H2 valve closed
8/1/2011	5:07:24 PM	BCl3 valve closed
8/1/2011	5:07:24 PM	PH3 valve closed
8/1/2011	5:07:24 PM	SiCl4 pre valve closed
8/1/2011	5:07:24 PM	SiCl4 post valve closed
8/1/2011	5:07:24 PM	Main Vac valve closed
8/1/2011	5:07:24 PM	Bypass valve closed
8/1/2011	5:07:24 PM	Bubbler valve closed
8/1/2011	5:07:24 PM	Helium valve opened
8/1/2011	5:07:24 PM	Helium MFC set to  500.000000
8/1/2011	5:07:24 PM	H2 MFC set to  0.000000
8/1/2011	5:07:24 PM	BCl3 MFC set to  0.000000
8/1/2011	5:07:24 PM	PHl3 MFC set to  0.000000
8/1/2011	5:07:24 PM	SiCl4 MFC set to  0.000000
8/1/2011	5:07:24 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:07:25 PM	Tube furnace set to 0
8/1/2011	5:07:25 PM	Helium valve closed
8/1/2011	5:07:25 PM	H2 valve closed
8/1/2011	5:07:25 PM	BCl3 valve closed
8/1/2011	5:07:25 PM	PH3 valve closed
8/1/2011	5:07:25 PM	SiCl4 pre valve closed
8/1/2011	5:07:25 PM	SiCl4 post valve closed
8/1/2011	5:07:25 PM	Main Vac valve closed
8/1/2011	5:07:25 PM	Bypass valve closed
8/1/2011	5:07:25 PM	Bubbler valve closed
8/1/2011	5:07:25 PM	Helium MFC set to  0.000000
8/1/2011	5:07:25 PM	H2 MFC set to  0.000000
8/1/2011	5:07:25 PM	BCl3 MFC set to  0.000000
8/1/2011	5:07:25 PM	PHl3 MFC set to  0.000000
8/1/2011	5:07:25 PM	SiCl4 MFC set to  0.000000
8/1/2011	5:07:25 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:07:25 PM	Tube furnace set to 0
8/1/2011	5:07:26 PM	Run finished at 5:07 PM
8/1/2011	5:07:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	5:17:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	5:17:07 PM	Recipe started at 5:17 PM
8/1/2011	5:17:07 PM	Helium valve closed
8/1/2011	5:17:07 PM	H2 valve closed
8/1/2011	5:17:07 PM	BCl3 valve closed
8/1/2011	5:17:07 PM	PH3 valve closed
8/1/2011	5:17:07 PM	SiCl4 pre valve closed
8/1/2011	5:17:07 PM	SiCl4 post valve closed
8/1/2011	5:17:07 PM	Main Vac valve closed
8/1/2011	5:17:07 PM	Bubbler valve closed
8/1/2011	5:17:07 PM	Bypass valve opened
8/1/2011	5:17:07 PM	Helium MFC set to  0.000000
8/1/2011	5:17:07 PM	H2 MFC set to  0.000000
8/1/2011	5:17:07 PM	BCl3 MFC set to  0.000000
8/1/2011	5:17:07 PM	PHl3 MFC set to  0.000000
8/1/2011	5:17:07 PM	SiCl4 MFC set to  0.000000
8/1/2011	5:17:07 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:17:07 PM	Tube furnace set to 0
8/1/2011	5:18:15 PM	Helium valve closed
8/1/2011	5:18:15 PM	H2 valve closed
8/1/2011	5:18:15 PM	BCl3 valve closed
8/1/2011	5:18:15 PM	PH3 valve closed
8/1/2011	5:18:15 PM	SiCl4 pre valve closed
8/1/2011	5:18:15 PM	SiCl4 post valve closed
8/1/2011	5:18:15 PM	Main Vac valve closed
8/1/2011	5:18:15 PM	Bubbler valve closed
8/1/2011	5:18:15 PM	Bypass valve opened
8/1/2011	5:18:15 PM	Helium MFC set to  0.000000
8/1/2011	5:18:15 PM	H2 MFC set to  0.000000
8/1/2011	5:18:15 PM	BCl3 MFC set to  0.000000
8/1/2011	5:18:15 PM	PHl3 MFC set to  0.000000
8/1/2011	5:18:15 PM	SiCl4 MFC set to  0.000000
8/1/2011	5:18:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:18:15 PM	Tube furnace set to 0
8/1/2011	5:19:15 PM	Helium valve closed
8/1/2011	5:19:15 PM	H2 valve closed
8/1/2011	5:19:15 PM	BCl3 valve closed
8/1/2011	5:19:15 PM	PH3 valve closed
8/1/2011	5:19:15 PM	SiCl4 pre valve closed
8/1/2011	5:19:15 PM	SiCl4 post valve closed
8/1/2011	5:19:15 PM	Bypass valve closed
8/1/2011	5:19:15 PM	Bubbler valve closed
8/1/2011	5:19:15 PM	Main Vac valve opened
8/1/2011	5:19:15 PM	Helium MFC set to  0.000000
8/1/2011	5:19:15 PM	H2 MFC set to  0.000000
8/1/2011	5:19:15 PM	BCl3 MFC set to  0.000000
8/1/2011	5:19:15 PM	PHl3 MFC set to  0.000000
8/1/2011	5:19:15 PM	SiCl4 MFC set to  0.000000
8/1/2011	5:19:15 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	5:19:15 PM	Tube furnace set to 0
8/1/2011	5:19:16 PM	Run finished at 5:19 PM
8/1/2011	5:19:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	5:58:33 PM	Helium MFC set to  20.000000
8/1/2011	5:58:35 PM	Helium valve opened
8/1/2011	6:08:31 PM	Helium valve closed
8/1/2011	6:08:34 PM	Helium MFC set to  0.000000
8/1/2011	6:09:11 PM	Recipe started at 6:09 PM
8/1/2011	6:09:11 PM	Helium valve closed
8/1/2011	6:09:11 PM	H2 valve closed
8/1/2011	6:09:11 PM	BCl3 valve closed
8/1/2011	6:09:11 PM	PH3 valve closed
8/1/2011	6:09:11 PM	SiCl4 pre valve closed
8/1/2011	6:09:11 PM	SiCl4 post valve closed
8/1/2011	6:09:11 PM	Main Vac valve closed
8/1/2011	6:09:11 PM	Bypass valve closed
8/1/2011	6:09:11 PM	Bubbler valve closed
8/1/2011	6:09:11 PM	Helium MFC set to  0.000000
8/1/2011	6:09:11 PM	H2 MFC set to  0.000000
8/1/2011	6:09:11 PM	BCl3 MFC set to  0.000000
8/1/2011	6:09:11 PM	PHl3 MFC set to  0.000000
8/1/2011	6:09:11 PM	SiCl4 MFC set to  0.000000
8/1/2011	6:09:11 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	6:09:11 PM	Tube furnace set to 0
8/1/2011	6:09:14 PM	Helium valve closed
8/1/2011	6:09:14 PM	BCl3 valve closed
8/1/2011	6:09:14 PM	PH3 valve closed
8/1/2011	6:09:14 PM	SiCl4 pre valve closed
8/1/2011	6:09:14 PM	SiCl4 post valve closed
8/1/2011	6:09:14 PM	Main Vac valve closed
8/1/2011	6:09:14 PM	Bypass valve closed
8/1/2011	6:09:14 PM	Bubbler valve closed
8/1/2011	6:09:14 PM	H2 valve opened
8/1/2011	6:09:14 PM	Helium MFC set to  0.000000
8/1/2011	6:09:14 PM	H2 MFC set to  500.000000
8/1/2011	6:09:14 PM	BCl3 MFC set to  0.000000
8/1/2011	6:09:14 PM	PHl3 MFC set to  0.000000
8/1/2011	6:09:14 PM	SiCl4 MFC set to  0.000000
8/1/2011	6:09:14 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	6:09:14 PM	Tube furnace set to 0
8/1/2011	6:10:17 PM	Helium valve closed
8/1/2011	6:10:17 PM	BCl3 valve closed
8/1/2011	6:10:17 PM	PH3 valve closed
8/1/2011	6:10:17 PM	SiCl4 pre valve closed
8/1/2011	6:10:17 PM	SiCl4 post valve closed
8/1/2011	6:10:17 PM	Main Vac valve closed
8/1/2011	6:10:17 PM	Bypass valve closed
8/1/2011	6:10:17 PM	H2 valve opened
8/1/2011	6:10:17 PM	Bubbler valve opened
8/1/2011	6:10:17 PM	Helium MFC set to  0.000000
8/1/2011	6:10:17 PM	H2 MFC set to  500.000000
8/1/2011	6:10:17 PM	BCl3 MFC set to  0.000000
8/1/2011	6:10:17 PM	PHl3 MFC set to  0.000000
8/1/2011	6:10:17 PM	SiCl4 MFC set to  0.000000
8/1/2011	6:10:17 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	6:10:17 PM	Tube furnace set to 0
8/1/2011	6:10:19 PM	Helium valve closed
8/1/2011	6:10:19 PM	BCl3 valve closed
8/1/2011	6:10:19 PM	PH3 valve closed
8/1/2011	6:10:19 PM	SiCl4 pre valve closed
8/1/2011	6:10:19 PM	SiCl4 post valve closed
8/1/2011	6:10:19 PM	Main Vac valve closed
8/1/2011	6:10:19 PM	Bypass valve closed
8/1/2011	6:10:19 PM	H2 valve opened
8/1/2011	6:10:19 PM	Bubbler valve opened
8/1/2011	6:10:19 PM	Helium MFC set to  0.000000
8/1/2011	6:10:19 PM	H2 MFC set to  500.000000
8/1/2011	6:10:19 PM	BCl3 MFC set to  0.000000
8/1/2011	6:10:19 PM	PHl3 MFC set to  0.000000
8/1/2011	6:10:19 PM	SiCl4 MFC set to  0.000000
8/1/2011	6:10:19 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	6:10:19 PM	Tube furnace set to 1000
8/1/2011	6:30:19 PM	Helium valve closed
8/1/2011	6:30:19 PM	PH3 valve closed
8/1/2011	6:30:19 PM	Main Vac valve closed
8/1/2011	6:30:19 PM	Bypass valve closed
8/1/2011	6:30:19 PM	H2 valve opened
8/1/2011	6:30:19 PM	BCl3 valve opened
8/1/2011	6:30:19 PM	SiCl4 pre valve opened
8/1/2011	6:30:19 PM	SiCl4 post valve opened
8/1/2011	6:30:19 PM	Bubbler valve opened
8/1/2011	6:30:19 PM	Helium MFC set to  0.000000
8/1/2011	6:30:19 PM	H2 MFC set to  500.000000
8/1/2011	6:30:19 PM	BCl3 MFC set to  2.300000
8/1/2011	6:30:19 PM	PHl3 MFC set to  0.000000
8/1/2011	6:30:19 PM	SiCl4 MFC set to  50.000000
8/1/2011	6:30:19 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	6:30:19 PM	Tube furnace set to 1000
8/1/2011	6:46:59 PM	Helium valve closed
8/1/2011	6:46:59 PM	BCl3 valve closed
8/1/2011	6:46:59 PM	PH3 valve closed
8/1/2011	6:46:59 PM	SiCl4 pre valve closed
8/1/2011	6:46:59 PM	SiCl4 post valve closed
8/1/2011	6:46:59 PM	Main Vac valve closed
8/1/2011	6:46:59 PM	Bypass valve closed
8/1/2011	6:46:59 PM	H2 valve opened
8/1/2011	6:46:59 PM	Bubbler valve opened
8/1/2011	6:46:59 PM	Helium MFC set to  0.000000
8/1/2011	6:46:59 PM	H2 MFC set to  500.000000
8/1/2011	6:46:59 PM	BCl3 MFC set to  0.000000
8/1/2011	6:46:59 PM	PHl3 MFC set to  0.000000
8/1/2011	6:46:59 PM	SiCl4 MFC set to  0.000000
8/1/2011	6:46:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	6:46:59 PM	Tube furnace set to 750
8/1/2011	6:51:59 PM	H2 valve closed
8/1/2011	6:51:59 PM	BCl3 valve closed
8/1/2011	6:51:59 PM	PH3 valve closed
8/1/2011	6:51:59 PM	SiCl4 pre valve closed
8/1/2011	6:51:59 PM	SiCl4 post valve closed
8/1/2011	6:51:59 PM	Main Vac valve closed
8/1/2011	6:51:59 PM	Bypass valve closed
8/1/2011	6:51:59 PM	Helium valve opened
8/1/2011	6:51:59 PM	Bubbler valve opened
8/1/2011	6:51:59 PM	Helium MFC set to  500.000000
8/1/2011	6:51:59 PM	H2 MFC set to  0.000000
8/1/2011	6:51:59 PM	BCl3 MFC set to  0.000000
8/1/2011	6:51:59 PM	PHl3 MFC set to  0.000000
8/1/2011	6:51:59 PM	SiCl4 MFC set to  0.000000
8/1/2011	6:51:59 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	6:51:59 PM	Tube furnace set to 0
8/1/2011	7:02:34 PM	Run aborted at 7:02 PM
8/1/2011	7:02:34 PM	Helium valve closed
8/1/2011	7:02:34 PM	H2 valve closed
8/1/2011	7:02:34 PM	BCl3 valve closed
8/1/2011	7:02:34 PM	PH3 valve closed
8/1/2011	7:02:34 PM	SiCl4 pre valve closed
8/1/2011	7:02:34 PM	SiCl4 post valve closed
8/1/2011	7:02:34 PM	Bypass valve closed
8/1/2011	7:02:34 PM	Main Vac valve closed
8/1/2011	7:02:34 PM	Bubbler valve closed
8/1/2011	7:02:34 PM	Helium MFC set to  0.000000
8/1/2011	7:02:34 PM	H2 MFC set to  0.000000
8/1/2011	7:02:34 PM	BCl3 MFC set to  0.000000
8/1/2011	7:02:34 PM	PHl3 MFC set to  0.000000
8/1/2011	7:02:34 PM	SiCl4 MFC set to  0.000000
8/1/2011	7:02:34 PM	Tube furnace set to 0
8/1/2011	7:02:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	7:02:36 PM	Recipe started at 7:02 PM
8/1/2011	7:02:36 PM	Helium valve closed
8/1/2011	7:02:36 PM	H2 valve closed
8/1/2011	7:02:36 PM	BCl3 valve closed
8/1/2011	7:02:36 PM	PH3 valve closed
8/1/2011	7:02:36 PM	SiCl4 pre valve closed
8/1/2011	7:02:36 PM	SiCl4 post valve closed
8/1/2011	7:02:36 PM	Main Vac valve closed
8/1/2011	7:02:36 PM	Bypass valve closed
8/1/2011	7:02:36 PM	Bubbler valve closed
8/1/2011	7:02:36 PM	Helium MFC set to  0.000000
8/1/2011	7:02:36 PM	H2 MFC set to  0.000000
8/1/2011	7:02:36 PM	BCl3 MFC set to  0.000000
8/1/2011	7:02:36 PM	PHl3 MFC set to  0.000000
8/1/2011	7:02:36 PM	SiCl4 MFC set to  0.000000
8/1/2011	7:02:36 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	7:02:36 PM	Tube furnace set to 0
8/1/2011	7:02:39 PM	H2 valve closed
8/1/2011	7:02:39 PM	BCl3 valve closed
8/1/2011	7:02:39 PM	PH3 valve closed
8/1/2011	7:02:39 PM	SiCl4 pre valve closed
8/1/2011	7:02:39 PM	SiCl4 post valve closed
8/1/2011	7:02:39 PM	Main Vac valve closed
8/1/2011	7:02:39 PM	Bypass valve closed
8/1/2011	7:02:39 PM	Bubbler valve closed
8/1/2011	7:02:39 PM	Helium valve opened
8/1/2011	7:02:39 PM	Helium MFC set to  500.000000
8/1/2011	7:02:39 PM	H2 MFC set to  0.000000
8/1/2011	7:02:39 PM	BCl3 MFC set to  0.000000
8/1/2011	7:02:39 PM	PHl3 MFC set to  0.000000
8/1/2011	7:02:39 PM	SiCl4 MFC set to  0.000000
8/1/2011	7:02:39 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	7:02:40 PM	Tube furnace set to 0
8/1/2011	7:02:40 PM	Helium valve closed
8/1/2011	7:02:40 PM	H2 valve closed
8/1/2011	7:02:40 PM	BCl3 valve closed
8/1/2011	7:02:40 PM	PH3 valve closed
8/1/2011	7:02:40 PM	SiCl4 pre valve closed
8/1/2011	7:02:40 PM	SiCl4 post valve closed
8/1/2011	7:02:40 PM	Main Vac valve closed
8/1/2011	7:02:40 PM	Bypass valve closed
8/1/2011	7:02:40 PM	Bubbler valve closed
8/1/2011	7:02:40 PM	Helium MFC set to  0.000000
8/1/2011	7:02:40 PM	H2 MFC set to  0.000000
8/1/2011	7:02:40 PM	BCl3 MFC set to  0.000000
8/1/2011	7:02:40 PM	PHl3 MFC set to  0.000000
8/1/2011	7:02:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	7:02:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	7:02:40 PM	Tube furnace set to 0
8/1/2011	7:02:41 PM	Run finished at 7:02 PM
8/1/2011	7:02:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/1/2011	7:07:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/1/2011	7:07:40 PM	Recipe started at 7:07 PM
8/1/2011	7:07:40 PM	Helium valve closed
8/1/2011	7:07:40 PM	H2 valve closed
8/1/2011	7:07:40 PM	BCl3 valve closed
8/1/2011	7:07:40 PM	PH3 valve closed
8/1/2011	7:07:40 PM	SiCl4 pre valve closed
8/1/2011	7:07:40 PM	SiCl4 post valve closed
8/1/2011	7:07:40 PM	Main Vac valve closed
8/1/2011	7:07:40 PM	Bubbler valve closed
8/1/2011	7:07:40 PM	Bypass valve opened
8/1/2011	7:07:40 PM	Helium MFC set to  0.000000
8/1/2011	7:07:40 PM	H2 MFC set to  0.000000
8/1/2011	7:07:40 PM	BCl3 MFC set to  0.000000
8/1/2011	7:07:40 PM	PHl3 MFC set to  0.000000
8/1/2011	7:07:40 PM	SiCl4 MFC set to  0.000000
8/1/2011	7:07:40 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	7:07:40 PM	Tube furnace set to 0
8/1/2011	7:08:45 PM	Helium valve closed
8/1/2011	7:08:45 PM	H2 valve closed
8/1/2011	7:08:45 PM	BCl3 valve closed
8/1/2011	7:08:45 PM	PH3 valve closed
8/1/2011	7:08:45 PM	SiCl4 pre valve closed
8/1/2011	7:08:45 PM	SiCl4 post valve closed
8/1/2011	7:08:45 PM	Main Vac valve closed
8/1/2011	7:08:45 PM	Bubbler valve closed
8/1/2011	7:08:45 PM	Bypass valve opened
8/1/2011	7:08:45 PM	Helium MFC set to  0.000000
8/1/2011	7:08:45 PM	H2 MFC set to  0.000000
8/1/2011	7:08:45 PM	BCl3 MFC set to  0.000000
8/1/2011	7:08:45 PM	PHl3 MFC set to  0.000000
8/1/2011	7:08:45 PM	SiCl4 MFC set to  0.000000
8/1/2011	7:08:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	7:08:45 PM	Tube furnace set to 0
8/1/2011	7:09:45 PM	Helium valve closed
8/1/2011	7:09:45 PM	H2 valve closed
8/1/2011	7:09:45 PM	BCl3 valve closed
8/1/2011	7:09:45 PM	PH3 valve closed
8/1/2011	7:09:45 PM	SiCl4 pre valve closed
8/1/2011	7:09:45 PM	SiCl4 post valve closed
8/1/2011	7:09:45 PM	Bypass valve closed
8/1/2011	7:09:45 PM	Bubbler valve closed
8/1/2011	7:09:45 PM	Main Vac valve opened
8/1/2011	7:09:45 PM	Helium MFC set to  0.000000
8/1/2011	7:09:45 PM	H2 MFC set to  0.000000
8/1/2011	7:09:45 PM	BCl3 MFC set to  0.000000
8/1/2011	7:09:45 PM	PHl3 MFC set to  0.000000
8/1/2011	7:09:45 PM	SiCl4 MFC set to  0.000000
8/1/2011	7:09:45 PM	Bypass solenoid MFC set to  0.000000
8/1/2011	7:09:46 PM	Tube furnace set to 0
8/1/2011	7:09:47 PM	Run finished at 7:09 PM
8/1/2011	7:09:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
